• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.102.1-102.1
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• 2015

플라즈마를 이용한 건식식각공정은 식각하고자 하는 기판과 더불어 챔버 내부를 구성하고 있는 부품들이 플라즈마에 함께 노출되는 환경이다. 챔버 내부가 장시간 플라즈마에 노출되어 열화 되면 기판의 불량을 야기하는 오염입자의 발생이 증가하므로 양산 공정에서는 그 때마다 내부 부품을 교체하여 청정한 공정 환경을 유지시킨다. 공정 챔버의 내부 부품은 플라즈마로 인한 열화를 방지하기 위하여 내플라즈마성이 우수하다고 알려진 코팅처리를 하여 사용한다. 금까지 플라즈마 식각 공정에 관한 연구는 식각하고자 하는 기판관점에서 활발히 이루어져 왔으나 내플라즈마성 코팅소재 관점에서의 연구 보고는 미미한 실정이다. 본 연구에서는 장시간의 양산공정을 모사하는 가혹한 플라즈마 조건에서 $CF_4/O_2$ 혼합가스를 사용하여 AAO (Anodic Aluminum oxide)피막의 오염입자 특성을 실시간 모니터링 하는 동시에 OES 분석을 수행하여 내플라즈마성 코팅소재의 오염입자 발생 메커니즘에 대하여 분석하였다.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.265-268
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• 2005

A new method for measurement of the pore size in a nanohoneycomb structure using atomic force microscopy (AFM) was proposed. Porous type anodic aluminum oxide (AAO) was fabricated as a nanohoneycomb structure to measure the pore size. For measuring pore sizes from AFM images, a criterion was set in porous type AAO. The pore sizes from AFM images were compared with those from SEM images, and the results showed good agreement. The relationship between the pore size and widening time was found to be linear in the range of this study. It was understood as the synchronized effects of the impurity gradient in outer oxide of AAO, mechanical packing and mass transfer increase.

• Journal of Surface Science and Engineering
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• v.50 no.6
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• pp.427-431
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• 2017

Anodic aluminum oxide (AAO) film has recently attracted much attention as a key material for the fabrication of various nanostructures. A control of anodizing voltage (U) was employed to render different anodic aluminum oxide (AAO) nanostructures with pore diameter ($D_p$) and interpore distance ($D_{int}$) in oxalic acid. In this work, we study the effect of stepwise modulation of anodizing voltages on the shape and dimension of porous structures along the vertical direction and demonstrate the fabrication of hierarchical layers of systematically controlled three-dimensional (3D) pore profile.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.33-33
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• 2010

Recently, a self-organizing process that occurs during the anodization of aluminum in acidic electrolytes has attracted a vast amount of research attentions, coupled with the ever-increasing demand for the development of effective, inexpensive and technologically simple methods for the synthesis of low-dimensional nanostructures over a macroscopic area overcoming many of the drawbacks of conventional lithographic techniques. In this presentation, recent progress in the fabrication of ordered nanoporous anodic aluminum oxide (AAO), including conventional anodization techniques, newly developed pulse anodization, hard anodization processes, and generic approaches to three-dimensional pore structures with periodically modulated diameters. Discussion will also cover the applications of AAO for the development of structurally well-defined extended arrays of low-dimensional nanostructures, such as nanodots, nanotubes, and nanowires, which could be model systems in investigating a diverse range of research problems in chemistry and physics and also be starting materials in realizing advanced electronic devices.

• Journal of Hydrogen and New Energy
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• v.17 no.1
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• pp.39-46
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• 2006

Highly ordered Li dispersed nickel oxide nanotubes were prepared with anodic aluminum oxide (AAO) template for hydrogen storage. Electron microscope results showed that uniform length and diameter of nickel oxide nanotubes were obtained. The wall thickness and outer diameter of nickel oxide nanotubes are about 40 - 50 nm and 200 - 400 nm, respectively. It was observed that the diameter of nickel oxide nanotubes is bigger than the pore diameter of AAO template. Li dispersed nickel oxide were consisted of nanoflakes and had structures of nanotubes and nanorods. For increasing the hydrogen adsorption and desorption capacity, the Li dispersed nickel oxide nanotubes were fluorinated. The fluorinated Li dispersed nickel oxide nanotubes showed 1.65 wt% of the hydrogen adsorption capacities at 77 K under 47 atm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.382-383
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• 2007

PMMA plate with nano-sized pattern was synthesized on anodized aluminum oxide template by bluk polymerization method. Anodized aluminum oxide was used as a template to synthesize the PMMA plate with nano-sized pattern. The polymerization of MMA was performed at $75-79^{\circ}C$. It is verified from SPM results that the nano-sized pattern on synthesized PMMA plate was well transferred from that of anodized aluminum oxide template.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.250-250
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• 2009

The fabricated the nanostructural patterns on the surface of SiN antireflection layer of polycrystalline Si solar cell using anodic aluminum oxide (AAO) masks in an inductively coupled plasma(ICP) etching process. The AAO nanopattern mask has the hole size of about 70~75nm and lattice constant of 100~120nm. The transferred nano-patterns were observed by the scanning electron microscope (SEM). The voltage of patterned Si solar cell enhanced.

• Bulletin of the Korean Chemical Society
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• v.29 no.4
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• pp.758-760
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• 2008

Nanoporous AAO (Anodic Aluminum Oxide) membranes have many advantages as a template for variety of magnetic materials. Materials can be embedded into the pores by electrodeposition, sputtering or magnetic-field-assisted infiltration of magnetic nanoparticles. This work focuses on the fabrication of the magnetic structures in the AAO templates by electrodeposition. Our method allows the controlled growth of Co nanostructures within the porous alumina membrane in the form of dots, rods and long wires. The shape of Co nanostructures has been investigated by field emission scanning electron microscope (FESEM). The magnetic hysteresis loops of Co nanostructures were measured using SQUID at 5 K and 300 K. The magnetic properties of the Co nanostructures are proportional to their aspect ratios and can be controlled by changing the aspect ratios.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2011.05a
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• pp.135-136
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• 2011

본 연구에서는 실리콘 기판위의 형성된 AAO (Anodic Aluminum Oxide)의 barrier layer를 $Cl_2/BCl_3$ gas mixture에서 Neutral Beam Etching (NBE)과 Ion Beam Etching (IBE)로 각각 식각한 후 그 결과를 비교하였다. 이온빔의 경우 나노사이즈의 AAO pore의 charging에 의해 pore 아래쪽의 위치한 barrier layer를 어떤 식각조건에서도 제거하지 못하였다. 하지만, charging effect가 없고, 높은 중성화율을 나타내는 low angle forward reflected 방식의 neutral beam etching (NBE)에서는 $BCl_3$-rich $Cl_2/BCl_3$ gas mixture인 식각조건에서 AAO pore에 휘발성 $BO_xCl_y$를 형성하면서 barrier layer를 제거할 수 있었다.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.814-817
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• 2010

AAO thin films prepared by a two-step anodization process have pores that are uniform in diameter, highly ordered, and perfectly vertical with respect to the plane of the nano template. Further, the pore size and interpore distance can be easily controlled by varying the anodizing voltage and acid electrolyte. When metals are electrochemically deposited in the pores, metal nanowires that are highly ordered and uniform in diameter are formed in each pore.