• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.174-178
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• 2007

The cleaning process to remove small particles, ions, and other polluted sources is one of the major parts in the recent semiconductor industry because it can cause fatal errors on the quality of the final products. According to the other reports, the major factors of bath's fluid motion are the cleaning method, nozzle, the geometry (of bath, guide and wafer), and the position (of guide and wafer). So to enhance cleaning efficiency in the bath, these factors must be controlled. The purpose of this study is to analyze and visualize fluid motion in the cleaning bath as basic data for designing the nozzle system and finding the process control parameters. For that, we used the general CFD code FLUENT.

• 한국분무공학회지
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• 제11권2호
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• pp.105-112
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• 2006

A unique feature of fluidic atomizers is that the nozzle geometry produces a thin capillary Jet which is forced to oscillate on a 2-dimensional plane through the use of a passive feedback mechanism. The objective of the current work is to characterize the influence of the stagnation pressure at the nozzle exit, jet oscillation and stretching on the breakup properties of the capillary ligament. To achieve this, shadow graph technique is used to measure size, shape, velocity and the number density of the droplets as a function of the position within the spray fan. The breakup length, defined as the radial distance from the breakup point, is analyzed as a function of the non-dimensional parameters. Finally, a kinematic model is developed to simulate the breakup of the oscillating jets at low stagnation pressures. Using the existing jet breakup theories, the model is used to predict the size and diameter distribution of the droplets after primary atomization.

• International Journal of Naval Architecture and Ocean Engineering
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• 제12권1호
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• pp.910-917
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• 2020

In fire suppression, continuous delivery of water or foam to the fire source is essential. The present study concerns fire suppression in a ship under sea condition, by introducing reinforcement learning technique to aiming of fire extinguishing nozzle, which works in a ship compartment with six degrees of freedom movement by irregular waves. The physical modeling of the water jet and compartment motion was provided using Unity 3D engine. In the reinforcement learning, the change of the nozzle angle during the scenario was set as the action, while the reward is proportional to the ratio of the water particle delivered to the fire source area. The optimal control of nozzle aiming for continuous delivery of water jet could be derived. Various algorithms of reinforcement learning were tested to select the optimal one, the proximal policy optimization.

• Journal of Biosystems Engineering
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• 제10권1호
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• pp.13-23
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• 1985

Spraying method from the paddy-field levee is known to give insufficient penetration of the spray droplets to the rice stem of the densely grown plants, which is generally encountered at the last stage of rice growth. This study was intended to investigate the spraying system to solve this existing problem. As an approach, it was attempted to develop the boom-with-nozzle, between-the-row application system. Several types of nozzles and their different arrangements in the boom were tested in the field to measure the penetration-reaching distance and the uniformity of spray droplet distribution. The results of the study are summarized as follows: 1. Field experiments by the spraying method from the paddy-field levee showed to have practically no penetration of the spray droplets to the portion of the plant stem with the normal flow volume generally applied and thus need for improving present spraying method. 2. It was found that, considering both the uniformity of the spray droplet distribution and performance rate, the most efficient type of nozzle in the between-the-row boom-type spraying system was one that has core-insert hollow-cone with some clearance between the cone and tip. 3. When tested by applying the spraying method of between-the-row, the nozzle pressure did not affect the uniformity of spray droplet distribution. However, the nozzle pressure had a positive effect on the penetrating-reaching distance of the facing side of the rice stem and did not affect much on that of the opposite face of the stem. It was also found that the maximum pressure to affect the penetration-reaching distance was about $10kg/cm^2$. 4. The uniformity of the spray droplet distribution in the between-the-row system was greatly affected by the height and orientation of the nozzles in the boom. Based on experimental work for the different type of the boom-with-nozzle arrangements, it is recommended that the position of nozzle is set at about 0.45 m above the ground and two nozzles in the boom are oriented to be faced with each other with some angle such that the droplet stream from the nozzle would not directly face with each other.

• 한국추진공학회지
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• 제23권3호
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• pp.28-34
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• 2019

공압시험용 플러그 노즐 구동에 따른 추력제어, 핀틀 형상 및 작동압력에 따른 유동특성 분석을 수행하였다. 이를 위해 시험에서의 유동구조와 추력계수를 비교함으로써 수치해석의 타당성을 확인하였다. 이후 각 노즐형상이 설계의도지점에 노즐목이 형성됨과 원뿔형 노즐에 대하여 핀틀 구동만으로 1:8의 추력제어가 가능함을 확인하였다. 마지막으로 고도보정 효과가 뛰어난 에어로 스파이크 노즐일지라도, 너무 낮은 NPR에 맞춰 설계된 경우, 부족팽창 조건에서 불리할 가능성을 확인하였다.

• 에너지공학
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• 제22권4호
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• pp.413-419
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• 2013

본 연구에서는 동심원관 형태의 MILD 연소로에서 바깥 원통의 배기가스 통로에서부터 안쪽 원통의 연소통로 사이에 연결관을 설치하고 배기가스를 유입하기 위해 벤츄리 노즐을 사용할 경우 벤츄리 노즐의 기하학적 형상 변화와 고압공기 노즐의 유속 변화에 따라 고압공기 유량, 배기가스 유입량 특성을 수치해석을 통해 살펴봄으로써 최적의 벤츄리 노즐 형상과 고압공기 유속 조건들을 도출하는 것을 본 연구의 목적으로 하였다. 본 연구의 전산 해석을 통해 고압공기 노즐 출구가 연소로 벽면에 부착된 경우와 배기가스에 노출된 경우를 비교하였고, 이 두 가지 형상에 대하여 고압공기 노즐과 벤츄리 노즐의 간격을 고압공기 노즐 직경의 1배에서 3배로 변화할 때의 유입량 특성을 살펴보았다. 또한 고압공기 노즐에서의 출구 유속을 변화하여 유입량 특성을 살펴보았다. 이를 통해 고압공기 노즐과 벤츄리 노즐의 간격이 증가하면 고압공기 노즐이 벽면에 부착된 경우는 유입량이 상대적으로 변화가 적으나 배기가스에 노출된 경우는 유입량이 증가하는 경향을 확인하였다. 또한 고압공기 노즐의 유속이 증가하면 속도가 낮은 범위에서는 유입량비가 상대적으로 증가하는 경향이 크지만 속도가 큰 영역에서는 증가하는 경향이 줄어드는 것을 확인하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.2509-2512
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• 2005

In this paper, a position control scheme of the ink droplet is presented for the high image quality and print speed inkjet printer. The proposed scheme estimates the impact position and compensates it by control of the fire strobe time based on the dynamic equations describing the moving trajectory of the ink droplet. Compared to the conventional fire strobe control which is based on the simple synchronization the fire strobe with the position signal of the inkjet nozzle, the proposed control scheme provides more accurate impact position control during the carrier is moving with accelerated or decelerated speed as well as constant speed. The availability of printing during the acceleration and deceleration states of the carrier moving enables the print speed up and the frame size down which means the cost down.

• Journal of Mechanical Science and Technology
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• 제20권9호
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• pp.1492-1501
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• 2006

A transportation system of single wafer has been developed to be applied to semiconductor manufacturing process of the next generation. In this study, the experimental apparatus consists of two kinds of track, one is for propelling a wafer, so called control track, the other is for generating an air film to transfer a wafer, so called transfer track. The wafer transportation speed has been evaluated by the numerical and the experimental methods for three types of nozzle position a..ay (i.e., the front-, face- and rear-array) in an air levitation system. Test facility for 300mm wafer has been equipped with two control tracks and one transfer track of 1500mm length from the starting point to the stopping point. From the present results, it is found that the experimental values of the wafer transportation speed are well in agreement with the computed ones. Namely, the computed values of the maximum wafer transportation speed $V_{max}$ are slightly higher than the experimental ones by about $15{\times}20%$. The disparities in $V_{max}$ between the numerical and the experimental results become smaller as the air velocity increases. Also, at the same air flow rate, the order of wafer transportation speeds is : $V_{max}$ for the front-array > $V_{max}$ for the face-array > $V_{max}$ for the rear-array. However, the face-array is rather more stable than any other type of nozzle array to ensure safe transportation of a wafer.

• 한국화재소방학회논문지
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• 제23권2호
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• pp.78-84
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• 2009

본 연구에서는 형식이 각기 다른 3종류의 미분무수 노즐을 사용하여 방사높이와 화염의 위치 변화에 따른 소화성능 실험과 포 소화약제를 혼합한 소화성능 실험을 수행했다. 소화성능 실험에서는 미분무수 노즐의 높이를 4m, 3.5m, 3m로 변화를 주었으며 연료 팬을 노즐 중심으로부터 0m, 0.5m, 1m의 변화를 주었다. 포 소화약제는 3%형 AFFF(Aqueous Film Forming Foam)를 사용하였다. 실험결과 개구부의 유무는 소화에 미치는 영향이 적었으며, 포 소화약제를 혼합한 미분무수의 소화성능은 약제를 혼합하지 않은 경우에 비하여 우수하였다.

• 한국자동차공학회논문집
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• 제13권2호
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• pp.178-185
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• 2005

The synergistic effect of ethylene/propane mixture on soot formation is studied experimentally using a concentric co-flow diffusion burner, which provides the stratified fuel mixture. The soot volume fraction, soot particle diameter, number density and PAH concentrations are measured with various fuel supply configurations and compared to the homogeneously mixed case. When propane is supplied through the inner nozzle, an increase of soot formation is observed. However, when propane is supplied through the outer nozzle, a decrease is observed. The reaction path of PAH's formed from the pyrolysis process of propane is likely to be responsible to the observed differences. When propane is supplied through the outer nozzle, PAH's are formed in the relatively near oxidation region and exposed to the oxidization environment; on the other hand, when propane is supplied through the inner nozzle, PAH's are not likely to be oxidized and thus get involved in soot formation process. The synergistic effect in ethylene/propane diffusion flames is found to be affected not only by the com position of the mixture but also by the way of mixing.