• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.27 no.8
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• pp.75-82
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• 2013

We propose a fiber grating sensor system for condition monitoring of large scale wind turbine blades. For the feasibility test of the proposed sensor system, a down-scaled wind turbine has been constructed and experimented. Fiber grating sensors were attached on a blade surface for distributed strain and temperature measurements. An optical rotary joint was used to transmit optical signals between the FBG sensor array and the signal processing unit. Instead of broadband light source, we used a wavelength-swept fiber laser to obtain high output power density. A spectrometer demodulation is used to alleviate the nonlinear wavelength tuning problem of the laser source. With the proposed sensor system we could measure dynamic strain and temperature profiles at multi-positions of rotating wind turbine blades.

• Journal of Sensor Science and Technology
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• v.12 no.5
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• pp.225-230
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• 2003

Nowadays, laserthermia is widely used to treat malignant tumors with generating heat as the one of minimal invasive surgeries. Generally, the laserthermia probe system consists of the fiber-optic laser and light guides, image guide and temperature sensor. It is very important to measure the temperature of treating tumor and make a stable temperature ($42{\sim}43^{\circ}C$) during the treating time. Therefore, laserthermia probe needs temperature sensor which can measure it exactly and fast. In this study, to develop a new type of temperature sensor with LC(liquid crystal) and optical fiber, the reflectivity of LC according to the temperature changes are measured. Also, the relationships are derived from the results.

• Journal of the Korean Vacuum Society
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• v.20 no.2
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• pp.86-92
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• 2011

The diagnosis studies of the process of chemical vapor deposition were carried out by using in-situ particle monitor (ISPM) and self-plasma optical emission spectroscopy (SPOES). We used the two kinds of equipments such as the silicon plasma enhanced chemical vapor deposition system with silane gas and the borophosphosilicate glass depositon system for monitoring. Using two sensors, we tried to verify the diagnostic and in-situ sensing ability of by-product gases and contaminant particles at the deposition and cleaning steps. The processes were controlled as a function of precess temperature, operating pressure, plasma power, etc. and two sensors were installed at the exhaust line and contiguous with each other. the correlation of data (by-product species and particles) measured by sensors were also investigated.

• Korean Journal of Optics and Photonics
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• v.30 no.6
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• pp.249-254
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• 2019

An optical current sensor device that measures electric current by the principle of the Faraday effect was designed and fabricated. The polarization-rotated reflection interferometer and the quadrature phase interferometer were introduced so as to improve the operational stability. Complex structures containing diverse optical components were integrated in a polymeric optical integrated circuit and manufactured in a small size. This structure allows sensing operation without extra bias feedback control, and reduces the phase change due to environmental temperature changes and vibration. However, the Verdet constant, which determines the Faraday effect, still exhibits an inherent temperature dependence. In this work, we tried to eliminate the residual temperature dependence of the optical current sensor based on polarization-rotated reflection interferometry. By varying the length of the fiber-optic wave plate, which is one of the optical components of the interferometer, we could compensate for the temperature dependence of the Verdet constant. The proposed optical current sensor exhibited measurement errors maintained within 0.2% over a temperature range, from 25℃ to 85℃.

• Korean Journal of Optics and Photonics
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• v.17 no.2
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• pp.127-135
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• 2006

We implement numerical simulations for the distributed optical fiber sensor system that uses the spatially-selective Brillouin scattering, by treating the superposition of the optical-frequency-modulated pump/probe waves in the time domain. We obtain temporal and spatial distributions of Brillouin gain for various cases. Simulations are applied to the case of concatenated optical fibers of different kinds and the case of distributed temperature along the fiber, which give reasonable results for the distributed sensor. The result of using a triangular wave instead of a sinusoidal one as a modulation waveform shows that the triangular wave modulation has an advantage in spatial resolution.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.371-375
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• 2022

Antimony-doped tin oxide (ATO) thin films, one type of transparent conductive oxide (TCO) films, were prepared on a SiO₂-coated glass substrate with different substrate temperatures by a radio-frequency magnetron sputtering system. Structural, optical, and electrical characteristics of the deposited ATO films were analyzed using X-ray diffraction, scanning electron microscopy, alpha-step, ultraviolet-visible spectrometer, and Hall effect measurement. The substrate temperature during deposition did not affect the basic crystal structure of the films but changed the grain size and film thickness. The optical transmittance of the ATO films deposited at different substrate temperatures was over 70%. The lowest sheet resistance and resistivity were 8.43 × 10² Ω/sq, and 0.3991 × 10^-2 Ω·cm, respectively, and the highest carrier concentration and mobility were 2.36 × 10²¹ cm^-3 and 6.627 × 10^-2 cm²V^-1s^-1, respectively, at a substrate temperature of 400 ℃.

• Journal of the Optical Society of Korea
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• v.20 no.4
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• pp.524-529
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• 2016

Diagnostic sensors are demanded during plasma processes. Holograms of plasma taken with laser light without a reference beam were used to monitor behaviors of charged particles produced in nitrogen plasma as a function of electrode temperature ranging between 50 and 300℃. Holograms were characterized as a function of the pixel sum and grayscale value. Pixel sum calculated in identified grayscale ranges strongly correlated with ion density and emitted light intensity measured with a langmuir probe and optical emission spectroscopy, respectively. The performance was further evaluated with data acquired as a function of N₂ and NH₃ flow rates and improved correlations were observed in the new grayscale range. The confirmed correlations indicate that a hologram is a viable means to diagnose behaviors of plasma particles such as ions. Underlying principles are discussed in view of particle and charge composing vacuum and light.

• Journal of Sensor Science and Technology
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• v.4 no.2
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• pp.58-63
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• 1995

The effects of substrate temperature, RF power, and $NH_{3}/SiH_{4}$ gas flow ratio on the dielectric constant and optical bandgap of amorphous silicon nitride (a-SiNx:H) thin films prepared by PECVD method using RF glow discharge decomposition of $SiH_{4}$ and $NH_{3}$ gas mixtures have been studied. The dielectric constant and optical bandgap of a-SiNx:H thin films were greatly exchanged as by increasing substrate temperature, RF power, and $NH_{3}/SiH_{4}$ gas flow ratio. The dielectric constant of a-SiNx:H films was increased and optical bandgap of a-SiNx:H films was decreased as the substrate temperature was increased. When the substrate temperature, RF power, gas pressure, $NH_{3}/SiH_{4}$ gas flow ratio, and thickness were $250^{\circ}C$, 20 W, 500 mTorr, 10 and $1500\;{\AA}$, respectively, the dielectric constant, breakdown field and optical bandgap of a-SiNx:H film were 4.3, 1 MV/cm, and 2.9 eV, respectively.

• Journal of Sensor Science and Technology
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• v.22 no.1
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• pp.49-53
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• 2013

In this paper, we proposed a laser-based non-contact temperature measuring method for high speed rotating polycarbonate (PC) disk using transparency change of thermocolor. The thermocolor has abilities to change color and transparency due to a change in temperature. The thermocolor is applied on one side of polyvinylidene fluoride (PVDF) membrane. The thermocolor applied membrane is attached to inside of reaction chamber in disk. An optical system consisted of a laser beam radiator and a laser photometer is installed. Laser is irradiated at the bottom side of disk and the transmitted laser beam is detected by the laser photometer at the opposite side of disk. During the disk is rotating, laser is irradiated and detected simultaneously. The laser photometer senses the transmitted laser power and generates voltage as output. The temperature of disk can be detected during the disk is rotating up to 3000 RPM.

• Proceedings of the KIEE Conference
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• 1999.07e
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• pp.2447-2449
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• 1999

This paper presents a distributed temperature sensor which uses a multimode optical fiber. The temperature distribution is derived from the intensity of the Raman back scattering light. Testing the sensors on measurement length of 2km of this system shows good temperature characteristics of the heated/cooled section. These performance will useful to design such as monitoring abnormal temperature rise of electric facilities.