• Title/Summary/Keyword: Oxide thickness

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Extending the Single-Mode-Operation Radius of the Oxide-VCSEL by Controlling the Thickness and Position of the Oxide-Layer (Oxide층의 두께와 위치 조절을 통한 oxido-VCSEL의 단일모드 동작반경 확장)

  • 김남길;김상배
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.9
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    • pp.31-37
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    • 2004
  • We have proposed a design methodology for large active-area single-mode VCSELS, which have higher reliability and output power, and are well-suited for high-speed operation. The key idea underlying the design methodology is to reduce the effective index difference between active and cladding regions by controlling the thickness and position of the oxide layer. The idea is confirmed by the self-consistent effective index method. By placing the oxide layer position properly, we can increase the radius of the oxide aperture for single-mode operation by 3 times.

Development of Real Time Thickness Measurement System of Thin Film for 12" Wafer Spin Etcher (12" 웨이퍼 Spin etcher용 실시간 박막두께 측정장치의 개발)

  • 김노유;서학석
    • Journal of the Semiconductor & Display Technology
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    • v.2 no.2
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    • pp.9-15
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    • 2003
  • This paper proposes a thickness measurement method of silicon-oxide and poly-silicon film deposited on 12" silicon wafer for spin etcher. Halogen lamp is used as a light source for generating a wide-band spectrum, which is guided and focused on the wafer surface through a optical fiber cable. Interference signal from the film is detected by optical sensor to determine the thickness of the film using spectrum analysis and several signal processing techniques including curve-fitting and adaptive filtering. Test wafers with three kinds of priori-known films, polysilicon(300 nm), silicon-oxide(500 nm) and silicon-oxide(600 nm), are measured while the wafer is spinning at 20 Hz and DI water flowing on the wafer surface. From experiment results the algorithm presented in the paper is proved to be effective with accuracy of maximum 0.8% error.rror.

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Study on Improvement of Corrosion Resistance and Wear Resistance by Anodizing and Sealing Treatment with Nano-diamond Powder on aluminum (알루미늄의 아노다이징과 나노 다이아몬드 분말 봉공처리에 의한 내식성과 내마모성 향상에 관한 연구)

  • Kang, Soo Young;Lee, Dae Won
    • Journal of the Korean institute of surface engineering
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    • v.47 no.3
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    • pp.121-127
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    • 2014
  • In this study, in order to improve corrosion resistance and wear resistance of aluminum, surface treatment was made by anodizing with oxalic acid solution and sealing with nano-diamond powder. Average size of nano-diamond powder was 30nm. Anodizing with oxalic acid made many pores in the aluminum oxide layer. Pore size and oxide thickness were investigated by scanning electron microscope (SEM). Pore size increased as temperature increased and voltage increased. It was possible to make oxide layer with pore diameter more than 50 nm. Oxide thickness increased as temperature and voltage and treatment time increased. Oxide layer with above $10{\mu}m$ thickness was made. Aluminum oxide layer with many pores was sealed by water with nano-diamond powder. Surface morphology was investigated by SEM. After sealing treatment with nano-diamond powder, corrosion resistance, wear resistance and hardness increased.

Carrier Trap Characteristics varying with insulator thickness of MIS device (MIS소자의 절연막 두께 변화에 따른 캐리어 트랩 특성)

  • 정양희
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2002.11a
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    • pp.800-803
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    • 2002
  • The MONOS capacitor are fabricated to investigate the carrier trapping due to Fowler-Nordheim tunneling injection. The carrier trapping in scaled multi-dielectric(ONO) depends on the nitride and Op oxide thickness under Fowler_Nordheim tunneling injection. Carriers captured at nitride film could not escape from nitride to gate, but be captured at top oxide and nitride interface traps because of barrier height of top oxide. Therefore, it is expected that the MONOS memory devices using multi dielectric films enhance memory effect and have a long memory retention characteristic.

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A Study on the Infrared Radiation Properties of Anodized Aluminum (양극산화된 알루미늄의 적외선 복사특성 연구)

  • 강병철;최정진;김기호
    • Journal of the Korean institute of surface engineering
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    • v.35 no.3
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    • pp.149-157
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    • 2002
  • Spectral emissivity depends on the surface conditions of the materials. The mechanisms that affect the spectral emissivity in anodic oxide films on aluminum were investigated. The aluminum specimens were anodized in a sulfuric acid solution and the thickness of the resulting oxide film formed changed with the anodizing time. FT-IR spectrum analysis identified the anodic oxide film as boehmite ($Al_2$$O_3$.$H_2$O). Both the infrared emisivity and reflectivity of the anodized aluminum were affected by the structure of the anodic oxide film because Al-OH and Al-O-Al have a pronounced absorption band in the infrared region of the spectrum. The presence of an anodic oxide film on aluminum caused a rapid drop in the infrared reflectivity. An aluminum surface in the clean state had an emissivity of approximately 0.2. However, the infrared emissivity rapidly increased to 0.91 as the thickness of the anodic oxide film increased.

Friction Transition Diagram Considering the Effects of Oxide Layer Formed on Contact Parts of TiN Coated Ball and Steel Disk in Sliding (미끄럼운동시 TiN코팅볼과 스틸디스크의 미끄럼접촉면에 형성되는 산화막의 영향을 고려한 마찰천이선도 작성에 대한 연구)

  • Cho, Chung-Woo;Park, Dong-Shin;Lee, Young-Ze
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.3
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    • pp.335-342
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    • 2003
  • In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to from the oxide layer and the characteristics of the oxide layer formation are investigated. AISI 52100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4 ${\mu}{\textrm}{m}$ in coating thickness. AISI 1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in air for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

Friction transition diagram considering the effects of oxide layer formed on contact parts of TiN coated ball and steel disk in sliding (TiN코팅된 볼과 스틸디스크의 미끄럼운동 시 접촉면에 형성되는 산화막의 영향을 고려한 마찰천이선도 작성에 대한 연구)

  • 조정우;박동신;임정순;이영제
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.11a
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    • pp.109-116
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    • 2001
  • In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to form the oxide layer and the characteristics of the oxide layer formation are investigated. AIS152100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4um in coating thickness. AISI1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitride environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

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The Electrical Properties of Gate Oxide due to the Variation of Thickness (두께 변화에 따른 Gate Oxide의 전기적 특성)

  • Park, Jung-Goo;Hong, Nung-Pyo;Lee, Yong-Woo;Kim, Wang-Gon;Hong, Jin-Woong
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1931-1933
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    • 1999
  • In this paper, the current and voltage properties on the gate oxide film due to the variation of thickness are studied. The specimen is used for n-ch power MOSFET. It is shows the leakage current and current density characteristics due to the applied electric field when the oxide thickness is each $600[\AA],\;800[\AA]$ and $1000[\AA]$, respectively. We known that the leakage current is a little higher when the voltage as reverse bias contrast with forward bias in poly gate is applied. In order to experiment for AC properties is measured for capacitance characteristics. It is confirmed that the value of input capacitance have been a lot of influenced on $SiO_2$ thickness contrast with the value of output capacitance.

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SPICE Model of Drain Induced Barrier Lowering in Junctionless Cylindrical Surrounding Gate (JLCSG) MOSFET (무접합 원통형 MOSFET에 대한 드레인 유도 장벽 감소의 SPICE 모델)

  • Jung, Hak Kee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.5
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    • pp.278-282
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    • 2018
  • We propose a SPICE model of drain-induced barrier lowering (DIBL) for a junctionless cylindrical surrounding gate (JLCSG) MOSFETs. To this end, the potential distribution in the channel is obtained via the Poisson equation, and the threshold voltage model is presented for the JLCSG MOSFET. In a JLCSG nano-structured MOSFET, a channel radius affects the carrier transfer as well as the channel length and oxide thickness; therefore, DIBL should be expressed as a function of channel length, channel radius, and oxide thickness. Consequently, it can be seen that DIBLs are proportional to the power of -3 for the channel length, 2 for the channel radius, 1 for the thickness of the oxide film, and the constant of proportionality is 18.5 when the SPICE parameter, the static feedback coefficient ${\eta}$, is between 0.2 and 1.0. In particular, as the channel radius and the oxide film thickness increase, the value of ${\eta}$ remains nearly constant.

Water-Side Oxide Layer Thickness Measurement of the Irradiated PWR Fuel Rod by NDT Method

  • Park, Kwang-June;Park, Yoon-Kyu;Kim, Eun-Ka
    • Proceedings of the Korean Nuclear Society Conference
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    • 1995.05a
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    • pp.680-686
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    • 1995
  • It has been known that water-side corrosion of fuel rods in nuclear reactor is accompanied with the loss of metallic wall thickness and pickup of hydrogen. This corrosion is one of the important limiting factors ill the operating life of fuel rods. In connection with the fuel cladding corrosion, a device to measure the water-side oxide layer thickness by means of the eddy-current method without destructing the fuel rod was developed by KAERI. The device was installed on the multi-function testing bench in the nondestructive test hot-cell and its calibration was carried out successfully for the standard rod attached with plastic thin films whose thicknesses are predetermined. It shows good precision within about 10% error. And a PWR fuel rod, one of the J-44 assembly discharged from Kori nuclear power plant Unit-2, has been selected for oxide layer thickness measurements. With the result of data analysis, it appeared that the oxide layer thicknesses of Zircaloy cladding vary with the length of the fuel rod, and their thicknesses were compared with those of the destructive test results to confirm the real thicknesses.

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