• Applied Science and Convergence Technology
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• v.26 no.5
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• pp.95-109
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• 2017

There are several contributions to the gas load of a system of which often the most important is outgassing. Adsorption occurs via two main processes, physisorption and chemisorption, and can be described using five (or six) classifying isotherms. Outgassing is the result of desorption of previously adsorbed molecules, bulk diffusion, permeation and vapourisation. Looking at the desorption rate, pumping speed and readsorption on surfaces, the net outgassing of the system can be calculated. There is significant variation in measured outgassing rates between different materials but also between published rates for the same materials, in part due to the number of different methods used to measure outgassing. This article aims to review the outgassing process, outgassing rates, measurement methods and techniques that can be used to reduce the outgassing of a system.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.3
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• pp.57-65
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• 2003

In this study, we carry out reliability tests and investigate the failure mechanisms of the anodically bonded wafer level vacuum packaging (WLVP) MEMS gyroscope sensor. There are three failure mechanisms of WLVP: leakage, permeation and out-gassing. The leakage is caused by small dimension of the leak channel through the bonding interface and internal defects. The larger bonding width and the use of single crystalline silicon can reduce the leak rate. Silicon and glass wafer itself generates a large amount of outgassing including $H_2O$, $C_3H_5$, $CO_2$, and organic gases. Epi-poly wafer generates 10 times larger amount of outgassing than SOI wafer. The sandblasting process in the glass increases outgassing substantially. Outgassing can be minimized by pre-baking of the wafer in the vacuum oven before bonding process. An optimum pre-baking temperature of the wafers would be between $400^{\circ}C$ and $500^{\circ}C$.

• Applied Science and Convergence Technology
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• v.24 no.4
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• Progress in Superconductivity and Cryogenics
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• v.20 no.4
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• pp.11-15
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• 2018

Torque tubes in High Temperature Superconducting (HTS) motor transfer torque from superconducting field winding rotor to the room temperature shaft. It should have minimum heat conduction property for minimizing the load on cryo-refrigerator. Generally, these torque tubes are made with stainless steel material because of high strength, very low outgassing and low thermal contraction properties at cryogenic temperatures and vacuum conditions. With recent developments in composite materials, these torque tubes could be made of composites such as Kevlar and S-Glass, which have the required properties like high strength and low thermal conductivity at cryogenic temperatures, but with a reduced weight. Development and testing of torque tubes made of these composites for HTS motor are taken up at Bharat Heavy Electricals Limited (BHEL), Hyderabad in collaboration with Central Institute of Plastics and Engineering Technology (CIPET), Chennai and Indian Institute of Technology (IIT), Kharagpur. As these materials are subjected to vacuum, it is important to measure their outgassing rates under vacuum conditions before manufacturing prototype torque tubes. The present study focusses on the outgassing characteristics of Kevlar and S-Glass, using an Outgassing Measurement System (OMS), developed at IIT Kharagpur. The OMS facility works under vacuum environment, in which the test samples are exposed to vacuum conditions over a sufficient period of time. The outgassing measurements for the composite samples were obtained using pressure-rise technique. These studies are useful to quantify the outgassing rate of composite materials under vacuum conditions and to suggest them for manufacturing composite torque tubes used in HTS motors.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.631-632
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• 2011

• Journal of the Semiconductor & Display Technology
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• v.8 no.1
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• pp.7-12
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• 2009

The outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the TMP system than in the DP system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.05a
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• pp.54-54
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• 2003

MgO layer는 POP 패빌 내 유전증을 이온의 스퍼터링으로부터 보호하여 주며, 또한 높은 이차 전자 밤출 계수의 특성을 가지고 있어 구동 및 유지 전압을 낮춰 주는 역할을 한다. 그러나. MgO layer는 $H_20,{\;}CO_2,{\;}N_2,{\;}0_2$ 그리고 $H_2$와 같은 불순물 들을 쉽게 를착하는 단점이 있어, PDP의 특성 및 수명 단축에 영향을 줄 수 있다. 따라서, 본 연구에서는 atmospheric pressure plasma cleaning 과 low pressure i inductively coupled plasma (ICP) cleaning 처리에 의하여, 보호층으로 사용이 되는 MgO layer의 outgassing 특성을 조사하고자 한다. plasma cleaning에 의한 MgO layer 표면의 roughness와 불순물의 변화를 알아보기 위 하여 atomic force microscopy(AFM)과 x-ray p photoelectron spectroscopy(XPS)를 이용하여 측정 하였다. 또한, outgassing의 특성을 분석하기 위하여 MgO layer를 $400^{\circ}C$ 까지 온도를 가하여 온도에 따른 outgassing의 특성을 quadrupole mass spectrometer(QMS)를 이용하여 알아보았다. atmospheric pressure plasma cleaning 에서는 $He/O_2/Ar/N_2$의 gas를 사용하였으며, low pressure ICP cleaning 에 서는 Ar의 gas를 사용하였다. atmospheric pressure plasma cleaning는 low pressure ICP C cleaning과 비교해 더 낮은 outgassing을 관잘 할 수 있었으나. MgO 표면의 roughness는 low pressure ICP cleaning 후 더 낮은 것을 알 수 있었다. 또한 $He/O_2/Ar/N_2$의 gas를 사용 한 atmospheric pressure plasma cleaning 과 $Ar/O_2$의 gas를 사용한 ICP cleaning에서 이 차전자방출계수(SEEC)가 약 1.5~2.5배 증가된 것을 알 수 있었다.

• Journal of the Korean Vacuum Society
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• v.5 no.3
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• pp.175-180
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• 1996

Double conductance method is proposed as an effectvie way to measure real outgassing rates of materials regardless of their adsorbing power. The real outgassing rate and the sticking coefficient of the CFC (carbon fiber composite) which is used widely as the material for armor plates infusion experiment devices were obtained by adopting this method. At $40^{\circ}C$ the real ougassing rate was $Pa, m^3/s.m^2$(in $N_2$ equivalent), which was higher than 5 times the measured one, and the sticking coefficient was about 0.018($H_2O\; and \;H_2$ were the main residual gases).

• International journal of advanced smart convergence
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• v.6 no.4
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Aerospace Engineering and Technology
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• v.2 no.2
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• pp.45-49
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• 2003

A Bake-Out test for STSAT-1 FM(Flight Model) was performed in a Bake-Out Chamber at SITC(Satellite Integration & Test Center) in KARI(Korea Aerospace Research Institute). The purpose of this test is to measure and analyze the outgassing rate to affect the optical equipment(FIMS) and to eliminate contaminants through the high temperature bake-out. This Bake-Out test is composed of three parts which are honeycomb panels & harnesses(Batch 1), an assembled satellite(Batch 2), and a disassembled satellite(Batch 3). For each test, quantitative and qualitative measurements and analysis were performed using TQCM(Thermoelectric Quartz Crystal Microbalance) and RGA(Residual Gas Analyzer.)