• Title/Summary/Keyword: Overlay accuracy

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A Geostatistical Study for the Selection of Prospective Areas of Polymetallic Nodule Deposits (망간단괴광상의 유망광구선정을 위한 지구통계학적 연구)

  • Park, Chan Young;Chon, Hyo Taek;Kang, Jung Keuk
    • Economic and Environmental Geology
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    • v.29 no.5
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    • pp.575-587
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    • 1996
  • The purpose of this study is to develop geostatistical methods for selection of prospective areas of polymetallic nodule deposits in KODOS (Korea Deep Ocean Study) area of the North-East Pacific Ocean. In this study $110{\times}165$ grid system was used, and each node represents the center of an estimated block of $1km{\times}1km$. The ordinary kriging was applied to SeaBeam2000 data in order to evaluate the bathymetry. A structural analysis (variogram) of the bathymetry data was carried out for constructing digital terrain model (DTM) and the maximum slopes of the bathymetry were calculated by DTM data. The above method can be used to solve the problem that is resulted from the lack of theory of a change of support model for the maximum slope of the bathymetry. The ordinary kriging and the indicator kriging were used to evaluate the nodule abundance, and the different two kriging methods were compared to evaluate the accuracy for the estimation of the nodule abundance. It has been shown that indicator kriging was better estimation tool than the ordinary kriging. The overlay map is presented for the selection of potentially minable sites by combining the two indicator maps of the nodule abundance and the maximum slope of bathymetry. This overlay map could be utilized to establish follow-up survey and to investigate the potentially minable sites in the KODOS area.

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Fabrication of an All-Layer-Printed TFT-LCD Device via Large-Area UV Imprinting Lithography

  • Lee, Seung-Jun;Park, Dae-Jin;Bae, Joo-Han;Lee, Sung-Hee;Kim, Jang-Kyum;Kim, Kyu-Young;Bae, Jung-Mok;Kim, Bo-Sung;Kim, Soon-Kwon;Lee, Su-Kwon;Kwon, Sin;Seo, Jung-Woo;Kim, Ki-Hyun;Cho, Jung-Wok;Chang, Jae-Hyuk
    • Journal of Information Display
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    • v.11 no.2
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    • pp.49-51
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    • 2010
  • Nanoimprint lithography (NIL) using ultraviolet (UV) rays is a technique in which unconventional lithographic patterns are formed on a substrate by curing a suitable liquid resist in contact with a transparent patterned mold, then releasing the freshly patterned material. Here, various solutions are introduced to achieve sufficient overlay accuracy and to overcome the technical challenges in resist patterning via UV imprinting. Moreover, resist patterning of all the layers in TFT and of the BM layer in CF was carried out using UV imprinting lithography to come up with a 12.1-inch TFT-LCD panel with a resolution of $1280{\times}800$ lines (125 ppi).

Measurement and Compensation of Synchronization Error in Offset Printing Process (오프셋 인쇄에서의 동기화 오차 정밀 계측 및 보정 연구)

  • Kang, Dongwoo;Kim, Hyunchang;Lee, Eonseok;Choi, Young-Man;Jo, Jeongdai;Lee, Taik-Min
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.6
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    • pp.477-481
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    • 2014
  • Flexible electronics have been to the fore because it is believed that flexibility can add incredible value such as light weight and mobility into the existing electronic devices and create new markets of large-area and low-cost electronics such as wearable eletronics in near future. Offset printing processes are regarded as major candidates for manufacturing the flexible electronics because they can provide the patterning resolution of micron-size effectively in large-area. In view of mechanics, the most important viewpoint in offset printing is how to achieve the synchronized movement of two contact surfaces in order to prevent slip between two contact surfaces and distortion of the blanket surface during ink transfer so that the high-resolution and good-overlay patterns can be printed. In this paper, a novel low-cost measurement method of the synchronization error using the motor control output signals is proposed and the compensation method is presented to minimize the synchronization error.

Application Study on the View Points Analysis for National Roads Route using Digital Elevation Data

  • Yeon, Sang-Ho;Hong, Ill-Hwa
    • Proceedings of the KSRS Conference
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    • 2002.10a
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    • pp.292-296
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    • 2002
  • This study has been accomplished as a experimental study for field application of 3D Perspective Image Map creation using Digital Topographical Map and based on the Ortho-Projection Image which is generated from Satellite Overlay Images and the precise Relative Coordinates of longitude, latitude and altitude which is corrected by GCP(Ground Control Point). AS to Contour Lines Map which is created by Coordinate conversion of 1:5,000 Topographical Map, we firstly made Satellite Image Map to substitute for Digital Topographical Map through overlapping the original images on top of each Ortho-Projection Image created and checking the accuracy. In addition to 3D Image Map creation for 3D Terrain analysis of a target district, Slope Gradient Analysis, Aspect Analysis and Terrain Elevation Model generation, multidirectional 3D Image generation by DEM can be carried out through this study. This study is to develop a mapping technology with which we can generate 3D Satellite Images of a target district through the composition of Digital Maps and Facility Blueprint and arbitrarily create 3D Perspective Images of the target district from any view point.

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웨이퍼 스텝퍼의 중첩정밀도 측정에 관한 연구

  • 이종현;장원익;이용일;김도훈;최부연;정기로;임태영;남병호;김상철
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.04b
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    • pp.192-197
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    • 1993
  • 반도체 기억소자의 급격한 발전추세에 대응하기 위해서는 노광(exposure) 장비의 증첩정밀도 (overlay accuracy)가 같이 개선되어야 한다. 본 연구에서는 64M ERAM 제조를 목적으로개발된 스텝 퍼(stepper) 시스템의 성능평가 항목 중에서 증첩정밀도에대한 측정방법 및 현재까지의 연구결과를 기술하였다. 제작된 웨이퍼 정렬계는 off-axis 및 TTL 광학계와 이들 정렬신호에 따라 움직이는 웨이 퍼 구동계로 구성되어 있다. off-axis 광학계는 화상처리와 회절의 두 가지 방식이 가능하도록 설계 제작되었으며, TTL 광학계는 dual beam interferometric method를 이용하였다. 본 실험의 결과는 웨이퍼 정렬계의 특성을 평가한 것으로서, 현재까지 off-axis 정렬 방법만으로 얻은 증첩정밀도는 0.26-0.29$\mu$m (m+3 $\sigma$ )이다. 따라서 여기에 이미 제작되어 있는 TLL 정렬광학계를 추가로 사용하면 0.1 $\mu$m 이하의 정밀도에 이를 것으로 예측된다.

Implementation of Tile Searching and Indexing Management Algorithms for Mobile GIS Performance Enhancement

  • Lee, Kang-Won;Choi, Jin-Young
    • Journal of Internet of Things and Convergence
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    • v.1 no.1
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    • pp.11-19
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    • 2015
  • The mobile and ubiquitous environment is experiencing a rapid development of information and communications technology as it provides an ever increasing flow of information. Particularly, GIS is now widely applied in daily life due to its high accuracy and functionality. GIS information is utilized through the tiling method, which divides and manages large-scale map information. The tiling method manages map information and additional information to allow overlay, so as to facilitate quick access to tiled data. Unlike past studies, this paper proposes a new architecture and algorithms for tile searching and indexing management to optimize map information and additional information for GIS mobile applications. Since this involves the processing of large-scale information and continuous information changes, information is clustered for rapid processing. In addition, data size is minimized to overcome the constrained performance associated with mobile devices. Our system has been implemented in actual services, leading to a twofold increase in performance in terms of processing speed and mobile bandwidth.

An Empirical Study on Discrimination of Image Algorithm for Improving the Accuracy of Forest Type Classification -Case of Gyeongju Area Using KOMPSAT-MSC Image Data- (임상 분류 정확도 향상을 위한 영상 알고리즘 변별력 실증 연구 -KOMPSAT-MSC를 이용한 경주지역을 대상으로-)

  • Jo, Yun-Won;Kim, Sung-Jae;Jo, Myung-Hee
    • Journal of Korean Society for Geospatial Information Science
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    • v.17 no.2
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    • pp.55-60
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    • 2009
  • By applying NDVI(Normalized Difference Vegetation Index) and TCT(Tasseled-Cap Transformation) image algorithm on the basis of KOMSAP-2 MSC(Multi Spectral Camera) image(Jun. 12, 2007) for Naenam-myeon, Gyeongju city in this study, DN distribution map was drawn up. Discrimination analysis of image algorithm for the accuracy improvement of forest type classification was conducted through the comparative analysis between the distribution maps of NDVI and TCT DN, and forest field surveying data, and finally, the accuracy of the forest type classification was verified through the overlay analysis with the forest field surveying data. Through this study, it is thought that low cost and high efficiency will be able to be expected in the process of the examination for the automation practicality of the forest type classification and of the production of the accurate forest type classification map by using KOMPSAT-2 MSC image.

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A Study on the Utilization of Photoballoon System for Database Generation of Small Areas (소규모 지역의 자료기반 구축을 위한 Photoballoon 시스템의 활용에 관한 연구)

  • 이재기;조재호;최석근;이재동
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.11 no.2
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    • pp.7-15
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    • 1993
  • In order to generate database, we need to obtain speedy and corret topographic information according to requisite purpose. Generally methods to an acquisition of topographic information are available by the use of maps, satellite images, stereo models of aerophoto and so forth. But we must choose a optimal method in consideration of area of object region, spatial solution of image, required accuracy and economic. Therefore, this study aims at providing the establish method of efficient topographic data base of small object region by means of spatial layer techniques of geo-spatial information system and using acquisition of geo-information and production method of base map with photoballoon system to obtain topographic information for reasonable plan and design of object region which select a zone preparation of a collective village with small region. As a result of this study, we decided an f-stop and a shutter speed of camera to obtain accurate stereo model and were able to obtain stereo photography and topography for small region by using of photoballoon system through accuracy analysis according to change flight height and air base speedly and economically. We can establish the data base useable to efficient plan and design as existence map with overlay plan drawing.

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A study on electron beam lithography for 0.1$\mu\textrm{M}$ T-gate formation at P(MMA/MAA)/PMMA structure (PMMA/P(MMA/MAA) 구조에서 0.1$\mu\textrm{M}$ T-gate 형성을 위한 전자빔 리소그래피 공정에 관한 연구)

  • Choe, Sang-Su;Lee, Jin-Hui;Yu, Hyeong-Jun;Lee, Sang-Yun
    • Korean Journal of Materials Research
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    • v.5 no.1
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    • pp.96-103
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    • 1995
  • This art~cle reports on the formation of T - Gate with O.1$\mu$m foot and 0.4$\mu$m head width at PMMA/P( MMA/MAA) resist structure using a 30KV electron beam lithography system. From the result of Monte Carlo simulation on PMMA/P( MMA/MAA)/GaAs, we obtain the dissipation energy ratio of forwardscattered electron and backscattered electron within 0.1$\mu$m scattering radius is 19.5 : 1 0.1$\mu$m T - gate has been formed with 30KV gaussian electron beam at a 440$\mu C/\textrm{cm}^2$ dosage. The gamma value of PMMA and P(MMA/MAA) at MIBK : IPA=l : 1 developer was 2.3. The overlay accuracy(3$\sigma$) from mix-andmatch of optical stepper and Ekeam lithography system for fabricating HEMT device is accomplished below 0.1$\mu$m.

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Fast Video Detection Using Temporal Similarity Extraction of Successive Spatial Features (연속하는 공간적 특징의 시간적 유사성 검출을 이용한 고속 동영상 검색)

  • Cho, A-Young;Yang, Won-Keun;Cho, Ju-Hee;Lim, Ye-Eun;Jeong, Dong-Seok
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.35 no.11C
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    • pp.929-939
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    • 2010
  • The growth of multimedia technology forces the development of video detection for large database management and illegal copy detection. To meet this demand, this paper proposes a fast video detection method to apply to a large database. The fast video detection algorithm uses spatial features using the gray value distribution from frames and temporal features using the temporal similarity map. We form the video signature using the extracted spatial feature and temporal feature, and carry out a stepwise matching method. The performance was evaluated by accuracy, extraction and matching time, and signature size using the original videos and their modified versions such as brightness change, lossy compression, text/logo overlay. We show empirical parameter selection and the experimental results for the simple matching method using only spatial feature and compare the results with existing algorithms. According to the experimental results, the proposed method has good performance in accuracy, processing time, and signature size. Therefore, the proposed fast detection algorithm is suitable for video detection with the large database.