• 소성∙가공
• /
• 제14권3호
• /
• pp.245-250
• /
• 2005

Recently, micro machining technology for high precision mold becomes more interested for mass production of high performance optical parts micro-grooved on the surface, which is under very active development due to its effectiveness in the view point of optical performance. Mechanical micro machining technology now has more competitiveness on lithography, MEMS or LIGA processes which have some problems to fabricate especially cylinder type of groove in such as lenticular lens for illumination angle modulation system. In this study. a lenticular lens mold with U-type micro groove is fabricated making utilizing of the benefit of the mechanical micro machining technology. A shaping machining process is adapted using 3 axis degree of freedom micro machining system and single crystal natural diamond tool. A brass and a electroless nickel materials are used for mold fabrication. Machining force, chip shape and machined surface are investigated from the experiment and an optimal machining condition is found based on the examined problems from the micro cutting process.

• 한국광학회지
• /
• 제17권1호
• /
• pp.7-17
• /
• 2006

본 논문에서는 FBG 프리즘을 이용한 파장 의존형 광 실시간 지연선로(wavelength-dependent optical true time-delay; WDOTTD) 와 2${\times}$2 광 스위치의 크로스 포트에 각기 다른 길이의 광섬유 지연선로를 연결한 광섬유 지연선로 행렬인 파장 비의존형 광 실시간 지연선로(wavelength-independent optical true time-delay; WIOTTD)로 구성된 평면 위상 배열 안테나용 OTTD 구조를 제안하였다. 최대 시간 지연 차이가 810 ps인 WDOTTD와 $\pm$50 ps인 WIOTTD를 직렬 연결하여 10-GHz, 2비트${\times}$4비트 2차원 OTTD를 제작하였고, 모든 주사각에 대해서 시간지연과 삽입손실을 측정하였다. 광섬유 지연선로 행렬을 이용한 4-비트 WIOTTD의 시간 지연 측정오차는 $\pm$1 ps이하로 나타났다. 또한, 제안된 광 TTD의 성능을 분석하기 위하여, 8${\times}$8 마이크로스트립 안테나 소자들로 구성된 10-GHz 평면 PAA의 방사 패턴을 시뮬레이션으로 측정하고 분석하였다.

• Journal of Electrical Engineering and Technology
• /
• 제1권2호
• /
• pp.263-267
• /
• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2004년도 하계학술대회 논문집 C
• /
• pp.2040-2042
• /
• 2004

This paper presents a miniature optical system for the fluorescence detection of the patterned protein chip. The patterned protein chip was fabricated using MEMS process. The fluorescence from the patterned protein chip was measured while varying the concentration of the BSA. The fluorescence light is separated spatially from the excitation beam using mini-size prism to increase SNR (Signal-to-Noise Ratio). The combination of prism and mirrors can convert the excitation light from the laser diode to uniform illumination on the specimen. We believe that the proposed system for fluorescence detection can be applied to rea1ization of point-of-care.

• 한국결정성장학회지
• /
• 제14권5호
• /
• pp.220-225
• /
• 2004

Four different Fluorine-based gases ($SF_6/,NF_3, PF_5,\; and \; BF_3$) were examined for high rate Inductively Coupled Plasma etching of Si. Etch rates up to ~8$\mu\textrm{m}$/min were achieved with pure $SF_6$ discharges at high source power (1500 W) and pressure (35 mTorr). A direct comparison of the four feedstock gases under the same plasma conditions showed the Si etch rate to increase in the order $BF_3$ < $NF_3$< $PF_5$ < $SF_6$. This is in good correlation with the average bond energies of the gases, except for $NF_3$, which is the least strongly bound. Optical emission spectroscopy showed that the ICP source efficiently dissociated $NF_3$, but the etched Si surface morphologies were significantly worse with this gas than with the other 3 gases.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.401-404
• /
• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2002년도 추계학술대회논문집
• /
• pp.582-587
• /
• 2002

Current information storage devices, such as HDD, CD/DVD-ROM/RW, probe-based memory and hologram memory, are compared with biological information storage mechanisms in DNA and brain memory. Newly developed approaches to overcome the limit of storage capacity are introduced in both magnetic and optical recording devices. Linear and areal density of information stored in the biological and mechanical storages are compared for the applications and developments of new storage devices.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 추계학술대회 논문집
• /
• pp.755-758
• /
• 2000

Rapid prototyping is one of the most important technology for 21th century industry. To overcome the limitation of the material and function, Functional Prototype Development(FPD) concept is newly proposed. Wide function is necessary such as mechanical, optical, chemical and electrical property in order to solve broad requirements of the industry. The process of FPD has more than two conventional processes based on fusion technology and the FPD system is integrated with the interdisciplinary, interfacing and intelligent concepts. This paper shows some representative achievements such as optic coloring prototypes, electric multi layer printed circuit broad(MLB) and MEMS using electrostrictive polymer. Finally, we confirmed that FPD has a great possibility which can be applied in broad industry and will be a powerful tool in near future.

• 한국전기전자재료학회논문지
• /
• 제16권12S호
• /
• pp.1255-1260
• /
• 2003

In order to reduce driving power consumption, we propose and fabricate a new structure of asymmetric SOI 1${\times}$2 thermo-optic switch that has a back side silicon trenched structure. Compared to conventional SOI thermo optic switches without heat sink structure, it shows an improvement of switching power reduction from about 4 watt to 1.8 watt without sacrificing cross talk of about 20 ㏈ at the light wavelength of 1.55 $\mu\textrm{m}$. Here we also described the main design consideration and fabrication procedure for the proposed device.

• 대한용접접합학회:학술대회논문집
• /
• 대한용접접합학회 2005년도 춘계학술발표대회 개요집
• /
• pp.43-45
• /
• 2005

A precise bonding technique, transmission laser bonding using energy transfer, for polymer micro devices is presented. The irradiated IR laser beam passes through the transparent part and absorbed on the opaque part. The absorbed energy is converted to heat and bonding takes place. In order to optimize the bonding quality, the temperature profile on the interface must be obtained. Using optical measurements of the both plates, the absorbed energy can be calculated and heat transfer model was applied for obtaining the transient temperature profile. The transmission laser bonding has a potential in the local precise bonding in MEMS or Lab-on-a-chip.