• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.2
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• pp.132-139
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• 2001

We considered the uniformity of fabricated micromirror arrays by characterizing the fabrication process and calculating the appropriate driving voltages of micromirrors used as virtual photomask in maskless photolithography. The uniformity of the micromirror array in terms of driving voltage and optical characteristics is adversely affected by factors, such as the air gap between the bottom electrode and the mirror plate, the spring shape and the deformation of the mirror plate or torsion spring. The thickness deviation of the photoresist sacrificial layer, the misalignment between mirror plate and bottom electrode, the aluminum deposition condition used to produce the spring and the mirror plate, and initial mirror deflection were identified as key factors. Their importance lies in the fact that they are related to air gap deviations under the mirror plate, asymmetric driving voltages in left and right mirror directions, and the deformation of the Al sring or mirror plate after removal of the sacrificial layer. The plasma ashing conditions used for removing the sacrificial layer also contributed to the deformation of the mirror plate and spring. Driving voltages were calculated for the pixel operation of the micromirror array, and the non-uniform characteristics of fabricated micromirrors were taken into consideration to improve driving performance reliability.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1198-1201
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• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

• Journal of the Optical Society of Korea
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• v.16 no.1
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• pp.22-28
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• 2012

We report a focal-length tunable liquid lens based on thermopneumatically driven fluidic pressure. The fluidic pressure is generated by deformation of an elastomeric diaphragm induced by thermopneumaticity from a laterally integrated microheater sealed within an air chamber. The pressure is transmitted by a confined liquid to a lens diaphragm through an internal fluid channel. The liquid filling under the lens diaphragm functions as a liquid lens for dynamic focusing with properties depending on the curvature of the deformed diaphragm. The diaphragm area of the air chamber is designed five times larger than that of the lens cavity to yield high focal-length tunability by amplified deflection of the lens diaphragm. With our method, we achieved excellent focal-length tunability from infinity (without an input current) to 4 mm (with an input current of 12 mA) with a lens aperture diameter of 2 mm.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.2
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• pp.199-205
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• 2014

This research focuses on the development of an interrogator that operates and measures fiber Bragg grating(FBG) multiplexing sensor probes for accurate-measurement of the blade deflection in a wind power generator. We designed and fabricated an optical source and spectrum module for the interrogator. Additionally, we verified the wavelength repeatability within 0.001 nm and the wavelength stability within 1 pm of the optical source, and we experimentally determined that the wavelength scanning range was about 44.4 nm. The FBG sensor with 2 nm resolution can be extended to a performance-efficient system that measures more than 20 sensors. The implemented interrogator has 0.141 nm wavelength variations corresponding to an ambient temperature range of $0^{\circ}C$ to $70^{\circ}C$. The measurement error can be easily reduced by employing a temperature compensation algorithm. In this study, we quantitatively confirmed the accuracy and operating stability of the interrogator.

• Advanced Composite Materials
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• v.17 no.1
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• pp.41-56
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• 2008

In this research, optical fiber sensors and shape memory alloys (SMA) were incorporated into sandwich panels for development of a smart honeycomb sandwich structure with damage detection and shape recovery functions. First, small-diameter fiber Bragg grating (FBG) sensors were embedded in the adhesive layer between a CFRP face-sheet and an aluminum honeycomb core. From the change in the reflection spectrum of the FBG sensors, the debonding between the face-sheet and the core and the deformation of the face-sheet due to impact loading could be well detected. Then, the authors developed the SMA honeycomb core and bonded CFRP face-sheets to the core. When an impact load was applied to the panel, the cell walls of the core were buckled and the face-sheet was bent. However, after the panel was heated over the reverse transformation finish temperature of the SMA, the core buckling disappeared and the deflection of the face-sheet was relieved. Hence the bending stiffness of the panel could be recovered.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• Journal of the Korean Society for Nondestructive Testing
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• v.13 no.1
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• pp.21-28
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• 1993

If the infinitesimal delamination exists and the two waves can hardly be distinguished from each other on account of being much closer, we cannot measure the thickness of delamination by the time difference method. On this study, we calculated the thickness of infinitesimal delamination model by means of measuring echo height due to the deflection of material particles and utilized Newton Ring for optical measurement as a delamination model. From the result of Newton Ring expressed in the delamination model, we can calculate the infinitesimal delamination thickness up to $0.2{\sim}0.3{\mu}m$ due to the difference of acoustic impedance by the ratio of the echo height to the total reflection.

• Transactions of the Korean Society of Mechanical Engineers
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• v.1 no.2
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• pp.73-81
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• 1977

It is well known fact that there is a theoretical analogous relation ship in terms of differential equation between the stress distribution of a bar under pure torsional moment and the deflection of a membrane subjected to a uniform pressure. This relationship has been applied to the experimental determination of torsional stresses with troublesome and elaborative measuring procedure since Griffith's invention of the soap-film apparatus. In this paper, the soap-film was replaced by a highly polished steel plate and whole visualable deflectional contour-line-map was able to obtain by using Michelson Interferometer with Ne-He Gas Laser lignt source enabling to determine the stress distribution in the vicnity of the symmetrical inner-boundary in a section. Experimental results were satisfactory and the margin of error in the measurement was lower than 1%.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.6
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• pp.471-477
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• 2000

The position control accuracy of a robot arm is significantly deteriorated when a long arm robot is operated at a high speed. In this case, the robot arm must be modeled as a flexible structure, not a rigid one, and its control system should be designed with its elastic modes taken into account. In this paper, the tip position control scheme of a one-link flexible manipulator using 2-DOF controller with sliding mode is presented. The robot consists of a flexible arm manufactured with a thin aluminium plate, an AC servo motor with a harmonic drive for speed reduction, an optical encoder and a CCD camera as a vision sensor for on-line measuring the tip deflection of the flexible m. Simulation and experimental results of the flexible manipulator with a proposed controller are provided to show the effectiveness of the controller.

• Proceedings of the Korea Concrete Institute Conference
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• 2000.10a
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• pp.517-522
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• 2000

In the past few years, the nondestructive inspection technology has greatly developed due to the increased necessity to gain a complete understanding of the bridge behavior. Especially, the deformations of bridges contain a lot of informations about its health state. By measuring these deformations it is possible to analyze the loading and aging behavior of the structure. However, the current methods (such as LVDT, dial gage, optical displacement tranceducer, etc) are often of changeable application on site and have the limitations of installation. In this paper, the classical beam theory was reviewed and the deflections of structure are estimated using measured strain which is easy to acquire. The applicability of this algorithm is verified by a preliminary steel beam test and two types of concrete beam tests. Also fiber optic sensors as well as resistive strain gages were installed in the concrete beams to establish the applicability of fiber optic sensors in the field of civil engineering.