• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권12호
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• 조명전기설비학회논문지
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• 제14권2호
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• pp.68-74
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• 2000

본 논문에샤는 동축형 전극구조 변화시의 중첨방전에 의해 발생되는 오존의 농도 효율 및 발생량 특생에 대해서 논했다. 오존생정올 향상시키기 위해 오존방전환의 새로운 형태를 제안하였으며 연면방전과 무성방전이 동시에 분리된 방전공간내에서 발생하도록 하였다. 전극구조에 대한 오존발생 의존성을 조사하지 워해 구조가 다른 형태(2전극-1캡,3전극-2캡 및 3전극-3캡형)인 방전관올 설계.제작하였고 실험은 오존발생특성을 살펴보지 위하여 60[Hz] 전원을 사용하여 무성방전과 연면반전을 같은 갭내에 중첩시켜 측정한 결과 무성방전을 이용한 전극구조보다 중첩방전올 이용한 전극에서 오존의 농도, 효율 및 발생량이 향상됨율 확인할 수 있었다.

• 대한전기학회논문지
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• 제36권9호
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• pp.651-654
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• 1987

There are a number of small scale application fields of ozone, such as food conservation and/or storage in refrigerators, containers and storage rooms, deodorization in the production and living areas, protection against biohazards, bleaching of fabrics, etc. For these applications, miniaturization, ozone controllability and costdown of the ozonizer are the most essential points, whereas power efficiency is the most imporant factor in the case of a large scale ozonizer used in various industrial applications. It has been developed a novel sawtooth-to-cylinder type micro-ozonizer meeting above the three points by using a negative pulse corona discharge. As a result of the observations of pulse coronas affecting ozone generation, it is found that the maximum ozone concentration is generated at the pulse streamer coronas in both positive and negative case. The ozone concentration (20ppm/2l/min) generated by the negative pulse corona is about 2 times higher than that of the positive pulse corona, and could be controllable linearly by adjusting the dc input voltage of the [supply-inth ] cinventional small scale ozonizers. As a result, the present ozonizer is also very good to be used as a micro-ozonizer.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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• pp.170-172
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• 2002

Thin, Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped diamond(BDD) were used as anode for generating ozone gas by electrolysis of acid solution. In this work, we have studied ozone generating system using BDD electrode. In order to determine the ozone generation properties of diamond electrode, experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable for electrolyte while $PbO_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2259-2261
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• 1999

In this paper, an ozonizer, which can generate individual and superposed silent discharge, using three-phase voltage has been designed and manufactured. The ozonizer consists of 3 electrodes(Central Electrode, Internal Electrode and External Electrode) and 2 gaps(gap between Central Electrode and Internal Electrode, gap between Internal Electrode and External Electrode). Ozone is generated according to voltage supplying method to each electrode by individual silent discharge and three-phase superposed discharge. The characteristics of ozone generation were investigated with variation of discharge power and the quantity of supplied gas($O_2$). In case of individual silent discharge, the maximum values of ozone concentration, ozone generation and ozone yield were obtained between internal electrode and external electrode, and its values were 2300[ppm], 570[mg/h] and 745[g/kWh] respectively. Each maximum values was 5039[ppm], 1773[mg/h] and 851[g/kWh] respectively, when three-phase superposed silent discharge was employed. Therefore, characteristics of ozone generation with three-phase voltage are improved compared with single-phase voltage because silent discharge is generated continuously.

• 조명전기설비학회논문지
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• 제28권5호
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• pp.76-81
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• 2014

The ozone generation is commonly made with silent discharge method using quartz glass dielectric. In this paper, using $Al_2O_3$ dielectric to instead of the traditional quartz glass dielectric to improve the system efficiency is presented. The dielectric was manufactured as tube shape (Internal diameter${\times}$ Outside diameter: $11{\times}15mm$) using 99% $Al_2O_3$ ceramic. The characteristics of dielectric discharge and ozone generation were studied of experiments with variation of discharge power, discharge electrode space and rate of flow for supplied gas ($O_2$/Air). As the experimental results, in the same discharge space, the ozone concentration continuously increased with input power increasing, and ozone yield increased until saturation happened. Also, the expended power increased with discharge space extended due to discharge power increased. In additional, the ozone concentration of oxygen ozone was higher than air that was observed when using oxygen ozone in proposed experiments.

• 대한환경공학회지
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• 제39권10호
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• pp.549-555
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• 2017

본 연구는 오존용해탱크 구조에 따라 마이크로오존버블의 분포, 에너지 소비, 수처리 효율이 어떻게 변하는지를 알아보고자 하였다. 오존용해탱크 내부의 격판은 압력의 변화, 전단력, 선회유동을 발생시키고 이는 버블 직경의 크기에 변화를 준다. 버블 직경의 크기는 내부의 격판에 따라 10.5%까지 차이가 났다. 오존 버블 직경의 변화는 에너지 소비와 관련이 깊다. 오존 버블이 작아질수록 버블생성에너지는 높아지지만 용존 효율이 올라가면서 오존생산에너지는 줄어들게 된다. 따라서 버블생성에너지와 오존생산에너지의 합이 최소인 마이크로오존버블을 생성하는 오존용해탱크를 선정하여야 한다. 동일한 양의 오존가스을 방류수에 주입하기 위해 소비된 에너지는 내부의 격판에 따라 2.5%까지 차이가 났다. 하지만 수처리 효율까지 고려한다면 오존용해탱크 선정 조건이 달라진다. 오존 버블이 작아질수록 증가하는 자유라디칼이 수처리에 매우 효율적이기 때문이다. 동일한 오존주입농도에서도 내부의 격판에 따라 수처리 효율이 10.4%까지 차이가 났다. 따라서 수처리 효율과 에너지 효율을 고려하여 합리적인 마이크로오존버블을 생성하는 오존용해탱크 구조에 대하여 연구하였다.

• 전기학회논문지
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• 제56권5호
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• pp.933-937
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• 2007

A point plate type nonthermal plasma reactor, with a grounded cylindrical third electrode which closely- encompasses the needle point, have been investigated with an emphasis on the role of the third electrode. It was found that the point plate airgap, with the grounded third electrode, had a switching characteristic on its I V characteristics for negative and positive discharges, which is very different from that of a conventional point plate airgap without a third electrode. The corona discharge and ozone generation characteristics of the plasma reactor with the grounded cylindrical third electrode, such as the corona onset voltage. the breakdown voltage. the corona current. and the amount of output ozone, were influenced significantly by the height of the third electrode. and these characteristics can be controlled by adjusting the height of the third electrode.

• 조명전기설비학회논문지
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• 제14권2호
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• pp.59-67
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• 2000

본 논문에서는 단목무성방전과 3상 전압을 사용한 중첩무성방전을 인가할 수 있는 오존발생기를 설계.제작하였다. 오존발생기는 3개의 전극(중심천극, 내부천극 및 외부전극)과 2개의 방전갭(중심전극과 내부전극 사이의 갭 및 내부전극과 외부전극 사이의 갭)으로 구성되어 있으며, 단목무성방전과 3상 중접방전이 인가되는 방식에 따라 오존화 가스가 생성된다. 이때 방전전력과 원료가스($O_2$)의 유량의 변화에 따른 오존생성특성을 연구한 결과, 단독무성방전의 경우, 최대 2300[ppm], 570[mg/h] 및 745[g/kWh]의 오존생성특성을 얻을 수 있었으며,3상 전압을 인가한 경우에는 5039[ppm], 1773[mg/h] 및 851[g/kWh]을 각각 얻을 수 있었다. 따라서 3상 중첩무성방전 이 단독무성방전에 비하여 오존생성특성올 향상시킬 수 있음을 확인하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권8호
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• pp.468-476
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• 2000

Nowadays, ozone is mainly utilized for water treatment and home equipments. Although the demand for ozone is increasing, the ozone yield of silent discharge type ozonizer is low. Therefore, it is expected to improve the energy efficiency and ozone yield of an ozonizer. In this paper, a new ozone generation system is proposed. The 60[Hz] three-phase voltage is applied to three-phase superposed discharge type ozonizer(3PSDO) which has three electrodes(central, internal and external electrodes). There is no discharge pause time when three-phase voltage is applied due to 120-degree phase difference of applied voltage. The synergy effect of the three-phase superposed discharge type ozonizer is investigated by comparing with the three sort of single-phase discharge type ozonizer(1PDO). So, three-phase superposed discharge type ozonizer is able to obtain high ozone yield, and optimize discharge space, because this can increase the discharge power at low applied voltage.