• 한국전기전자재료학회논문지
• /
• 제24권8호
• /
• pp.674-677
• /
• 2011

The dependency of sputtering power on the electrical performances in amorphous HIZO-TFT (hafnium-indium-zinc-oxide thin film transistors) has been investigated. The HIZO channel layers were prepared by using radio frequency (RF) magnetron sputtering method with different sputtering power at room temperature. TOF-SIMS (time of flight secondary ion mass spectrometry) was performed to confirm doping of hafnium atom in IZO film. The field effect mobility (${\mu}FE$) increased and threshold voltage ($V_{th}$) shifted to negative direction with increasing sputtering power. This result can be attributed to the high energy particles knocking-out oxygen atoms. As a result, oxygen vacancies generated in HIZO channel layer with increasing sputtering power resulted in negative shift in Vth and increase in on-current.

• 한국생물공학회:학술대회논문집
• /
• 한국생물공학회 2001년도 추계학술발표대회
• /
• pp.762-766
• /
• 2001

The nar promoter of Escherichia coli was known to induce maximally under anaerobic or microaerobic conditions in the presence of nitrate. In this study, the nar promoter was tested to see whether the expression level of a reporter gene which fused lacZ gene at nar promoter's downstream, in the some gram negative host strains(Agrobacterium, Pseudomonas and Rhizobium). A nar promoter system(Combination of nar promoter and gram negative strain) was grown under aerobic conditions to absorbance at 600 nm of nearly 2.0 and then, the nar promoter was induced by lowering DO to 1-2% with alternating microaerobic and aerobic condition in the fermentor cultures, using different gram negative hosts. For a wild type nar promoter (pNW61), it was possible to maintain production of ${\beta}-galactosidase$ activity per cell(specific ${\beta}-galactosidase$ activity) at 14,000, 9600, 45 Miller units in the presence of 1% nitrate. and for a nitrate - independent nar promoter (pNW618) at 12,000, 10,400 and 58 Miller units in the absence of nitrate ion, respectively.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.276-276
• /
• 2013

Time-Of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) and Atomic Force Microscopy (AFM) are the useful instruments to measure nanostructures of material surfaces. Surface pattern formation in blending homopolymer and diblock copolymer films was investigated as a function of film thickness and annealing conditions. In this study, surface structures of blending homopolymer [deuterated polystyrene (Mn 20,000), poly (methyl methacrylate) (Mn 18,000)] and diblock copolymer [Poly (deuteratedstyrene(d8)-b-methyl methacrylate) (Mn 19,500-18,100)] films were observed. The AFM result indicated that the nanostructures and film thickness depended on temperature, concentration and solvent. TOF-SIMS depth profiling was obtained for the lamellar morphology of symmetric dPS-b-PMMA which is found to orient parallel to the surface of the substrate. Elemental and molecular depth profiles measured in the negative ion mode by a Cs+ primary ion beam demonstrate variations in hydrogen, deuterium, carbon, oxygen, hydrocarbons and deuterated hydrocarbons within the diblock copolymer according to the depth.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.466-468
• /
• 2012

Amorphous InGaZnO (${\alpha}$-IGZO) thin-film transistors (TFTs) are are very promising due to their potential use in thin film electronics and display drivers [1]. However, the stability of AOS-TFTs under the various stresses has been issued for the practical AOSs applications [2]. Up to now, many researchers have studied to understand the sub-gap density of states (DOS) as the root cause of instability [3]. Nomura et al. reported that these deep defects are located in the surface layer of the ${\alpha}$-IGZO channel [4]. Also, Kim et al. reported that the interfacial traps can be affected by different RF-power during RF magnetron sputtering process [5]. It is well known that these trap states can influence on the performances and stabilities of ${\alpha}$-IGZO TFTs. Nevertheless, it has not been reported how these defect states are created during conventional RF magnetron sputtering. In general, during conventional RF magnetron sputtering process, negative oxygen ions (NOI) can be generated by electron attachment in oxygen atom near target surface and accelerated up to few hundreds eV by self-bias of RF magnetron sputter; the high energy bombardment of NOIs generates bulk defects in oxide thin films [6-10] and can change the defect states of ${\alpha}$-IGZO thin film. In this paper, we have confirmed that the NOIs accelerated by the self-bias were one of the dominant causes of instability in ${\alpha}$-IGZO TFTs when the channel layer was deposited by conventional RF magnetron sputtering system. Finally, we will introduce our novel technology named as Magnetic Field Shielded Sputtering (MFSS) process [9-10] to eliminate the NOI bombardment effects and present how much to be improved the instability of ${\alpha}$-IGZO TFTs by this new deposition method.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 센서 박막재료
• /
• pp.35-37
• /
• 2001

The Al etching was studied employing negative ions generated in the downstream $Cl_2$ plasma. In order to etch the Al film practically on an insulator covered electrode coupled with RF power, reduction of the negative self bias voltage (Vdc) was examined using a magnetic filter which trapped electrons. Addition of $SF_6$ and $H_2$ to a $Cl_2/BCl_3$ mixture reduced significantly Vdc.

• 한국진공학회지
• /
• 제9권1호
• /
• pp.36-41
• /
• 2000

$SnO-2$ thin films for thin film secondary battery anode were deposited n glass substrate with stain-less steel collector and charge/discharge experiments were conducted to investigate feasibility of $SnO-2$ thin film as a new anode material. The as-deposited films were pure $SnO-2$ phase which is not related to deposition condition. The grain size on the surface of as-deposited films increased with increase of oxygen partial pressure. However, the grain size did not show any change above oxygen partial pressure of 80:20. The surface roughness of the as-deposited films increased after decreasing because of resputtering effect of oxygen negative ion in plasma. All films showed typical $SnO-2$ anode characteristics which has a side effect at the first cycle, which is not related to the deposition condition. The charge/discharge experiments of 200cycles indicated that capacity of $SnO-2$ films depended on oxygen contents and surface roughness. The cycle characteristics was determined by initial charge/discharge reaction. The $SnO-2$ film with low initial capacity showed more stable cycle characteristics than film with high initial capacity.

• 한국환경복원기술학회지
• /
• 제4권1호
• /
• pp.32-40
• /
• 2001

Quantifications of fish farm influences on stream water quality may provide basic informations on watershed management to reduce environmental impact due to fish farm development and to conserve stream water quality in forested watershed area. In this research stream water qualities around Mt. Paekun area were monitored seasonally and the following results were obtained. Due to the increase of pH in effluent water from the fish farm it was believed that alkalization of stream water can be accelerated by large scale development of fish farms in the forested watershed area. Negative effects on stream water quality were observed by indications of increase in electrical conductivity and temperature of effluent water from the fish farm. Decreases in physicochemical indices such as the amount of dissolved oxygen, percentage of dissolved oxygen, total amount of cation, total amount of anion and total amount of ion in effluent water from the fish farm were also negative aspects in downstream ecology. It is recommended that water purification system as well as eco-friendly fish farm design should be incorporated to large scale fish farm development plan in forested watershed area.

• 한국환경복원기술학회지
• /
• 제2권3호
• /
• pp.54-63
• /
• 1999

Quantifications of fish farm influences on stream water quality may provide basic informations on watershed management to reduce environmental impact due to fish farm development and to conserve stream water quality in forested watershed area. In this research stream water qualities around (Mt.) Paekun area were monitored by seasons and the following results were obtained. Due to the increase of pH in effluent water from the fish farm it was believed that alkalization of stream water can be accelerated by large scale development of fish farms in the forested watershed area. Negative effects on stream water quality was also observed by indications of increase in electrical conductivity and temperature of effluent water from the fish farm. Decreases of physicochemical indexes such as the amount of dissolved oxygen, percentage of dissolved oxygen and total amount of ion in effluent water from the fish farm were also negative aspects in downstream ecology. It is recommended that water purification system as well as eco-friendly fish farm design be incorporated to large scale fish farm development plan in forested watershed area.

• 공업화학
• /
• 제21권3호
• /
• pp.278-283
• /
• 2010

폭발성기를 가진 azido기($-CH_2N_3$), nitrato기($-CH_2ONO_2$) 그리고 hydrazino기(-$CH_2N_2H_3$)로 치환된 옥소란 고폭 화약류의 산 촉매 하에서 중합반응을 반경험적인 MINDO/3, MNDO, AM1 방법 등을 사용하여 이론적으로 고찰하였다. 옥소란 고폭 화약류의 친핵성 및 염기성은 옥소란 산소원자의 음전하크기로 설명할 수 있고, 중합하의 성장단계에서 옥소란의 반응성은 옥소란의 반응중심 탄소원자의 양전하크기와 친전자체의 낮은 LUMO 에너지에 좌우됨을 알 수 있다. 옥소란 고폭 화약류의 고리형 oxonium 이온형이 열린 carbenium 이온형으로 전환되는 과정은 oxonium 이온과 carbenium 이온 사이의 계산된 안정화 에너지(17.950~30.197 kcal/mol)에 의하면 carbenium 이온이 더 유리함을 예측 할 수 있다. 평형상태의 고리형 oxonium 이온과 열린 carbenium 이온의 농도 크기가 반응 메카니즘의 결정단계이며, 산 촉매 하의 형태와 계산을 기초로 하여 빠른 평형을 예상하여 볼 때 선폴리머(prepolymer) 성장단계에서 $S_N1$ 메카니즘이 $S_N2$ 메카니즘보다 빠르게 반응 할 것으로 예측된다.

• 분석과학
• /
• 제24권2호
• /
• pp.78-84
• /
• 2011

본 연구에서는 양성 및/또는 음성 이온 방식으로 저에너지 충돌-유발 분해(CID)를 이용한 serine protease 저해제인 camostat 와 그것의 분해산물인 4-(4-guanidinobenzoyloxy)phenylacetic acid (GBPA)의 분해 패턴을 전자분무 소스가 있는 사중극자 텐덤 질량분석기(ESI-MS/MS)를 이용하여 최초로 조사하였다. Camostat의 양이온 CID 질량 스펙트럼 분석결과, 분자구조내 에스테르 결합을 이루는 카르보닐 기와 산소 원자사이의 단일 결합(C-O) 분해가 우선적으로 일어나고, guanidine 기의 초기 손실보다는 N,Ndimethylcarbamoylmethyl기의 초기 손실이 더 잘 일어난다는 것이 특징적으로 확인되었다. GBPA의 양이온 CID 스펙트럼의 경우는, 4-guanidinobenzoyloxy 기에 있는 카르보닐 기와 산소원자 사이의 초기 분해가 일어나서 m/z 145에서 가장 강도가 높은 피크를 만들었다. 반면에, GBPA의 음이온 스펙트럼은 m/z 312의 모분자 이온에서 $CO_2$와 NH=C=NH의 순차적인 중성 손실로 인하여 m/z 226의 가장 강도가 높은 피크가 특징적으로 생성되었다.