• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.126-126
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• 2009

Noninvasive plasma diagnostic technique is introduced to analyze and characterize HICP (Helmholtz Inductively Coupled Plasma) source during the plasma etching process. The HICP reactor generates plasma mainly through RF source power at 13.56MHz RF power and RF bias power of 12.56MHz is applied to the cathode to independently control ion density and ion energy. For noninvasive sensors, the RF sensor and the OES (Optical emission spectroscopy) were employed since it is possible to obtain both physical and chemical properties of the reactor with plasma etching. The plasma impedance and optical spectra were observed while altering process parameters such as pressure, gas flow, source and bias power during the poly silicon etching process. In this experiment, we have found that data measured from these noninvasive sensors can be correlated to etch results. In this paper, we discuss the relationship between process parameters and the measurement data from RF sensor and OES such as plasma impedance and optical spectra and using these relationships to analyze and characterize H-ICP source.

• 반도체디스플레이기술학회지
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• 제9권1호
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• Nuclear Engineering and Technology
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• 제53권10호
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• pp.3431-3437
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• 2021

In this study, one-dimensional gamma ray source positions are estimated using a plastic scintillating optical fiber, two photon counters and via data processing with a machine learning algorithm. A nonlinear regression algorithm is used to construct a machine learning model for the position estimation of radioactive sources. The position estimation results of radioactive sources using machine learning are compared with the theoretical position estimation results based on the same measured data. Various tests at the source positions are conducted to determine the improvement in the accuracy of source position estimation. In addition, an evaluation is performed to compare the change in accuracy when varying the number of training datasets. The proposed one-dimensional gamma ray source position estimation system with plastic scintillating fiber using machine learning algorithm can be used as radioactive leakage scanners at disposal sites.

• 한국광학회:학술대회논문집
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• 한국광학회 1998년도 제15회 광학 및 양자전자 학술발표회 논문집
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• pp.212-213
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• 1998

• 한국광학회:학술대회논문집
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• 한국광학회 1999년도 제16회 광학 및 양자전자 학술발표회Proceedings of 16th Optics and Quantum Electronics Conference, 1999
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• pp.132-133
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• 1999

• 한국광학회:학술대회논문집
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• 한국광학회 2005년도 하계학술발표회
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• pp.182-183
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• 2005

• 한국광학회:학술대회논문집
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• 한국광학회 1997년도 Advance Program of 14th optics andquantum Electronics conference, 1997제14 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.9-9
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• 1997

• 제어로봇시스템학회논문지
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• 제10권3호
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• pp.239-248
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• 2004

Optical coherence tomography(OCT) is high resolution imaging system which can see the cross section of microscopic organs in the living tissue. In this paper, we analyze the relation between the light source and the resolution of modulated signal in Michelson interferometer. We construct 1-D OCT signal processing hardware such as amplifiers, filters, and demodulate electronic signals from the photo detector. In order to get 2-D OCT image, the synchronization among optical delay line, sample stage and A/D converter is dealt with. In experiments, we verify analog and digital signal processing blocks which apply to the stacks of glasses. Finally we aquire high resolution 2-D OCT image with respect to the onion tissue. We expect that this result can be applied to the medical instrument through performance improvement.

• Journal of the Optical Society of Korea
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• 제16권2호
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• pp.101-106
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• 2012

We demonstrate a cost effective broadcast signal transmission at 1.25-Gb/s with 100 GHz channel spacing based on a broadband light source (BLS) for a wavelength division multiplexing-passive optical network (WDM-PON). The BLS is implemented by using mutually injected Fabry-Perot laser diodes (MI F-P LDs). The error-free transmission without a forward error correction (FEC) is achieved by its low relative intensity noise (RIN). The number of usable modes is determined by RIN and/or extinction ratio (ER) in the spectrum sliced light output.

• Journal of the Optical Society of Korea
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• 제17권6호
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• pp.471-480
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• 2013

The beating of two or more lasers that have the same or a finite difference in the central frequencies, is the main source of noise in spectral amplitude coding optical code division multiple access (SAC OCDMA) systems. In this paper we adopt a spatial multiplexing (SM) scheme for SAC OCDMA systems to mitigate this beat noise. The results show that for different code weights and different data rates SM SAC can support a larger number of users than the conventional SAC for all different laser source configurations. However, SM SAC requires a more complex system than the conventional SAC, and almost twice as much optical component.