• 제목/요약/키워드: On-machine form measurement

검색결과 57건 처리시간 0.023초

SEM 측정법에 의한 초정밀 표면가공 특성연구 (A Study on the Surfaces Machining Characteristics of Ultra-precision through SEM Measurement)

  • 강순준;오상록;이갑조;김종관
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.34-41
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    • 2004
  • The purpose of this paper is to look at the characteristics of surface finishing which is one of the form accuracies and to obtain the fundamental technical data from the process of machining with diamond tool through experiment and theoretical analysis. The experiments were conducted with domestic made ultra-precision machine and MCD.PCD tool, with aluminum alloyed material and brass being used for the work pieces. The goal of the size accuracy was set to 100nm. The most suitable tool nose radius and machining conditions were selected, and the variations of the surface roughness were observed using SEM method while machining the distance of up to 500km. These data were evaluated and they examined the variation of the machined surfaces while cutting up to 500km of machining distance. At the same time, the state for the wear of diamond tool nose was analyzed and carefully examined through the newest measuring device. Additionally, the characteristics of ultra-precision machining technology were studied through visual analysis.

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초음파 진동자를 이용한 알루미늄 와이어 용접에 관한 연구 (A Study on the Aluminum Wire Bondingby Using Ultrasonic Vibrator)

  • 김희수;이건복
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1994년도 추계학술대회 논문집
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    • pp.571-576
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    • 1994
  • In recent years, ultrasonic has been widely applied in measurement and industrial fields and its application range has been expanded as a result of continuous research and development. Wire Bonding Machine, an instrument fabricating semi-conductor, makes use of ultrasonic bonding method. In order to improve the currently used wire bonding machine using ultrasonic energy, technical accumulation is needed steadily through development of exciting device of ultrasonic composed of piezoelectic vibrator and horn. This study investigates the design conditions affecting the dynamic characteristics through the theoretical and experimental analysis of piezoelectric vibrator and horn, The study conducts separately the system identification of piezoelectric vibrator in time domain and the modal analysis of horn in frequency domain. In theoretical model, the integrated modeling is conducted via a combination of dynamic identification of piezoelectric vibrator and theoretical analysis of horn. Hence comparison is made for theoretical and experimental results of the dynamic characteristics of the ultrasonic transducer composed of piezoelectric vibrator and horn. Form the results of this study we develop the design technique of ultrasonic transducer using dynamic characteristic analysis and propose the possibility of ultrasonic welding considering the optimal condition of the natural frequency and vibration mode of horn.

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Measurement of Arterial Pulse Wave at the Temple Using PZT Piezo Sensor

  • Kil Se Kee;Han Young Hwan;Lee Eung Hyuk;Park Young Bae;Cho Heung Ho;Min Hong Ki;Hong Seung Hong
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2004년도 학술대회지
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    • pp.772-775
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    • 2004
  • Generally, arterial pulse waves are measured at the radial arterial of wrist or carotid arterial of neck using a sensor such as pressure sensor, piezoelectric sensor or optic sensor. But in this paper, arterial pulse wave is measured at the temple using PZT piezo sensor which is attached on the temple in form of a hair-band. Arterial Pulse waves are generally measured when a reagent is in a static state. But in this paper, we implemented the arterial pulse wave measurement system, as a previous stage of the arterial pulse wave measurement system for running at outdoors or on a running machine, that measures arterial pulse waves at the temple, which is the least moving part when running. Thorough the continuous study, if the motion artifact when running is possible to be removed, the system will be able to perform monitoring of running men's states and especially emergency signals such as serious pulse waves of an/old and feeble persons and handicapped persons.

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레이저 반사광 분석을 통한 미세 표면 프로파일 추정 알고리즘의 개발 (Development of microscopic surface profile estimation algorithm through reflected laser beam analysis)

  • 서영호;안중환;김화영;김선호
    • 한국정밀공학회지
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    • 제22권11호
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    • pp.64-71
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    • 2005
  • In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

머신비전에 의한 LED Chip Package 형광물질 토출형상 측정 (Measurement System for Phosphor Dispensing Shape of LED Chip Package Using Machine Vision)

  • 하석재;김종수;조명우;최종명
    • 한국산학기술학회논문지
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    • 제14권5호
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    • pp.2113-2120
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    • 2013
  • 본 연구는, LED 칩 패키지에 있는 토출된 형광체 수지의 모양을 인라인 측정을 통해 개발된 검사 시스템을 기초로 한 효율적인 머신 비전에 관한 연구이다. 형광체의 반투명 특성 때문에 조사된 빛이 칩의 표면뿐만 아니라 하단 부에서도 반사된다. 이러한 현상이 LED 칩 검사의 신뢰성을 저하시키기 때문에 적절한 조명 광학계를 결정하기 위해 백색광 LED 와 635nm의 레이저 슬릿 빛을 이용하여 검사하였다. 또한, 광 삼각측정법을 이용해 정반사와 분산반사법으로 검사를 수행하였다. 실험 결과 백색 슬릿 광과 정반사 반사법의 조합이 가장 좋은 검사 결과를 낸다는 것을 확인할 수 있었다. Catmull-Rom 스플라인 보간법을 이용하여 측정된 데이터를 부드러운 표면 형상으로 나타내었다. 측정 결과를 통해 개발된 시스템이 LED 칩 패키징 공정에 인라인 검사에 성공적으로 적용될 수 있다는 결론을 내릴 수 있다.

로봇팔 타입 삼차원좌표측정기를 이용한 광학계의 비축수차 보정 (Coma Aberration Correction of Optical System by using a Robot Arm Type Coordinated Measuring Machine)

  • 전호빈;김고은;송인웅;강혁모;이혁교;김영식;양호순;권종훈
    • 반도체디스플레이기술학회지
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    • 제15권3호
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    • pp.62-66
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    • 2016
  • Optical system needs to be aligned before its undergoing process, is usually shows coma aberrations, which occurred due to imperfection in the lens or other components results in off-axis point sources, appearing to have a tail like a comet. There are some methods to correct coma aberration. In this paper, to correct coma aberration in optical system, using a robot arm type coordinate measuring machine(CMM). CMMs are widely used to measure the form of accuracy of parts and positioning accuracy of systems. Among them, robot arm type CMM has more advantages than the others, such as its mobility and measuring range. However, robot arm type CMM has lower accuracy than cantilever type CMM. To prove robot arm type CMM's accuracy, several factors were suggested in this paper and the final measuring results were compared to a commercial cantilever type CMM. Based on this accuracy, a typical optical system was successfully aligned by using our robot arm type CMM.

밀리미터파 간섭계용 타원 반사경의 공구 변화에 따른 고속절삭 특성 연구 (A Study on the characteristics of the High Speed Machining for several Tool Materials change of Ellipse Mirror Machining to be used in Millimeter Wave Interferometer System)

  • 이상용;김건희;김효식;양순철;홍창덕;조병무;원종호
    • 한국기계가공학회지
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    • 제6권4호
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    • pp.22-27
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    • 2007
  • This study aims to find the optimal cutting conditions, when ellipse mirrors consisted Aluminum alloy were made it the Millimeter-Wave Interferometer System mirror with several tools on the High-Speed Machine. Machining technique for precision machining characteristics of ellipse mirrors consisted Al6061 matter by Ball endmill is reported in this paper., Results of machining on the High-Speed Machine(using NCD(Natural Crystalline diamond), WC and coated TiAlN ${\phi}6mm$ ball endmill tool) had measurement of surface roughness and form accuracy with cutting conditions(the Feed rate, the Depth of cut and the Cutting speed). the Millimeter-Wave Interferometer System ellipse mirror had been machined foundational precision machining characteristics of aluminum.

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Measurement of Nonlinear Time-variant Source Characteristics of Intake and Exhaust Systems in Fluid Machines

  • Jang Seung-Ho;Ih Jeong-Guon
    • The Journal of the Acoustical Society of Korea
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    • 제24권3E호
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    • pp.87-89
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    • 2005
  • The acoustical sources of intake and exhaust systems in fluid machines are often characterized by the source impedance and strength using linear frequency-domain modeling. In the case of the sources which are nonlinear and time-variant, however, the source parameters were sometimes incorrectly obtained. In this paper, the source model and direct measurement technique are modified in order to evaluate the effect due to nonlinear and periodically time-varying source character as well as the linear property of the reflectivity of in-duct fluid machine source. With a priori known kinematical information of the source, the types of nonlinear time-variant terms can be presumed by a simple physical model, in which there is practically no restriction on the form of the model. The concept of source impedance can be extendable by introducing the linear frequency response function for each nonlinear or time-variant input. Extending the conventional method and adapting the reverse MISO technique, it is possible to develop a direct method that can deal with the nonlinear time-variant source parameters. The proposed direct method has a novel feature that there is no restriction on the probability or spectral natures of the excited sound pressure data. The present method is verified by the simulated measurements for simplified fluid machines. It is thought that the proposed method would be useful in predicting the insertion loss or the radiated sound level from intake or exhaust systems.

원통형 주축 변위 센서를 이용한 고속 밀링 가공 상태 감시 (A Cylindrical Spindle Displacement Sensor and its Application on High Speed Milling Machine)

  • 김일해;장동영
    • 한국공작기계학회논문집
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    • 제16권5호
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    • pp.108-114
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    • 2007
  • A new cutting force estimating approach and machining state monitoring examples are presented which uses a cylindrical displacement sensor built into the spindle. To identify the tool-spindle system dynamics with frequency up to 2 kHz, a home-built electro-magnetic exciter is used. The result is used to build an algorithm to extract the dynamic cutting force signal from the spindle error motion; because the built-in spindle sensor signal contains both spindle-tool dynamics and tool-workpiece interactions. This sensor is very sensitive and can measure broadband signal without affecting the system dynamics. The main characteristic is that it is designed so that the measurement is irrelevant to the geometric errors by covering the entire circumferential area between the target and sensor. It is also very simple to be installed. Usually the spindle front cover part is copied and replaced with a new one with this sensor added. It gives valuable information about the operating condition of the spindle at any time. It can be used to monitor cutting force and chatter vibration, to predict roughness and to compensate the form error by overriding spindle speed or feed rate. This approach is particularly useful in monitoring a high speed machining process.

비구면 유리 어레이 렌즈 성형용 초경합금 코어 초정밀 연삭 가공에 관한 연구 (Study on Ultra-Precision Grinding Processing for Aspheric Glass Array Lens WC Core)

  • 고명진;박순섭
    • 한국정밀공학회지
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    • 제33권11호
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    • pp.893-898
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    • 2016
  • Plastic array lens are cheap to manufacture; however, plastic is not resistant to high temperatures and moisture. Optical glass represents a better solution but is a more-expensive alternative. Glass array lens can be produced using lithography or precision-molding techniques. The lithography process is commonly used, for instance, in the semiconductor industry; however, the manufacturing costs are high, the processing time is quite long, and spherical aberration is a problem. To obtain high-order aspherical shapes, mold-core manufacturing is conducted through ultra-precision grinding machining. In this paper, a $4{\times}1$ mold core was manufactured using an ultra-precision machine with a jig for the injection molding of an aspherical array lens. The machined mold core was measured using the Form TalySurf PGI 2+ contact-stylus profilometer. The measurement data of the mold core are suitable for the design criterion of below 0.5 um.