• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.11
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• pp.18-23
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• 2019

The oil immersion method can be used to create objective lenses with long working distances without sacrificing the focusing resolution for laser processing. In this study, a space in which air or oil can be filled was formed in the middle of a lens for analyzing the optical properties of a liquid-oil immersion lens. As the refractive media, air and oils of different refractive index values (1.2 and 1.5, respectively) were used. A simulation was conducted in the ZEMAX software environment using the ray-tracing technique, and the performance of the oil immersion lens was verified by determining its image distortion and focal length (FL) in each medium. In the case of air, the calculated FL was 0.813 mm, whereas the imaged FLs were 1.594 mm and 8.126 mm when the refraction indices were 1.2 and 1.5, respectively. The FL of an oil immersion lens could be increased considerably. In terms of image distortion, the oil immersion lens exhibited little distortion at the center in all cases, but different degrees of image distortion were observed at different points away from the center depending on the refraction index degree.