• 반도체디스플레이기술학회지
• /
• 제21권2호
• /
• pp.38-44
• /
• 2022

Plasma density in semiconductor fabrication equipment becomes higher to achieve the improved the throughput of the process, but the increase of surface corrosion of the ceramic coated chamber wall has been observed by the increased plasma density. Plasma chamber wall coating with aerosol deposition prefer to be firm and uniform to prevent the potential creation of particle inside the chamber from the deformation of the coating materials, and the aerosol discharge nozzle is a good control factor for the deposited coating condition. In this paper, we investigated the design of the nozzle of the aerosol deposition to form a high-quality coating film. Computational fluid dynamics (CFD) study was employed to minimize boundary layer effect and shock wave. The degree of expansion, and design of simulation approach was applied to found out the relationship between the divergence angle and nozzle length as the key parameter for the nozzle design. We found that the trade-off tendency between divergence angle and nozzle length through simulation and quantitative analysis, and present the direction of nozzle design that can improve the uniformity of chamber wall coating.

• 의료ㆍ복지 건축 : 한국의료복지건축학회 논문집
• /
• 제12권2호
• /
• pp.7-15
• /
• 2006

Patients use the senses all the time, mostly simultaneously. Senses are never turned off even patients in serious condition use some of the senses. Space is the inexhaustible source of stimuli. So far we have thought that it is impossible to come up with a set of rules and guidelines that cover all the possible situations involving senses and when there have been usually no conscious coordination between different sensorial stimuli and the comprehensive perception of space always results from the engagement of combination of senses and other inputs based on knowledge and experience. This study concerns about patients' demand analysis through senses. The reflection of patients' demand to the ward planning can develope the healing environment.

• Journal of Mechanical Science and Technology
• /
• 제15권6호
• /
• pp.776-787
• /
• 2001

The turbofan engine performance analysis for a medium scale commercial aircraft was carried out and the LQR control scheme for performance optimization was studied. By using scaled component maps from well-known CF6 engine characteristics, the steady-state performance analysis result was compared with BR715-56 engine performance data. The transient performance analysis was performed with four fuel schedules. The linear simulation was done at the maximum take-off condition. The real time linear simulation was performed by interpolation of the system matrices, which used the least square method as the function of LPC rotational speed. By using linear system matrices of design point, the LQR controller which used control variables for the fuel flow and the LPC bleed air was designed.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1987년도 한국자동제어학술회의논문집(한일합동학술편); 한국과학기술대학, 충남; 16-17 Oct. 1987
• /
• pp.898-904
• /
• 1987

A new control algorithm using the VSS theory is developed for accurate trajectory control of robot manipulators. This paper focuses on the implementation of VSS controller with smoothing laws in the design of effective tracking control for robotic arms. The VSS controller for multi-linkage robot arm is realized using balance condition and its simplification which possesses powerful smoothing capability to reduce or even remove undesirable chattering and meanwhile keep the robust characteristic to reject system uncertainties. The design principle of selecting different smoothing methods, which aims at achieving trade-off between smoothing and robust behaviors while considering the actual system constraints, is also given and further confirmed through experimental results.

• International Journal of Fluid Machinery and Systems
• /
• 제4권2호
• /
• pp.243-254
• /
• 2011

In the present paper, we focus on the flow computation of a low head Propeller turbine at a wide range of design and off-design operating conditions. First, we will present the results on the efficiency hill chart prediction of the Propeller turbine and discuss the consequences of using non-homologous blade geometries for the CFD simulation. The flow characteristics of the entire turbine will be also investigated and compared with experimental data at different measurement planes. Two operating conditions are selected, the first one at the best efficiency point and the second one at part load condition. At the same time, for the same selected operating points, the numerical results for the entire turbine simulation will be compared with flow simulation with our standard stage calculation approach which includes only guide vane, runner and draft tube geometries.

• KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
• /
• 제12B권1호
• /
• pp.37-43
• /
• 2002

This paper proposes a new zero-current switching (ZCS) pulse-width modulation (PWM) switch cell that has no additional conduction loss of the main switch. In this cell, the main switch and the auxiliary switch turn on and turn off under zero current condition. The diodes commutate softly and the reverse recovery problems are alleviated. The conduction loss and the current stress of the main switch are minimized, since the resonating current for the soft switching does not flow through the main switch. Based on the proposed ZCS PWM switch cell, a new family of dc to dc PWM converters is derived. The new family of ZCS PWM converters is suitable for the high power applications employing IGBTs. Among the new family of dc to dc PWM converters, a boost converter was taken as an example and has been analyzed. Design guidelines with a design example are described and verified by experimental results from the 2.5㎾ prototype boost converter operating at 40KHz.

• 한국전산유체공학회:학술대회논문집
• /
• 한국전산유체공학회 2007년도 추계 학술대회논문집
• /
• pp.92-99
• /
• 2007

In this paper, optimization of the vaned centrifugal compressor was carried out at a given mass flow rate condition. Firstly, impeller optimization was conducted using response surface method (RSM) which is one of optimization methods. After the optimization of the impeller was completed, diffuser optimization was performed with the optimized impeller. In these processes, Navier-Stokes solver was used to calculate the flow inside the centrifugal compressor. And the optimization is performed with Box-Behnken design method which is efficient for fitting second-order response surfaces to reduce the number of calculations required. As a result, compared with the reference model, the efficiency and the pressure ratio of the optimized impeller and diffuser are found to be increased. The performance at off-design conditions is presented.

• 한국전산유체공학회:학술대회논문집
• /
• 한국전산유체공학회 2004년도 추계 학술대회논문집
• /
• pp.65-68
• /
• 2004

The design procedure for centrifugal blower with high inlet resistance is not presented yet. Overall fluid dynamic performance is estimated for comparison between the case of atmospheric inlet condition and the present model. Detail information between blades is prepared by using a commercial program, SCRYU-Tetra. A centrifugal blower with large inlet pressure is adopted in an air purifier having filtering devices. As the inlet residence increases the flow rate of the system is decreased. In parallel, outlet area of the system affects the performance of the system in the sense of flow balance. Consequently, the flow balance between the inlet and outlet becomes an important parameter for the design of the scroll casing for the centrifugal blower with high inlet pressure.

• 연구논문집
• /
• 통권26호
• /
• pp.43-50
• /
• 1996

Present paper describes on/off design performance analysis of an 74KW industrial turboshaft gasturbine engine. Procedures to match between the compressor, combustor and turbine have been incorporated into the developed program satisfying compatibility requirement of flow and work and ratational speed. The validity of the performance results from the developed program are yet to be proved through performance experiments of the resultant engine, but comparison of the present results with those from "GASCAN(Thermoflow:America) under similar mass inlet flow, pressure ratio, and speed condition show good agreement despite present results underpredict 6-10% for power and up to 3% in efficiency, respectively.

• 한국분무공학회지
• /
• 제4권3호
• /
• pp.42-52
• /
• 1999

An effectiveness of thermal utilization of a dousing system in the 600 MW PHWR Nuclear Power Plant has been evaluated. The behavior and conditions of water droplet sprayed in a postulated accident conditions in containment configuration has been calculated. In this calculation, two pressure conditions with the consideration of obstruction area and containment wall effect has been established : one being the minimum containment pressure of 7 kPa(g) encountered for dousing shut off and the other being the containment design pressure 124 kPa(g). The results revealed that the effectiveness of the thermal utilization ranges from 93% to 97%. In the analysis on two cases without/with side wall effect in the containment building, the thermal utilization decreases with obstruction area from 89% to 85%, which satisfies the design criteria set for the containment pressure against the accident condition.