• Title/Summary/Keyword: Oxidized material

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Electrical characteristics of 3-D stacked CMOS Inverters using laser crystallization method (레이저 결정화 방법을 적용한 3차원 적층 CMOS 인버터의 전기적 특성 개선)

  • Lee, Woo-Hyun;Cho, Won-Ju;Oh, Soon-Young;Ahn, Chang-Geun;Jung, Jong-Wan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.118-119
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    • 2007
  • High performance three-dimensional (3-D) stacked poly-Si complementary metal-oxide semiconductor (CMOS) inverters with a high quality laser crystallized channel were fabricated. Low temperature crystallization methods of a-Si film using the excimer-laser annealing (ELA) and sequential lateral solidification (SLS) were performed. The NMOS thin-film-transistor (TFT) at lower layer of CMOS was fabricated on oxidized bulk Si substrate, and the PMOS TFT at upper layer of CMOS was fabricated on interlayer dielectric film. The 3-D stacked poly-Si CMOS inverter showed excellent electrical characteristics and was enough for the vertical integrated CMOS applications.

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Characterization of Surface at Ti Oxide Films Converted by Anodic Spark Discharge (양극산화 불꽃 방전에 의한 Ti 산화피막의 표면특성)

  • Song, Jae-Joo;Han, Byung-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.545-546
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    • 2006
  • This study was performed to investigate the surface properties of electrochemically oxidized pure titanium by anodic spark discharging method. Commercially pure titanium plates of $10{\times}20{\times}1[mm]$ in dimensions were polished sequentially emery paper. Anodizing was performed at current density of $76.2\;[mA/cm^2]$, application voltage of 290, 350, 400 [V] using a regulated DC power supply, which allowed automatic transition constant current when a preset maximum voltage has been reached. The Ti surface oxided films was characterized by scanning electron microscope(SEM). The precipitation of HA(Hydroxyapatite) crystals on anodized surface was greatly accelerated by hydrothermal treatment. The concentrations of DL-$\alpha$-Glycerolphosphate Magnesiurn(DL-$\alpha$-GP-Mg) salt and Ca acetate in an electrolyte was highly affected the precipitation of HA crystals converted by Ti Anodized oxide films by Shape of Impulse Voltage.

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Synthesis and Cathodoluminescence of Tetrapod and Multipod-shaped ZnO Nanostructures by Oxidation of Zn in Air Atmosphere (공기 중 대기압 분위기에서 Zn의 산화에 의해 생성된 Tetrapod와 Multipod 형태의 나노구조와 음극선 발광 특성)

  • Lee, Geun-Hyoung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.3
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    • pp.256-260
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    • 2011
  • ZnO nanostructures with tetrapod, needle and multipod shapes were synthesized without catalysts through a simple thermal oxidation of metallic Zn powder in alumina crucible under air atmosphere. X-ray diffraction data revealed that the ZnO nanostructures had wurtzite structure of hexagonal phase. Energy dispersive X-ray (EDX) spectra showed that the ZnO was of high purity. After the oxidation of Zn powder, white colored product was mainly observed and yellow colored product was observed only a very little on the surface of the oxidized source materials. The white product consisted of tetrapods, while yellow product was composed of needles and multipods. Cathodoluminescece spectra showed that the crystalline quality of tetrapods was better that those of needles and multipods.

Electrochemical Properties of Mixture Langmuir-Blogett Films of Fatty Acid containing Azobenzene and Phospholipid (아조벤젠기를 가진 지방산과 인지질 혼합 LB막의 전기화학적 특성)

  • Park, Keun-Ho;Choi, Sung-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.920-923
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    • 2004
  • We have investgated on the monolayer LB film of BASH-DMPC mixture on an ITO for the photoisomerization by light irradiation. We measured electrochemical properties by using cyclic voltammetry with a three-electrode system, An Ag/AgCl reference electrode, a platinum wire counter electrode and LB film-coated ITO working electrode in $NaClO_4$ solution at a variable concentration and monolayer LB films. A measuring range was reduced from initial potential to -1350mV, continuously oxidized to 1650 mV and measured to the initial point. The scan rate were 50, 100, 150 and 200 mV/s. As a results, LB films of 8A5H-DMPC appeared reversible process caused by the reduction-oxidation current from the cyclic voltammogram.

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The characteristics of polycrystalline 3C-SiC microhotplates for high temperature M/NEMS (고온 M/NEMS용 3C-SiC 마이크로 히터 특성)

  • Jeong, Jae-Min;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.252-252
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    • 2008
  • The microhotplates consisting of a Pt-ased heating element on AlN/poly 3C-SiC layers were fabricated. The microhotplate has a $600{\mu}m{\times}600{\mu}m$ square shaped membrane which made of $1{\mu}m$ thick ploycrystalline 3C-SiC suspended by four legs. 3C-SiC is known for excellent chemical durability, mechanical strength and sustaining of high temperature. The membrane is fabricated by surface micromachining using oxidized Si sacrificial layer. The Pt thin film is used for heating material and resist temperature sensor. The fabrication methodology allows intergration of an array of heating material and resist temperature detector. For reasons of a short response time and a high sensitivity a uniform temperature profile is desired. The dissipation of microhotplate was examined by a IR thermoviewer and the power consumption was measured. Measured and simulated results are compared and analyzed. Thermal characterization of the microhotplates shows that significant reduction in power consumption was achieved using suspended structure.

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Triphenyl phosphate as an Efficient Electrolyte Additive for Ni-rich NCM Cathode Materials

  • Jung, Kwangeun;Oh, Si Hyoung;Yim, Taeeun
    • Journal of Electrochemical Science and Technology
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    • v.12 no.1
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    • pp.67-73
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    • 2021
  • Nickel-rich lithium nickel-cobalt-manganese oxides (NCM) are viewed as promising cathode materials for lithium-ion batteries (LIBs); however, their poor cycling performance at high temperature is a critical hurdle preventing expansion of their applications. We propose the use of a functional electrolyte additive, triphenyl phosphate (TPPa), which can form an effective cathode-electrolyte interphase (CEI) layer on the surface of Ni-rich NCM cathode material by electrochemical reactions. Linear sweep voltammetry confirms that the TPPa additive is electrochemically oxidized at around 4.83 V (vs. Li/Li+) and it participates in the formation of a CEI layer on the surface of NCM811 cathode material. During high temperature cycling, TPPa greatly improves the cycling performance of NCM811 cathode material, as a cell cycled with TPPa-containing electrolyte exhibits a retention (133.7 mA h g-1) of 63.5%, while a cell cycled with standard electrolyte shows poor cycling retention (51.3%, 108.3 mA h g-1). Further systematic analyses on recovered NCM811 cathodes demonstrate the effectiveness of the TPPa-based CEI layer in the cell, as electrolyte decomposition is suppressed in the cell cycled with TPPa-containing electrolyte. This confirms that TPPa is effective at increasing the surface stability of NCM811 cathode material because the TPPa-initiated POx-based CEI layer prevents electrolyte decomposition in the cell even at high temperatures.

A Study on Surface Characteristics and Stability of Implants Treated with Anodic Oxidation and Fluoride Incorporation (양극 산화와 불소 화합물로 처리한 임플랜트의 표면 특성 및 골유착 안정성에 관한 연구)

  • Lim, Jae-Bin;Cho, In-Ho
    • Journal of Dental Rehabilitation and Applied Science
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    • v.22 no.4
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    • pp.349-365
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    • 2006
  • State of problem : A number of investigation about increase of surface area via various surface treatments and modification of surface constituent have been carried out. Purpose : The surface characteristics and stability of implants treated with anodic oxidation, fluoride ion incorporation, and groups treated with both methods were evaluated. Material and method : Specimens were divided into six groups, group 1 was the control group with machined surface implants, groups 2 and 3 were anodic oxidized implants (group 2 was treated with 1M $H_2SO_4$ and 185V, group 3 was treated with 0.25M $H_2SO_4$ and $H_3PO_4$ and 300V). Groups 4, 5 and 6 were treated with fluoride. Group 4 was machined implants treated with 0.1% HF, and groups 5 and 6 were groups 2 and 3 treated with 10% NaF respectively. Using variable methods, implant surface characteristics were observed, and the implant stability was evaluated on rabbit tibia at 0, 4, 8 and 12 weeks. Result : 1. In comparison of the surface characteristics of anodic oxidized groups, group 2 displayed delicate and uniform oxidation layer with small pore size containing Ti, C, O and showed mainly rutile, but group 3 displayed large pore size and irregular oxidation layer with many crators. 2. In comparison of the surface characteristics of fluoride treated groups 4, 5, 6 and non-fluoride treated groups 1, 2, 3, the configurations were similar but the fluoride treated groups displayed rougher surfaces and composition analysis revealed fluoride in groups 4, 5, 6. 3. The fluoride incorporated anodic oxidized groups showed the highest resonance frequency values and removal torque values, and the values decreased in the order of anodic oxidized groups, fluoride treated group, control group. 4. According to implant stability tests, group 2 and 3 showed significantly higher values than the control group (P<.05). The fluoride treated groups showed relatively higher values than the non fluoride treated groups and there were significant difference between group 4 and group 1 (P<.05). Conclusion : From the results above, it can be considered that the anodic oxidation method is an effective method to increase initial bone stability and osseointegration and fluoride containing implant surfaces enhance new bone formation. Implants containing both of these methods should increase osseointegration, and reduce the healing period.

A Study on the Performance of Friction Materials using Reduced Iron (환원분철을 이용한 마찰재의 성능에 관한 연구)

  • Kim, Byoung-Sam;Mun, Sang-Don;Chi, Chang-Heon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.3
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    • pp.593-598
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    • 2008
  • It was made a friction material of various kinds by adding 10%, 20% and 30% of reduced iron. It was obtained by a connected-reduced process in a blast furnace sludge and oxidized iron, instead of $BaSO_4$, which is already a used inorganic filling material among a component of a brake friction material. This was done by a basic physical property test, a friction performance test to use a brake dynamometer. Moreover, in case of an add in the friction material, instead of using $BaSO_4$, the more expensive filling material, the reduced iron was also better because it has an excellent a friction property of an exothermic temperature, wear, etc. was 10%. At G1 and G3 specimens, a shear strength and a bonding strength of the friction material was decreased to be able to increase an amount of the blast furnace sludge and the reduced iron, but an application of all friction materials appeared enough strength.

Humidity sensors using porous silicon layer with mesa structure (메사구조를 갖는 다공질 실리콘 습도 센서)

  • Jeon, Byung-Hyun;Yang, Kyu-Yull;Kim, Seong-Jeen
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.05b
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    • pp.25-28
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    • 2000
  • A capacitance-type humidity sensors in which porous silicon layer is used as humidity-sensing material was developed. This sensors was fabricated monolithically to be compatible with the typical IC process technology except for the formation of porous silicon layer. As the sensors is made as a mesa structure, the correct measurement of capacitance is expected because it can remove the effect of the parasitic capacitance from the bottom layer and another junctions. To do this, the sensor was fabricated using process steps such as localized formation of porous silicon, oxidation of porous silicon layer and etching of oxidized porous silicon layer. From completed sensors, capacitance response was measured on the relative humidity of 25 to 95% at room temperature. As the result the measured capacitance showed the increase over 300% at the low frequency of 120Hz, and showed little dependence on the temperature between 10 to $40^{\circ}C$.

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C-V Response Properties of Alcohol Vapor Sensors Based on Porous Silicon (다공질 실리콘 알코올 가스 센서의 C-V 응답 특성)

  • Kim, Seong-Jeen;Lee, Sang-Hoon;Choi, Bok-Gil;Sung, Man-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.6
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    • pp.592-597
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    • 2004
  • Porous silicon(PS) has received much attention as a sensitive material of chemical sensors because of its large internal surface area. In this work, we fabricated gas-sensing devices based on the porous silicon layer which could be applicable to the measurement of blood alcohol content(BAC), and estimated their electrical properties. The structure of the sensor is similar to an MIS (metal-insulator-semiconductor) diode and consists of thin Au/oxidized PS/PS/p-Si/Al, where the p-Si substrate is etched anisotropically to reduce the thickness. We measured C-V curves from two types of the samples with the PS layer treated by the different anodization current density of 60 or 100 mA/cm$^2$, in order to compare the sensitivity. As a result, the magnitude and variation of capacitances from the devices with the PS formed under the current density of 100 mA/cm$^2$ were found to be more detectable due to the larger internal surface.