• 제목/요약/키워드: Oxide unetch

검색결과 1건 처리시간 0.015초

BOE 약액을 사용하는 공정의 로봇 동작 개선 (Improved Mechanical Motion in Oxide Wet Etch Process with BOE chemical)

  • 김응도;손원진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.363-363
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    • 2010

  • After oxide wet etch with BOE(Buffered Oxide Etchant), triangle type defect maps were inspected and SEM image showed them unetch of oxide layer. As decreasing design rule, oxide unetch has become a crucial issue and has affected the yield and quality.

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