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Plasma Etching Process based on Real-time Monitoring of Radical Density and Substrate Temperature

  • Takeda, K.;Fukunaga, Y.;Tsutsumi, T.;Ishikawa, K.;Kondo, H.;Sekine, M.;Hori, M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.93-93
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    • 2016
  • Large scale integrated circuits (LSIs) has been improved by the shrinkage of the circuit dimensions. The smaller chip sizes and increase in circuit density require the miniaturization of the line-width and space between metal interconnections. Therefore, an extreme precise control of the critical dimension and pattern profile is necessary to fabricate next generation nano-electronics devices. The pattern profile control of plasma etching with an accuracy of sub-nanometer must be achieved. To realize the etching process which achieves the problem, understanding of the etching mechanism and precise control of the process based on the real-time monitoring of internal plasma parameters such as etching species density, surface temperature of substrate, etc. are very important. For instance, it is known that the etched profiles of organic low dielectric (low-k) films are sensitive to the substrate temperature and density ratio of H and N atoms in the H2/N2 plasma [1]. In this study, we introduced a feedback control of actual substrate temperature and radical density ratio monitored in real time. And then the dependence of etch rates and profiles of organic films have been evaluated based on the substrate temperatures. In this study, organic low-k films were etched by a dual frequency capacitively coupled plasma employing the mixture of H2/N2 gases. A 100-MHz power was supplied to an upper electrode for plasma generation. The Si substrate was electrostatically chucked to a lower electrode biased by supplying a 2-MHz power. To investigate the effects of H and N radical on the etching profile of organic low-k films, absolute H and N atom densities were measured by vacuum ultraviolet absorption spectroscopy [2]. Moreover, using the optical fiber-type low-coherence interferometer [3], substrate temperature has been measured in real time during etching process. From the measurement results, the temperature raised rapidly just after plasma ignition and was gradually saturated. The temporal change of substrate temperature is a crucial issue to control of surface reactions of reactive species. Therefore, by the intervals of on-off of the plasma discharge, the substrate temperature was maintained within ${\pm}1.5^{\circ}C$ from the set value. As a result, the temperatures were kept within $3^{\circ}C$ during the etching process. Then, we etched organic films with line-and-space pattern using this system. The cross-sections of the organic films etched for 50 s with the substrate temperatures at $20^{\circ}C$ and $100^{\circ}C$ were observed by SEM. From the results, they were different in the sidewall profile. It suggests that the reactions on the sidewalls changed according to the substrate temperature. The precise substrate temperature control method with real-time temperature monitoring and intermittent plasma generation was suggested to contribute on realization of fine pattern etching.

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An Incident-Responsive Dynamic Control Model for Urban Freeway Corridor (도시고속도로축의 유고감응 동적제어모형의 구축)

  • 유병석;박창호;전경수;김동선
    • Journal of Korean Society of Transportation
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    • v.17 no.4
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    • pp.59-69
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    • 1999
  • A Freeway corridor is a network consisting of a few Primary longitudinal roadways (freeway or major arterial) carrying a major traffic movement with interconnecting roads which offer the motorist alternative paths to his/her destination. Control measures introduced to ameliorate traffic performance in freeway corridors typically include ramp metering at the freeway entrances, and signal control at each intersections. During a severe freeway incident, on-ramp metering usually is not adequate to relieve congestion effectively. Diverting some traffic to the Parallel surface street to make full use of available corridor capacity will be necessary. This is the purpose of the traffic management system. So, an integrated traffic control scheme should include three elements. (a)on-ramp metering, (b)off-ramp diversion and (c)signal timing at surface street intersections. The purpose of this study is to develop an integrated optimal control model in a freeway corridor. By approximating the flow-density relation with a two-segment linear function. the nonlinear optimal control problem can be simplified into a set of Piecewise linear programming models. The formulated optimal-control Problem can be solved in real time using common linear program. In this study, program MPL(ver 4.0) is used to solve the formulated optimal-control problem. Simulation results with TSIS(ver 4.01) for a sample network have demonstrated the merits of the Proposed model and a1gorithm.

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A Study On Digital Hybrid System of Environment Design Based On Non-linear Feature (비선형성에 근거한 환경디자인의 디지털 하이브리드 체계에 관한 연구)

  • Kim, Yeon-Jung
    • Archives of design research
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    • v.18 no.4 s.62
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    • pp.185-194
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    • 2005
  • In the perspective of hybrid, design contains confused forms and styles. Thus, the question is what 'decisively affects' on life, happiness and peace of human beings: In the past scientific ecology that tries to solve the problem in the aspect of functional design was important. Now the question is beyond the scientific ecology because human has a different way of environmental adaptation from animals. From this point of view, design is defined as something beyond materialistic standard. Terry Eagleton said, 'Creative ability deviating oneself and transcending is the very standard to measure human beings' A tendency to hybridize one's own section off genre or pursuing dismantlement is found on such creative perspective. In other words, it focuses on making a space of human's cultural behavior by unifying creatively natural environment and architecture space in the organic aspect. Such phenomenon provides a new chance and possibility in environmental design through a new molding experiment according to the development of digital technology. As experiments of environment design using digital technology are actively implemented, ecological and cultural views hybridize to create a new cultural space of various functions and features. Such experiment in environment design highlights the connections of ecological view, recognition of value, and relation-centered ideas, and enables a tool pursuing a new cultural development. This study focuses on the paradigm of such digital hybrid design and purposes to set the system by analyzing the application styles and principles of environment design through theoretical and case studies. In addition, it promotes a new possibility to develop environment design in the history of civilization.

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Fashion Changes in Subcultural Styles (2) -Focus on the Teddy Boys Style- (하위문화맥락에서 본 패션형태의 변화(2) -Teddy Boys를 중심으로-)

  • 양미경
    • Journal of the Korea Fashion and Costume Design Association
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    • v.4 no.1
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    • pp.61-72
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    • 2002
  • This paper is the second part of a series of the research about the Teddy boy style which is to examine various fashion changes in subcultural styles in 1900s. The main concern of this research is to investigate the creation and meaning of the Teddy boy style, how it interacted with the elements of class and generation and how the materials needed by the group constructed and appropriated into the visible systematic cultural form of correspondence. The Teddy Boys are the first recognized members of the British youth culture, which is known as the new Edwardian because of their dress. They had created the concept of the "teenagers," which forms the basis of the sense of a "generation" in the 20th century. The Teds set the style that would be used and modified in the following generations. They adopted the Edwardian style of the upper class, and changed it into their own style by modifying it and adding to it some other elements. The Teddy boys style is a special version of the sartorial appropriation encountered in the sphere of the fashion history. It actually began immediately after the war by the upper class youth far from the working class neighborhood. In the late 1953, the elitist aura surrounding the Edwardian suit was suddenly shattered. Within just a few months, the Edwardian suit became a source of social anxiety and the focus of a symbolic battle. Although the Edwardian look had initially went back to the upper class root, it became a symbol of rootlessness. In appropriation of this image, The Teddy boys were also rejecting the sartorial conformism of the English working class with its modest tradition. In this respect, the Teds effected the ascent or fall of the working class in the area of fashion. The Teds dress was not a merely borrowed fashion, but was a bastard fashion in the form of American trends, the Zoot suit. At this time members of the working class possessed only work dress for the week and waist suits for the Sunday outings. Teds broke this pattern, and developed the working class dandyism of wearing clothes simply to show off. The results were that they succeeded in opening the teen market, and popularizing a working class style for the first time in British history. The Teds became the first British street style with ties music, and remain as an symbol of the rising of a new age of values and styles.f values and styles.

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Prediction of Consumer Acceptance of Oriental Melon based on Physicochemical and Sensory Characteristics (이화학적·관능적 품질 특성에 기반한 참외의 소비자 기호도 예측)

  • Lee, Da Uhm;Bae, Jeong Mi;Lim, Jeong Ho;Choi, Jeong Hee
    • Horticultural Science & Technology
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    • v.35 no.4
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    • pp.446-455
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    • 2017
  • We investigated the physicochemical and sensory characteristics of oriental melon (Cucumis melo L.) to provide a consumer-oriented quality index. Oriental melon fruits were harvested at 20, 25, or 30 days after fruit set (DAFS), and each group was sorted by size (small, medium, and large). Fruits harvested at 25 and 30 DAFS had higher CIE $a^*$ and $b^*$ values, higher soluble solids content (SSC), and lower CIE $L^*$, firmness, and titratable acidity (TA) values than fruits harvested at 20 DAFS. Fruits harvested at 25 and 30 DAFS scored more highly for overall acceptance. A significant correlation was found between physicochemical characteristics and overall acceptance. In the delayed-harvest sample, increased sweetness and yellowness, and decreased sensorial texture were associated with an increase in overall acceptance. In principal component analysis, F1 and F2 explained 62.16% and 17.91% of the total variance (80.07%), respectively. Regression analysis of overall acceptance and F1 gave a coefficient of determination ($r^2$) of 0.87. Our results show that consideration of the physicochemical characteristics (CIE value, SSC, pH, SSC/TA ratio, and firmness) and sensory characteristics (yellowness, placenta area condition, oriental melon odor, sweetness, oriental melon flavor, texture, and off odor) of oriental melon in this way can be used as quality indices to predict consumer acceptance.

A Study about Current Putting on a Shroud (현행(現行) 수의(壽衣) 착의법(着衣法) 관(關) 연구(硏究))

  • Nam, Min-Ye;Baik, Young-Ja
    • Journal of Fashion Business
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    • v.3 no.2
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    • pp.85-90
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    • 1999
  • A shroud is clothes for giving a dead person a bath and being finely dressed:though our routine clothes have been western, putting on a shroud has been kept comparatively well as a tradition of a conventional ceremony garments. This study is about the current using of dressing a shroud, and for presenting foundations of a way about dressing a shroud in order to make the most of this by everyone, therefore this research will be worthwhile to preserve the traditional custom of giving a dead person a bath and being finely dressed. 1. We must confirm the death of a person before we do Su-Si for controlling rightly a corse. Su-Si is ways of changing a clean clothes after bathing the dead person, tieing up hands, feet and ankles with a string, filling up a mouth, a nose and ears with a wad of cotton, laying down the dead person with his head toward east, and setting up a screen after covering the dead person with a bed sheet. 2. Here are processes of putting on a shroud. After the day of death, first of all, you must untie the string to control rightly a corpse, take off the clothes, and give a dead man a bath. You trim the dead person's fingernails and toenails, put them in O-nang, then put his hands and feet in five pouches, finally put feet in korean socks and wrap with Ak-su. You put a underwear in a overwear in order to put on the clothes easily, and then put on an upper garments after putting on trousers. And put on Sb-sin After you wash the dead person's face and his hair, you put gems and raw rice in his mouth, wrap head with cotton fabrics, and put hairs into five pouches, then put on a headgear which is filled with five pouches. 3. You tie up with hem cloth the dead person dressed a shroud after wrapping with Dae-ryum-km and So-ryumkm. 4. After you encoffin the dead person, you weave coffin strings with cotton fabrics in order to lift up the coffin easily, and lay down a red fabrics having white letters about the dead person's name or social position onto the coffin, then cover the coffin with a coffin cover : finally you leave the coffin at the former place and set up screen.

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Application of Ant System Algorithm on Parcels Delivery Service in Korea (국내택배시스템에 개미시스템 알고리즘의 적용가능성 검토)

  • Jo, Wan-Kyung;Rhee, Jong-Ho
    • Journal of Korean Society of Transportation
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    • v.23 no.4 s.82
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    • pp.81-91
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    • 2005
  • The Traveling Salesman Problem(TSP) is one of the NP-complete (None-deterministic Polynomial time complete) route optimization problems. Its calculation time increases very rapidly as the number of nodes does. Therefore, the near optimum solution has been searched by heuristic algorithms rather than the real optimum has. This paper reviews the Ant System Algorithm(ANS), an heuristic algorithm of TSP and its applicability in the parcel delivery service in Korea. ASA, which is an heuristic algorithm of NP-complete has been studied by M. Dorigo in the early 1990. ASA finds the optimum route by the probabilistic method based on the cumulated pheromone on the links by ants. ASA has been known as one of the efficient heuristic algorithms in terms of its calculation time and result. Its applications have been expanded to vehicle routing problems, network management and highway alignment planning. The precise criteria for vehicle routing has not been set up in the parcel delivery service of Korea. Vehicle routing has been determined by the vehicle deriver himself or herself. In this paper the applicability of ASA to the parcel delivery service has been reviewed. When the driver s vehicle routing is assumed to follow the Nearest Neighbor Algorithm (NNA) with 20 nodes (pick-up and drop-off places) in $10Km{\times}10Km$ service area, his or her decision was compared with ASA's one. Also, ASA showed better results than NNA as the number of nodes increases from 10 to 200. If ASA is applied, the transport cost savings could be expected in the parcel delivery service in Korea.

Effect of PVP(polyvinylpyrrolidone) on the Ag Nano Ink Property for Reverse Offset Printing (PVP(polyvinylpyrrolidone)가 리버스 오프셋용 은 나노 잉크 물성에 미치는 영향)

  • Han, Hyun-Suk;Kwak, Sun-Woo;Kim, Bong-Min;Lee, Taik-Min;Kim, Sang-Ho;Kim, In-Young
    • Korean Journal of Materials Research
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    • v.22 no.9
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    • pp.476-481
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    • 2012
  • Among the various roll-to-roll printing technologies such as gravure, gravure-offset, and reverse offset printing, reverse offset printing has the advantage of fine patterning, with less than 5 ${\mu}m$ line width. However, it involves complex processes, consisting of 1) the coating process, 2) the off process, 3) the patterning process, and 4) the set process of the ink. Each process demands various ink properties, including viscosity, surface tension, stickiness, and adhesion with substrate or clich$\acute{e}$; these properties are critical factors for the printing quality of fine patterning. In this study, Ag nano ink was developed for reverse offset printing and the effect of polyvinylpyrrolidone(PVP), used as a capping agent of Ag nano particles, on the printing quality was investigated. Ag nano particles with a diameter of ~60 nm were synthesized using the conventional polyol synthesis process. Ethanol and ethylene glycol monopropyl ether(EGPE) were used together as the main solvent in order to control the drying and absorption of the solvents during the printing process. The rheological behavior, especially ink adhesion and stickiness, was controlled with washing processes that have an effect on the offset process and that played a critical role in the fine patterning. The electrical and thermal behaviors were analyzed according to the content of PVP in the Ag ink. Finally, an Ag mesh pattern with a line width of 10 ${\mu}m$ was printed using reverse offset printing; this printing showed an electrical resistivity of 36 ${\mu}{\Omega}{\cdot}cm$ after sintering at $200^{\circ}C$.

Operational Validation of the COMS Satellite Ground Control System during the First Three Months of In-Orbit Test Operations (발사 후 3개월간의 궤도 내 시험을 통한 통신해양기상위성 관제시스템의 운용검증)

  • Lee, Byoung-Sun;Kim, In-Jun;Lee, Soo-Jeon;Hwang, Yoo-La;Jung, Won-Chan;Kim, Jae-Hoon;Kim, Hae-Yeon;Lee, Hoon-Hee;Lee, Sang-Cherl;Cho, Young-Min;Kim, Bang-Yeop
    • Journal of Satellite, Information and Communications
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    • v.6 no.1
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    • pp.37-44
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    • 2011
  • COMS(Chollian) satellite which was launched on June 26, 2010 has three payloads for Ka-band communications, geostationary ocean color imaging and meteorological imaging. In order to make efficient use of the geostationary satellite, a concept of mission operations has been considered from the beginning of the satellite ground control system development. COMS satellite mission operations are classified by daily, weekly, monthly, and seasonal operations. Daily satellite operations include mission planning, command planning and transmission, telemetry processing and analysis, ranging and orbit determination, ephemeris and event prediction, and wheel off-loading set point parameter calculation. As a weekly operation, North-South station keeping maneuver and East-West station keeping maneuver should be performed on Tuesday and Thursday, respectively. Spacecraft oscillator updating parameter should be calculated and uploaded once a month. Eclipse operations should be performed during a vernal equinox and autumnal equinox season. In this paper, operational validations of the major functions in COMS SGCS are presented for the first three month of in-orbit test operations. All of the major functions have been successfully verified and the COMS SGCS will be used for the mission operations of the COMS satellite for 7 years of mission life time and even more.

A Study on the Effects of the Characteristics of Internet Shopping mall on Shopping Values and Customer Retantiong (인터넷 쇼핑몰 특성에 의한 쇼핑가치와 고객유지에 관한 연구)

  • Kim, Young-Man;Kim, Dong-Hyeon
    • Journal of Global Scholars of Marketing Science
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    • v.8
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    • pp.61-87
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    • 2001
  • Internet, which has been developed as a new exchange revolution, forms a huge virtual exchange market, and the innovative electronic commerce has completely broken off the way of existing goods distribution. This study begins with an awareness of the importance of customer retention to keep winning over the competition in internet shopping mall. In order to explain of the customer retention between individual and internet shopping mall, the study introduces first a satisfaction on shopping followed by an awareness of the importance of customer retention, and looks into a formation process of trust, satisfaction, and relationship orientation occurred by the offer of valuable convenience to customers. The study also explores the influence on shopping value by the characteristics with which internet shopping mall can bear, unfold by a cause and effect relationship the degree of shopping satisfaction, trust, and relationship orientation, and inquires a question to find out how to fuse the characteristics for internet retention. Therefore, this study has the following purposes: After examining prior research for the characteristics of internet shopping mall, it presents a possibility to connect shopping value with customer retention in light of theoretical system on characteristic elements derived from emotional and utilitarian perspectives. In order to achieve the purposes, the characteristics of internet retailing shop included site design, virtual reality, web awareness, customer concern, merchandise search, information supply, product value, and transaction system. Hypotheses were set up for the relationship with these characteristics and substantially analyzed. To prove this research, we analyzed collected data in which customers had experienced in shopping at internet shopping mall and discussed strategic current issues about its analytic results.

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