• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.3
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.27-32
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• 2010

The OMM(On-Machine-Measurement) system has many advantages compare to conventional measurement in the way the time and cost. But, the sensor suitable to OMM system is restrictive use. Touch trigger probe sensor has long time for measurement and non-contact sensor has directional demerit. Because the long mechanical parts such as gear and lead screw for pump, injector and machine tools has big and heavy, unclamp and transferring for measurement in machining process is very difficult. This paper presents a development of ultra miniature eddy current displacement sensor with 3 axes for On-Machine-Measurement system. The accuracy of the sensor is experimentally proved in the grinding machine. In experimental results, the accuracy has under ${\pm}5\;{\mu}m$.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.145-152
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• 2004

This paper proposed efficient manufacturing system using the OMM (on-machine measurement) system. The OMM system is software based 3D modeler for inspection on machine and it is interfaced tool machine with RS232C. The software is composed of two inspection modules that one is touch probe operating module and the other is laser displacement sensor operating module. The module for touch probe has need of inspection feature that extracted it from CAD data. Touch probe moves to workpiece by three operating modes as follows: manual, general and automatic mode. The operating module of laser displacement sensor is used inspection for profile and very small hole. An Advantage of this inspection method is to be able to execute on-line inspection during machining or after it. The efficiency of proposed system which can predict and definite the machining errors of each process is verified, so the developed system is applied to inspect the mold-base(cavity, core).

• Journal of the Korean Society for Precision Engineering
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• v.11 no.6
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• pp.168-178
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• 1994

This paper presents an optical surface roughness sensor developed for intermediate- process measurement on the machine. The light scattering method is adopted for the sensor, which is designed conpact and flexible enough to apply to 'on the machine' measurement of surface roughness. The developed sensor has special features such that it makes use, as the measurement parameter, of the ratio between fluxes of the incident light, and the specularly and partly diffusely reflected light, and that it can adjust the incident light angle. The experimental investigation reveals not only the sensor has good performance as a surface roughness sensor but the sensor is very robust so as to be useful in in-process measurement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1581-1584
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• 2003

This paper proposed efficient manufacturing system using OMM(on-machine measurement) system and OMM operating S/W based 3D modeler. A Developed program connected tool machine with RS232C. It is composed two operating system that touch probe operating and laser displacement sensor operating system. A program for touch probe possible measure considered inspection feature and CAD data. The laser operating program is used inspection for profile. very small hole using installed feature data. This system is applied manufacturing line of mold(cavity, core) also verification of efficiency manufacturing process that production, reduction machining error of each process

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.2
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• pp.56-63
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• 2001

The objective of this research is to develop a measurement error compensation method for On-Machine Measurement (OMM) process based on a closed-loop configuration. Geometric errors of vertical machining center are measured using ball-bar system, and probing errors are measured using master ball. The errors are represented using homogeneous trans-formation matrices and the closed-loop configuration method is applied to calculate 3-dimensional errors. To verify the effectiveness of the method proposed in this research, compensated results are compared to the data using CMM process, and the results are analyzed. The results show the proposed method can be applied in OMM process to make the measured data more reliable.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.34-41
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• 2003

This paper suggests a methodology fur improving the machining accuracy by compensating for the machining errors based on on-machine measurement process. Probing errors and machine tool errors included in the measurement data were calibrated or compensated to obtain the actual machining errors. Machine tool errors were modeled in forward and backward directions according to the axis movement direction to consider the effects of backlash errors on the measurement data, and model parameters were determined by measuring a cube array artifact. A rectangular workpiece was machined and then measured with a touch probe as a verification experiment. Machining experiments showed that the machining errors were reduced to within the designated tolerance after compensating for the actual machining errors by modifying the original footpath for the next-step machining.

• IE interfaces
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• v.11 no.1
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• pp.199-205
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• 1998

This paper describes the development of on-the-machine measuring(OMM) system which can directly measure the two and three dimensional machined accuracy using a scanning probe in milling machine. Two algorithms, NC program based continuous path(CP) measurement and CAD data assisted point to point(PTP) measurement, are developed for three dimensional measurements, with consideration of the characteristics of the scanning probe. The algorithms are used to develop an auto measuring system. The delveloped system is compared with the CMM (Coordinate Measuring Machine) in terms of accuracy and repeatability. The OMM system is expected to realize measurement time reduction and hence result in high productivity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.2 s.95
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• pp.201-210
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• 1999

One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric and thermal errors of the machine tools. Therefore, a key requirement for improving te machining accuracy and product quality is to reduce the geometric and thermal errors of machine tools. This study models geometric error for error analysis and develops on-machine measurement system by which the volumetric erors are measured. The geometric error is modeled using form shaping function(FSF) which is defined as the mathematical relationship between form shaping motion of machine tool and machined surface. The constant terms included in the error model are found from the measurement results of on-machine measurement system. The developed on-machine measurement system consists of the spherical ball artifact (SBA), the touch probe unit with a star type stylus, the thermal data logger and the personal computer. Experiments, performed with the developed measurement system, show that the system provides a high measuring accuracy, with repeatability of ${\pm}2{\mu}m$ in X, Y and Z directions.