• 반도체디스플레이기술학회지
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• 제18권2호
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• pp.53-57
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• 2019

In this study, we prepared sputtering cathode for large sputtering thin film in the facing targets sputtering(FTS) system. Before fabrication of cathode equipment, we investigated optimal magnetic flux in the sputtering cathode by using magnetic field stimulation(Comsol). According to the result of magnetic field stimulation, we manufactured the cathode. After we mounted laboratory-designed cathode on FTS system, the discharge properties were observed in vacuum condition. In addition, ITO films were deposited on glass substrate and their electrical and optical properties were investigated by various measurements (four-point probe, UV-VIS spectrometer, field emission scanning electron microscopy(FE-SEM), Hall-effect measurement).

• Journal of the Optical Society of Korea
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• 제14권4호
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• pp.395-402
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• 2010

This study reports a portable and precision photonic biosensor reader that can measure the concentration of a particular antigen using an optical resonant reflection biosensor (ORRB). To create a compact biosensor reader, a compact tunable vertical-cavity surface-emitting laser (VCSEL) and a compact built-in wavelength meter were manufactured. The wavelength stability and accuracy of the compact built-in wavelength meter were measured to be less than 0.02 nm and 0.06 nm, respectively. The tunable VCSEL emission wavelength was measured with the compact built-in wavelength meter, it has a fast sweep time (~ 10 seconds) and a wide tuning range (> 4 nm) that are sufficient for biosensor applications based on ORRB. The reflection spectrum of a plastic based ORRB chip was measured by the fabricated portable photonic biosensor reader using the VCSEL and wavelength meter. Although the reader is the size of a palmtop device, it could make a precise measurement of the peak wavelength on equal terms with a conventional bulky optical spectrometer.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.412-413
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• 2007

We report on the electrical, optical, and structural properties of indium zinc tin oxide (IZTO) anode films grown at room temperature on glass substrate. The IZTO anode films grown by a RF magnetron sputtering were investigated as functions of RF power, working pressure, and process time in pure Ar ambient. To investigate electrical, optical and structural properties of IZTO anode films, 4-point probe, Hall measurement, UV/Vis spectrometer, Field Emission Scanning Electron Microscopy (FE-SEM), and X-ray diffraction (XRD) were performed, respectively. A sheet resistance of $13.88\;{\Omega}/{\square}$, average transmittance above 80 % in visible range were obtained from optimized IZTO anode films grown on glass substrate. These results shown the amorphous structure regardless of RF power and working pressure due to low substrate temperature.

• 한국의학물리학회지:의학물리
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• 제28권4호
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• pp.226-231
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• 2017

The aim is to investigate the spectra responsibilities of QD (Quantum Dot) for the innovation of new dosimetry application for therapeutic Megavoltage X-ray range. The unique electrical and optical properties of QD are expected to make it a good sensing material for dosimeter. This study shows the spectra responsibility of toluene based ZnCd QD and PPO (2.5-diphenyloxazol) mixed liquid scintillator. The QDs of 4 sizes corresponding to an emission wavelength (ZnCdSe/ZnS:$440{\pm}5nm$, ZnCdSeS:470, 500, $570{\pm}5nm$) were utilized. A liquid scintillator for control sample was made of toluene, PPO. The Composition of QD loaded scintillators are about 99 wt% Toluene as solvent, 1 wt% of PPO as primary scintillator and 0.05, 0.1, 0.2 and 0.4 wt% of QDs as solute. For the spectra responsibility of QD scintillation, they were irradiated for 30 second with 6 MV beam from a LINAC ($Infinity^{TM}$, Elekta). With the guidance of 1.0 mm core diameter optical fiber, scintillation spectrums were measured by a compact CCD spectrometer which could measure 200~1,000 nm wavelength range (CCS200, Thorlabs). We measured the spectra responsibilities of QD loaded organic liquid scintillators in two scintillation mechanisms. First was the direct transfer and second was using wave shifter. The emission peaks from the direct transfer were measured to be much smaller luminescent intensity than based on the wavelength shift from the PPO to QDs. The emission peak was shifted from PPO emission wavelength 380 nm to each emission wavelength of loaded QD. In both mechanisms, 500 nm QD loaded samples were observed to radiate in the highest luminescence intensity. We observed the spectra responsibility of QD doped toluene based liquid scintillator in order to innovate QD dosimetry applicator. The liquid scintillator loading 0.2 wt% of 500 nm emission wavelength QD has most superior responsibility at 6 MV photon beam. In this study we observed the spectra responsibilities for therapeutic X-ray range. It would be the first step of innovating new radiation dosimetric methods for radiation treatment.

• 한국해양환경ㆍ에너지학회지
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• 제18권4호
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• pp.304-309
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• 2015

해양에서 기름 유출 사고로 인한 오염도를 정량적으로 평가하기 위해서, 사고 현장에서 기름을 직접 탐지할 수 있는 센서의 적용이 필요하다. 여러 형태의 기름 탐지 센서 중에서, 기름 성분에 의한 형광 현상(fluorescence)을 탐지 원리로 하는 센서는 해수 중에 존재하는 기름의 농도를 측정할 수 있으므로 효용성이 높은 장점을 갖고 있다. 그러나 이런 종류의 센서는 기름의 형광 현상을 야기시키기 위해서, 수은 램프(mercury lamp)와 같은 자외선 광원(ultraviolet light source)이 필요하고 다양한 종류의 광학 필터와 광전증배관(photomultiplier tube, PMT)과 같은 광학 센서가 주로 사용된다. 이러한 이유로 형광 측정을 기반으로 하고 있는 센서는 측정 플랫폼의 크기가 크기 때문에 현장에서 원활히 사용하기에 한계가 있으며, 고가의 부품들이 집적되어 있어, 센서의 가격이 높은 단점을 갖고 있다. 이러한 단점을 극복하기 위해서, 본 논문에서는 소형의 크기와 가격 경쟁력을 갖고 있는 형광 광도계 기반의 기름 탐지 센서를 설계하는 방법에 대해서 제시하였다. 형광 광도계의 설계 인자를 파악하기 위한 방법으로, 본 연구에서는 5종의 원유 샘플과 3종의 정제유를 이용하여, 기름의 여기 스펙트럼(excitation spectrum)과 발광 스펙트럼(emission spectrum)을 측정하였다. 여기 스펙트럼과 발광 스펙트럼의 측정을 위해서는 형광 분광기(fluorescence spectrometer)를 이용하였고, 측정된 스펙트럼 자료를 분석하여 형광 광도계(fluorimeter) 설계에 필요한 유종에 따른 공통 스펙트럼 파장 대역을 도출하였다. 본 실험을 통해서 모든 종류의 기름 샘플의 경우, 여기 스펙트럼과 발광 스펙트럼의 최고 값을 갖는 파장의 차이는 약 50 nm인 것으로 파악되었다. 실험 중에서, 여기광의 파장을 365 nm와 405 nm로 고정하였을 경우, 280 nm와 325 nm로 고정하였을 경우에 비해서 최대 발광(emission)의 세기가 작아지는 것을 확인할 수 있었다. 따라서 형광 광도계의 광원 파장을 365 nm 또는 405 nm로 사용할 경우, 광학 센서의 민감도(sensitivity)가 발광되는 빛의 세기를 측정할 수 있도록 설계에 반영해야 할 것으로 판단된다. 본 연구의 실험에서 도출된 결과를 통해서, 기름 탐지를 위한 형광 광도계의 광원, 광학 센서 그리고 광학 필터의 유효 파장 대역을 선택하는데 필요한 설계 인자를 파악할 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.254.1-254.1
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• 2014

Atmospheric plasma's electron temperature is less than thermal plasma, so it is useful at bio experiment. We have investigated the optical emission spectroscopy (OES) lines by spectrometer during Atmospheric plasma bombardment onto the PBS surface by using an Ar gas flow. Also we have measured the OH radical density inside the solution induced by the Atmospheric plasma bombardment. OH radical species are appeared at 308 nm and 309 nm. Densities of OH radical species has been found to be significantly decreased versus depth of the solution from 2 mm to 6 mm. OH radical density inside the PBS is measured to be about $1.87{\times}1016cm-3$ downstream at 2 mm from the surface under optimized Ar gas flow of 200 sccm in Atmospheric plasma. Also we have investigated cell viability of lung cancer and normal cell after Atmospheric plasma treatment for fixed exposure time in 60 seconds, but different depths. We used SEM, we observed change of cell morphorogy, did experiment about FDA & PI Staining method. It is found that there is selectivity between the lung cancer and lung normal cell, in which cancer cell definitely has higher cell death ratio more than normal cell. We have investigated change of bond structure in FT-IR spectroscopy, the following peaks were observed: and intense O-H peak at 3422 cm-1 and at 2925 cm-1 corresponds to C-H stretch vibrations of methylene group.

• 한국진공학회지
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• 제7권4호
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• pp.403-409
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• 1998

본 연구에서는 자장강화된 유도결합형 플라즈마를 사용하여 이 플라즈마의 특성을 조사하고 또한 산화막 식각에 미치는 영향에 대하여 조사하였다. 자장 강화를 위해 4쌍의 영구자석이 사용되었고, 산화막 식각을 위해 $C_2F_6, CHF_3, C_4F_8$ 가스 및 이들 혼합가스가 사 용되었으며 첨가가스로 $H_2$를 사용하였다. 자장강화된 유도결합형 플라즈마 특성 분석을 위 해 Langmuir probe와 optical emission spectrometer를 이용하여 산화막 식각 속도 및 photoresist에 대한 식각 선택비를 stylus profilometer를 이용하여 측정하였다. 이온 밀도에 있어서 자장 유무에 따른 큰 변화는 관찰되지 않았으나 이온전류밀도의 균일도는 자장을 가 한 경우 웨이퍼가 놓이는 기판 부분에서 상당히 증가된 것을 알 수 있었다. 또한 자장이 가 해진 경우, 자장을 가하지 않은 경우에 비해 플라즈마 전위가 감소된 반면 전자온도 및 라 디칼 밀도는 크게 증가되는 것을 알 수 있었으며 산화막 식각시에도 높은 식각 속도와 식각 균일도를 보였다. 산화막 식각을 위해 수소가스를 사용한 가스조합중에서 C4F8/H2가스조합 이 가장 우수한 식각 속도 및 photoresist에 대한 식각 선택비를 나타내었으며 공정변수를 최적화 함으로써 순수 C4F8에서 4이상의 선택비와 함께 8000$\AA$/min의 가장 높은 식각속도 를 얻을 수 있었으며, 50%C4F8/50%H2에서 4000$\AA$/min의 산화막 식각 속도와 함께 15이상 의 식각 선택비를 얻을 수 있었다.

• 분석과학
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• 제15권5호
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• pp.399-409
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• 2002

글로우방전 (Glow Discharge)을 이용한 원자방출 분광계의 On-line 분광분석을 위해 개발된 본 시스템을 위한 프로그램은 주변 광학기기들을 제어하는 부분과 스펙트럼의 비선형적인 오차를 줄여 보다 정확한 결과를 얻기 위해 인공지능 기법을 도입한 스펙트럼 해석 부분으로 구성되어져 있다. McPHERSON 207 Monochromator를 GPIB 통신 프로토콜로서 제어하였으며, (주)Photon_Tek에서 제작한 A/D Amplifier를 사용하여 PMT로부터 검출 신호를 측정할 수 있었다. 인공지능 기법인 HNN(Hybrid Neural Network)을 스펙트럼 해석 부분에 도입하여 P, Cu, Fe, Cr, 등의 정성 분석과, Cd 10 ppb의 미량 검출을 통한 정량분석을 기존의 상용화된 방법보다 정확하게 수행할 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.250.2-250.2
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• 2014

Currently, teeth whitening method which is applicable to dental surgery is that physician expertises give medical treatment to teeth directly dealed with a high concentration of hydrogen peroxide and carbamide peroxide. If hydrogen peroxide concentration is too high for treatment of maximized teeth whitening effect [1], it is harmful to the human body [2]. To the maximum effective and no harmful teeth whitening effect in a short period of time at home, we have observed the whitening effect using carbamide peroxide (15%) and a low-temperature atmospheric pressure plasma jet which is regulated by the Food and Drug Administration. The gas supplied conditions of the non-thermal atmospheric pressure plasma jet was with the humidified (0.6%) gas in nitrogen or air at gas flow rate of 1000 sccm. Also, the measurement of chemical species from the jet was carried out using the optical emission spectroscopy (OES), the evidence of increased reactive oxygen species compared to non-humidified plasma jet. We have found that the whitening effect of the plasma is very excellent through this experiment, when bovine teeth are treated in carbamide peroxide (15%) and water vapor (0.2 to 1%). The brightness of whitening teeth was increased up to 2 times longer in the CIE chromaticity coordinates. The colorimetric spectrometer (CM-3500d) can measure color degree of whitening effect.

• 한국산업보건학회지
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• 제26권1호
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• pp.48-57
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• 2016

Objectives: This study was conducted to evaluate the accuracy and precision of airborne metal analysis using polyvinyl chloride(PVC) membrane filter by pretreatment methods. Methods: A total of 75 spiked PVC samples for Cr, Fe and Mn ranged from 6 ug/sample to 40 ug/sample were used to evaluate recovery rates for three pretreatment methods: acid extraction, hot plate ashing and microwave digestion. For Mn, an additional 75 spiked mixed cellulose ester(MCE) membrane filters were analysed to compare the recovery rates of PVC samples. All samples were analysed with an inductively coupled plasma optical emission spectrometer(ICP-OES) and manganese samples were additionally analyzed by atomic absorption spectrometer(AAS). Results: The overall mean recovery rates of PVC samples for Cr, Fe and Mn were 90% or higher regardless of pretreatment methods, but there were statistically significant differences in recovery rates for Cr(p<0.05) and Mn(p<0.01) samples by pretreatment methods. The biases and the coefficient variations of PVC samples for three metals pretreated with three kinds of pretreatment methods ranged from 1.7% to 4.7% and from 1.6% to 6.5%, respectively. The manganese PVC samples pretreated by microwave digestion and analyzed with ICP-OES had the lowest bias at 1.9% and also showed lower bias than the bias for MCE samples, 2.7%. Conclusions: In order to accurately analyze the metals sampled with PVC membrane filters, microwave digestion and ICP-OES can be recommended.