• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.477-477
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• 2008

For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

• Korean Journal of Soil Science and Fertilizer
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• v.24 no.2
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• pp.137-143
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• 1991

This research was conducted to investigate the treatment effects of the experimental product of an oxidatively treated animal wastes such as feces of cow and pig on the growth and yield of corn, soil fertility parameters, nutrient uptake by corn, and in situ dry matter digestibility. The results are summarized as follows. (1) Growth of corn was favored by treatment of the experimental products as compared to the control. Highest yields were obtained at treatment levels of 2,000 and 2,500kg/10a for the experimental products derived from cow and pig feces, respectively. (2) The contents of soil organic matter were increased 7-41% and 4-60% with treatments of experimental products from cow and pig feces, respectively, as compared to the control. The available soil phosphorus levels were increased significantly with the treatments. Treatment of product from the cow feces resulted in a slight increase of the potassium adsorption ratio (KAR). (3) No significant difference was observed in uptake of total nitrogen and phosphorus between the treatments and the control. Uptake of cation by corn was in the order of $K_2O$ >CaO>MgO. (4) In situ dry matter digestibility ratio was increased with Incubation time. However, no significant difference in digestibility was detected for the corn samples produced by treating different levels of the experimental products.

• International Journal of Naval Architecture and Ocean Engineering
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• v.5 no.4
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• pp.580-597
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• 2013

Three materials SUS304, 9% Ni steel and Al 5083-O alloy, which are considered possible candidate for International Maritime Organization (IMO) type B Cargo Containment System, were studied. Monotonic tensile, fatigue, fatigue crack growth rate and Crack Tip Opening Displacement tests were carried out at room, intermediate low ($-100^{\circ}C$) and cryogenic ($-163^{\circ}C$) temperatures. The initial yield and tensile strengths of all materials tended to increase with decreasing temperature, whereas the change in elastic modulus was not as remarkable. The largest and smallest improvement ratio of the initial yield strengths due to a temperature reduction were observed in the SUS304 and Al 5083-O alloy, respectively. The fatigue strengths of the three materials increased with decreasing temperature. The largest increase in fatigue strength was observed in the Al 5083-O alloy, whereas the 9% Ni steel sample showed the smallest increase. In the fatigue crack growth rate test, SUS304 and Al 5083-O alloy showed a decrease in the crack propagation rate, due to decrease in temperature, but no visible improvement in da/dN was observed in the case of 9% Ni steel. In the Crack Tip Opening Displacement (CTOD) test, CTOD values were converted to critical crack length for the comparison with different thickness specimens. The critical crack length tended to decrease in the case of SUS304 and increase for the Al 5083-O alloy with decreasing temperature. In case of 9% Ni steel, change of critical crack length was not observed due to temperature decrease. In addition, the changing material properties according to the temperature of the LNG tank were analyzed according to the international code for the construction and equipment of ships carrying liquefied gases in bulk (IGC code) and the rules of classifications.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.285-285
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• 2011

EUVL (Extreme Ultra Violet Lithography) is one of competitive lithographic technologies for sub-30nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance since the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• Advances in materials Research
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• v.13 no.3
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• pp.161-171
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• 2024

This study aimed to investigate the effect of physicochemical properties and mix ratios of iron ore (oxide feed): coke (reductant) on the carbothermic reductions of iron ore. Coke size was fixed at ≤63 ㎛ while iron ore size varied between 150-63 ㎛ and ≤63 ㎛ respectively. Mix ratios were changed from 100:0 (reference) to 80:20 and 60:40 while the temperature, heating rate and soaking duration in muffle furnace were fixed at 1100 ℃, 10 ℃/min and 1 hour. Particle size analyzer, XRF, CHNS and XRD analyses were used for determination of raw feed characteristics. The occurrence of phase transformations from various forms of iron oxides to iron during the carbothermal reductions were identified through XRD profiles and supported with weight loss (%). XRF analysis proved that iron ore is of high grade with 93.4% of Fe₂O₃ content. Other oxides present in minor amounts are 2% Al₂O₃ and 1.8% SiO₂ with negligible amounts of other compounds such as MnO, K₂O and CuO. Composite pellet with finer size iron particles (≤63 ㎛) and higher carbon content of 60:40 exhibited 45.13% weight lost compared to 32.30% and 3.88% respectively for 80:20 and 100:0 ratios. It is evident that reduction reactions can only occur with the presence of coke, the carbon supply. The small weight loss of 3.88% at 100:0 ratio occurs due to the removal of moisture and volatiles and oxidations of iron ore. Higher carbon supply at 60:40 leads into better heat and mass transfer and diffusivity during carbothermic reductions. Overall, finer particle size and higher carbon supply improves reactivity and gas-solid interactions resulting in increased reductions and phase transformations.

• The Plant Pathology Journal
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• v.32 no.1
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• pp.33-46
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• 2016

In this study, the full-length nucleotide sequences of four Iranian PVY isolates belonging to $PVY^N$ strain were determined. The genome of Iranian PVY isolates were 9,703-9,707 nucleotides long encoding all potyviral cistrons including P1, HC-Pro, P3, 6K1, CI, 6K2, VPg, NIa-Pro, NIb and CP with coding regions of 825, 1,395, 1,095, 156, 1,902, 156, 564, 732, 1,557 and 801 nucleotides in length, respectively. The length of pipo, embedded in the P3 cistron, was 231 nucleotides. Phylogenetic analysis showed that the Iranian isolates clustered with European recombinant NTN isolates in the N lineage. Recombination analysis demonstrated that Iranian $PVY^N$ isolates had a typical European $PVY^{NTN}$ genome having three recombinant junctions while $PVY^N$ and $PVY^O$ were identified as the parents. We used dN/dS methods to detect candidate amino acid positions for positive selection in viral proteins. The mean ${\omega}$ ratio differed among different genes. Using model M0, ${\omega}$ values were 0.267 (P1), 0.085 (HC-Pro), 0.153 (P3), 0.050 (CI), 0.078 (VPg), 0.087 (NIa-pro), 0.079 (NIb) and 0.165 (CP). The analysis showed different sites within P1, P3 and CP were under positive selection pressure, however, the sites varied among PVY populations. To the best of our knowledge, our analysis provides the first demonstration of population structure of $PVY^N$ strain in mid-Eurasia Iran using complete genome sequences and highlights the importance of recombination and selection pressure in the evolution of PVY.

• Magazine of the Korean Society of Agricultural Engineers
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• v.43 no.5
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• pp.153-162
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• 2001

A study was carried out to investigate the water balance and losses of nutrients at a paddy plot located at the southern Korea. The observed amount of precipitation, irrigation, runoff, evapotranspiration and percolation for the experimental paddy plot during cropping period were 1,030, 566, 701, 551. and 310 mm for 1999 and 1.214, 413, 710, 682, and 234 mm for 2000 year, respectively. The measured input quantities of N and P into the paddy field during cropping period were 122 to 140 kg N $ha^-1$ and 29 to 30 kg $P_2O_5$ kg $ha^-1$ by chemical fertilizer, 20 to 28 kg N $ha^-1$ and 0.35 to 0.36 kg P $ha^-1$ by precipitation, and 26 to 35 kg N $ha^-1$ and 0.57 to 0.72 kg P$ha^-1$ by irrigation water. respectively. The output amounts of N and P from paddy field were measured as follows. They were 48 to 52 kg N $ha^-1$ and 1.1 to 1.6 kg P $ha^-1$by runoff water, and 9 to 12 kg N $ha^-1$ and 0.04 to 0.05 kg $ha^-1$ by percolation water. When the runoff losses of nutrients were compared to applied chemical fertilizer. it was found that 34.3 % to 42.6 % of nitrogen lost via runoff while runoff losses of phosphorus account for 3.8 % to 5.3 % of the total applied amount. When the ratio was calculated between nutrients losses by percolation water and the applied of chemical fertilizer, two year results showed 6.4 % to 9.8 % for the nitrogen and 0.1% to 0.2% phosphorus, respectively.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.10 no.5
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• pp.462-468
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• 2017

In this paper IoT/WSN(Internet of Things/Wireless Sensor Network) has been modeled with a random geometric graph. And a performance of the decentralized code for the efficient storage of data which is generated from WSN has been analyzed. WSN with n=100 or 200 has been modeled as a random geometric graph and has been simulated for their performance analysis. When the number of the total nodes of WSN is n=100 or 200, the successful decoding probability as decoding ratio ${\eta}$ depends more on the number of source nodes k rather than the number of nodes n. Especially, from the simulation results we can see that the successful decoding rate depends greatly on k value than n value and the successful decoding rate was above 70% when $${\eta}{\leq_-}2.0$$. We showed that the number of operations of BP(belief propagation) decoding scheme increased exponentially with k value from the simulation of the number of operations as a ${\eta}$. This is probably because the length of the LT code becomes longer as the number of source nodes increases and thus the decoding computation amount increases greatly.

• Membrane Journal
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• v.17 no.3
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• pp.269-275
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• 2007

Sodium type faujasite(FAU) zeolite membranes with a thickness of 5${\mu}m$ and a Si/Al molar ratio of 1.5 were prepared by the secondary growth process. The $CO_2/N_2$ separation in the vacuum mode was investigated at $30^{\circ}C$ for an equimolar $CO_2-N_2$ mixed gas before and after embedding 13X zeolite beads in the permeate side. The embedded 13X zeolite beads improved both $CO_2$ permeance and $CO_2/N_2$ separation factor, simultaneously. The phenomenon was explained by an increment in the $CO_2$ desorption rate at the FAU zeolite/$\alpha-Al_2O_3$ phase boundary due to an enhanced $CO_2$ escaping through the pore channels of the $\alpha-Al_2O_3$ support layer. In the present paper, it will be emphasized that a hybridization of a membrane with an adsorbent can provide a key to break through the trade-off between permeance and separation factor, generally shown in a membrane separation.

• Korean Journal of Soil Science and Fertilizer
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• v.14 no.1
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• pp.31-36
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• 1981

This pot experiment was conducted to find out the optimal fertilization ratio of the anions (N : S : P) in various soil conditions. Soil samples were collected from uncultivated mountains and hills where development for grasslands is under consideration. The optimum ratios were computed by the $Hom{\grave{e}}s$ systematic variation technique. The results were summarized as follows : 1. The optimum fertilization ratios of the anions (N : S : P) for the high yields of grass - clover mixed sward at various areas were obtained (Table 5). 2. The grass yields in mixed sward were increased by the increase of specific soil characteristics, CEC, OM, T-N, avail-$P_2O_5$. However. it was not recognizable by the contents of the cations, the base saturation, and the pH. 3. The relatively high yields of clover were positively related to the Ca and Mg contents in soils, and it was a factor of the increased total yields of mixed sward. 4. The relatively high optimum fertilization ratios of S in volcanic ash soil in the Cheju district and P in sediment lithosol in Daegu should be taken into account in determing the fertilization rate for high yield of clover in mixed sward.