• 한국물환경학회지
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• 제28권4호
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• pp.505-511
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• 2012

While the existing sewage treatment facilities are mainly being operated by biological processes, winter-time efficiency improvement and additional phosphorus treatment equipment using chemicals have been required to follow the effluent criteria of TP (0.2, 0.3 and 0.5 mg/L for the zone of I, II and III respectively) and $BOD_5$ (5.0 mg/L) which is intensified from 2012 in Republic of Korea. We made an investigation into actual condition of biological treatment process and calculated the optimal chemical input amount by jar test of supernatant of secondary sedimentation tank to evaluate the process improvement for the intensified criteria. Ejector BAF system for removing TP, $BOD_5$ of sewage effluent was suggested. The concentration of TP from biological process is 0.3-0.8 mg/L, and the input amount of optimal chemical coagulant was above Al/P ratio of 3(1.9 mg/L as Al) to meet the criteria of TP for secondary treatment effluent. From the results of this experiment, the best Al/P ratio for Ejector BAF system was about Al/P ratio of 1, and LV of BAF process for intensified criteria of $BOD_5$ and TP was below 1.97m/hr.

• 공업화학
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• 제23권1호
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• pp.77-85
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• 2012

팽창진주암(expanded perlite)과 섬유상 해포석(sepiolite)과의 복합화를 통해 유연성을 지닌 세라믹 발포체의 제조가능성을 조사하였다. 무기광물 섬유 해포석의 해섬처리는 팽창진주암과 해포석으로 이루어진 세라믹발포체의 제조를 위해 가장 중요한 전 처리공정이다. 해섬된 해포석과 팽창진주암은 혼합 교반되어 슬러리 상태로 이루어지며, 이 슬러리상의 복합물은 $300^{\circ}C$ 이하의 저온 열처리과정을 통해 형상화 및 발포화되어 괴상의 발포체로 제조된다. 슬러리상 복합물의 열처리공정은 슬러리 복합물 중에 잔존하는 수분의 증발단계, 일정발포온도에서 발포화제가 분해되어 진행되는 발포화단계 및 발포 후 잔류되는 유기물질의 분해제거단계를 포함하는 것으로 설계되어야 한다. 열처리 공정조건과 발포제는 상관성이 있으며 팽창진주암과 해포석섬유로 이루어진 슬러리상 혼합물의 발포에 적절한 발포제는 유기계 발포제가 적절하며 DSS (dioctyl sodium sulfosuccinte)가 효과적이었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.63-63
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• 2003

The nanotopography of silicon wafers has emerged as an important factor in the STI process since it affects the post-CMP thickness deviation (OTD) of dielectric films. Ceria slurry with surfactant is widely applied to STI-CMP as it offers high oxide-to-nitride removal selectivity. Aiming to control the nanotopography impact through ceria slurry characteristics, we examhed the effect of surfactant concentration and abrasive size on the nanotopography impact. The ceria slurries for this study were produced with cerium carbonate as the starting material. Four kinds of slurry with different size of abrasives were prepared through a mechanical treatment The averaged abrasive size for each slurry varied from 70 nm to 290 nm. An anionic organic surfactant was added with the concentration from 0 to 0.8 wt %. We prepared commercial 8 inch silicon wafers. Oxide Shu were deposited using the plasma-enhanced tetra-ethyl-ortho-silicate (PETEOS) method, The films on wafers were polished on a Strasbaugh 6EC. Film thickness before and after CMP was measured with a spectroscopic ellipsometer, ES4G (SOPRA). The nanotopogrphy height of the wafer was measured with an optical interferometer, NanoMapper (ADE Phase Shift)

• 한국재료학회지
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• 제9권2호
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• pp.124-131
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• 1999

Copper film, which is expected to be used as interconnection material for 1 giga DRAM integrated circuits was deposited on hole and trench patterns by Metal Organic Chemical Vapor Deposition(MOCVD) method. After a reflow process, contact and L/S patterns were filled by copper and the characteristics of the Cu reflow process were investigated. When deposited Cu films were reflowed, grain growth and agglomeration of Cu have occurred in surfaces and inner parts of patterns as well as complete filling in patterns. Also Cu thin oxide layers were formed on the surface of Cu films reflowed in $O_2$ambient. Agglomeration and oxidation of Cu had bad influence on the electrical properties of Cu films especially, therefore, their removal and prevention were studied simultaneously. As a pattern size is decreased, preferential reflow takes place inside the patterns and this makes advantages in filling patterns of deep submicron size completely. With Cu reflow process, we could fill the patterns with the size of deep sub-micron and it is expected that Cu reflow process could meet the conditions of excellent interconnection for 1 giga DRAM device when it is combined with Cu MOCVD and CMP process.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2005년도 총회 및 춘계학술발표회
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• pp.53-56
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• 2005

A Laboratory study was conducted to evaluate the kinetics of oxidation of trichloroethylene (TCE) in groundwater by potassium permanganate $(KMnO_4)$, Consumption of permanganate by TCE and aquifer materials was also evaluated to obtain an appropriate injection rate of $KMnO_4$. TCE degradation by $KMnO_4$ in the absence of aquifer material showed effective with pseudo-first order rate constant, $k_{obs}=1.8110^{-3}\;s^{-1}\;at\;KMnO_4=500mg/L$. TCE oxidation by $KMnO_4$ was found to be second order reaction and the rate constant, $k=0.65{\pm}0.08\;M^{-1}s^{-1}$, was independent of pH changes. $KMnO_4$ consumption rate by groundwater sampled from field site was not significant, indicating that groundwater containing negligible amount of dissolved organic matter does not have any influence on the $KMnO_4$ degradation. Meanwhile, aquifer materials from field site were actively reacted with permanganate, resulting in the significant consumption of $KMnO_4$. It might be attributed to the existence of metal oxides in aquifer materials, Based on the rate constants obtained from this study, appropriate injection rate of permanganate and TCE removal rate in groundwater could be estimated.

• 멤브레인
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• 제7권4호
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• pp.175-182
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• 1997

혐기-호기의 생물반응조 공정과 막분리 공정을 조합한 막-생물반응조 공정을 이용하여 염색폐수 중의 난분해성 물질들을 제거하였다. 염색폐수 원수를 직접 막분리공정에 적용한 결과 심각한 fouling을 초래하였다. 반면 생물반응조로 1차 처리한 후 막분리공정에 적용한 경우 생물반응조가 막의 오염원을 상당부분 제거하여 fouling현상이 현저리 감소하였으며, 막의 수명도 연장시킬 수 있었다. 염색폐수의 처리효율 및 fouling현상은 막의 기공 크기나 구조보다는 막의 재질에 더욱 의존함을 확인하였다. 중공사막 module의 사용 방법 및 중공사막 내부의 유속에 따라서 제거효율 및 투과유량이 변화하였다. 생물반응조나 막분리 단독공정보다 두공정을 조합한 공정이 보다 효과적으로 염색폐수 처리능력을 보였다.

• 한국물환경학회지
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• 제26권3호
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• pp.420-431
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• 2010

하천형 저수지인 팔당호의 건기시 수질을 모의하기 위하여 단순 물질수지 모델을 개발하였다. 대상 물질은 총인 (TP), 클로로필${\alpha}$ ($Chl.{\alpha}$), 5일 생물학적 산소 요구량 (BOD) 화학적 산소요구량 (COD)이었다. 모델은 지난 20년간의 실측치를 잘 재현하였으며 유기물질의 성인을 밝히는데 이용될 수 있었다. 모델을 통하여 분석한 결과, 팔당호에서 인에 대한 조류의 이용성을 결정하는 임계 수리부하는 약 $1.5m\;d^{-1}$로 나타났다. 팔당호의 $Chl.{\alpha}$, COD, BOD 농도는 임계부하보다 작은 수리부하의 조건에서 생산과 호흡 및 침전과 같은 조류의 변화에 민감하게 반응하였다. 최근 유기오염 저감을 위한 중앙정부와 지방정부의 강도 높은 노력에도 불구하고 팔당호의 수질은 크게 개선되지 않았으며 오히려 COD 농도는 증가하였다. 모델 해석을 통하여 이는 조류 생산량의 증가와 아울러 비점오염원 등에서 외래성 부하가 증가하였기 때문인 것으로 나타났다. 특히 2000~2007년 기간의 조류 기원성 유기물 농도는 전체 유기물 농도의 절반에 해당하는 것으로 추정되었으며, 이는 1988~1994년 기간에 비하여 2.5배, 1995~1999년 기간에 비하여 1.3배에 달하는 수준이었다. 이러한 연구의 결과는 팔당호의 수질개선을 위해서는 조류 발생을 억제하는 것이 필요함을 시사하는 것이었다.

• 유기물자원화
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• 제25권1호
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• pp.23-33
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• 2017

본 연구에서는, 높은 함수율을 가진 음식물류 폐기물을 Bio-dying 공법을 이용하여 처리하였을 때 수분과 유기물의 변화정도를 분석하였으며 음식물류 폐기물 처리 시 온도와 염도가 Bio-dying 공법의 운전특성에 미치는 영향을 평가하였다. 또한, Bio-drying 후 분해산물의 SRF(Solid Refuse Fuel)로서의 가치 평가를 위한 펠렛 제조의 최적조건 도출 및 SRF의 발열량 분석을 통한 고형연료로서의 가치를 평가하였다. 그 결과, 1일 투입량에 따른 온도, $CO_2$ 농도, 유기물 제거율과 무게 감소율 값을 분석하였다. 유기물 제거율과 무게 감소율은 투입량 2.4 kg/day에서 각각 86%, 68%로 최대값을 나타내었다. 이를 통해 최적 음식물류 폐기물 투입량은 2.4 kg/day라 판단되었다. 펠렛 성형 결과, 원료 함수율이 10~25% 이내에서 펠렛 제조가 가능하고, 외형유지와 강도면에서 가장 좋은 품질결과를 보여준 함수율 25%가 가장 적합하다고 판단되었다. Bio-drying 후 분해산물의 SRF 고위발열량은 3,500 kcal/kg 이상의 값을 나타내었다.

• 한국산업보건학회지
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• 제20권2호
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• pp.88-93
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• 2010

To confirm and quantify asbestos fibers released from the asbestos-cement slate roofs due to weathering, three houses, selected based on the year of built - 60's, 70, and 80's, were investigated. All of them were located in the downtown of Seoul. Rain or snow-melt water was collected from the roof in a 3.5 liter plastic bottle. A known amount of collected water was filtered on the 37 mm membrane filter, ashed in a muffle furnace, and subsequently treated with HCl to remove organic material. The treated remaining was refiltered on a 25mm membrane filter for PLM and PCM analyses. The NIOSH 7400 method was utilized for PCM counting. In addition, SEM/EDX was used to confirm the asbestos types. The results of this study showed that chrysotile fibers were confirmed by PLM in all samples analyzed. A significant amount of asbestos fibers were found in the water samples. The ranges of asbestos fibers counted from the samples collected in the 60's, 70's, and 80's were; 10,406.3~55,575.6 f/L, 5,218.8~38,126.2 f/L, and 2,906.3~7,798.6 f/L, respectively. As anticipated, concentrations of asbestos fibers increased with time of installment of the roofing material. We conclude that weathering can be a significant factor on the release of asbestos fibers from the asbestos cement products. Since asbestos fibers released into environment can be a source of significant health hazard, countermeasures, such as replacement, removal, and encapsulation of weathered asbestos slate, should be initiated immediately.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.38-41
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• 2004

The oxidizer plays an important role in the metal chemical mechanical polishing(CMP) slurry. Currently, the oxidizer used in CMP slurry is nearly divided into several kinds such as $Fe(NO_3)_3$, $H_2O_2$, $KIO_3$, and $H_5IO_6$. It is generally known that oxidizer character of $H_2O_2$ is more effective than other oxidizers. In this work, we have been studied the characteristics for the $H_2O_2$ concentration of copper slurry, which can applicable in the recent semiconductor manufacturing process. Also, it plays an important role in the planarization of copper films using copper slurries during micro-electronic device fabrication. In this work, we confirmed that removal rate of Cu/TaN changed by $H_2O_2$ concentration on copper slurry. And we used $KMnO_4$ in the measurement method of $H_2O_2$. In analysis results, we confirmed that the difference of results is large. We thought that the difference was due to organic component existence. So in titration method of $H_2O_2$ concentration, we used $Na_2S_2O_3$ instead of $KMnO_4$ as solution. Consequently, using the titration method, we could calculate correct data reduced error. And $H_2O_2$ concentration has been adjusted to the target concentration of 0.1 wt%.