• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.1
• /
• pp.129-137
• /
• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Journal of Sensor Science and Technology
• /
• v.23 no.1
• /
• pp.7-14
• /
• 2014

Noncontact electrocardiogram (ECG) measurement using capacitive-coupled technique is a very reliable long-term noninvasive health-care remote monitoring system. It can be used continuously without interrupting the daily activities of the user and is one of the most promising developments in health-care technology. However, ECG signal is a very small electric signal. A robust system is needed to separate the clean ECG signal from noise in the measurement environment. Noise may come from many sources around the system, for example, bad contact between the sensor and body, common-mode electrical noise, movement artifacts, and triboelectric effect. Thus, in this paper, the extended Kalman filter (EKF) is applied to denoise a real-time ECG signal in capacitive-coupled sensors. The ECG signal becomes highly stable and noise-free by combining the common analog signal processing and the digital EKF in the processing step. Furthermore, to achieve ubiquitous monitoring, android-based application is developed to process the heart rate in a realtime ECG measurement.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.38 no.10
• /
• pp.1133-1137
• /
• 2014

The ultrasonic nonlinear parameter ${\beta}$ is generally known as an effective parameter for evaluating material degradation. Thus far, most research has been conducted using a contact method. However, since measurement by this contact method is affected by the contact conditions between the transducer and the specimen, additional devices are required to maintain the contact conditions stable during the measurement. To avoid this inconvenience, this paper proposes a noncontact method. In this study, only the receiver was replaced with a noncontact receiver, and then, the ultrasonic nonlinear parameters measured by the newly developed noncontact receiver were compared with those measured by the contact receiver. Results obtained using both these receivers for heat-treated aluminum alloy specimens showed good agreement. From this result, we can confirm that the ultrasonic nonlinear parameter ${\beta}$ can be measured using the proposed noncontact ultrasonic method.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 1997.10a
• /
• pp.254-259
• /
• 1997

The measurement of surface roughness and waviness by means of noncontact method is an important area to be developed for GAC(Geometrical Adaptive Control) system. This paper deal with the design of noncontact in-process measurement system which measures the surface roughness and waviness during cylindrical grinding. This measuring system is simple and the apparatus proposed is composed of a laser unit, photodetector and optical system. During operation, the surface of a workpiece is continuously scanned by a laser beam. This method makes it possible to detect the surface roughness and waviness along the feed direction by control the spot diameter of laser beam. The experimental results show that the presence of chattering, loading and glazing can be detected sensitively along the feed directions.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.21 no.11
• /
• pp.1862-1870
• /
• 1997

A fast and precise technique to measure 3-dimensional coordinates of an object is proposed. It is essential to take the 3-dimensional measurements of the object in design and inspection. Using this developed system a surface model of a complex shape can be constructed. 3-dimensional world coordinates are projected onto a camera plane by the perspective transformation, which plays an important role in this measurement system. According to the shape of the object two measuring methods are proposed. One is rotation of an object and the other is translation of measuring unit. Measuring speed depending on image processing time is obtained as 200 points per second. Measurement resolution i sexperimented by two parameters among others; the angle between the laser beam plane and the camera, and the distance between the camera and the object. As a result of these experiments, it was found that measurement resolution ranges from 0.3mm to 1.0mm. This constructed surface model could be used in manufacturing tools such as rapid prototyping machine.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1063-1066
• /
• 2003

A flow-meter and its measurement controller was developed for a hydraulic system. This study, for development of positive displacement flow-meter, consist of PIC(Peripheral Interface Controller) controller with MR(Magneto-resistive) sensors. This flow-meter is used valve position indicator for valve control system by hydraulic. The MR sensors are used for the rotation of OVAL gear that detecting device. In the ship environments, consideration that necessary explosive proof. Thus electro device or electro flow-meter needs explosion design for electric circuit. We designed noncontact type flow-meter and evaluated the safety and measuring abilities.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.8
• /
• pp.40-47
• /
• 2001

Optical measurement methods make it possible to detect object displacements with high resolution and noncontact measurements. Also, they are very robust against EMI noises and have long operation range. An optical triangulation sensor is one of widely used displacement measurement sensors for its sub-micron resolution, fast response, simple structure, and low cost. However. there are several errors caused by inclinations of a surface. speckle effects, power fluctuations of light sources, and noises of detectors. In this paper, in order to minimize error effects, we performed error analysis and proposed a new structure. Then, we setup a new modeling method and verify it through simulations and experiments. Based on the new model. we propose a new sensor structure and establish design criteria. Finally, we design a signal processing system to overcome a resolution-limited problem of light detectors. The resolution of the proposed system is 0.2${\mu}{\textrm}{m}$ in 5mm operating range.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.11 no.5
• /
• pp.1730-1734
• /
• 2010

Generally, a pH value of secondary water in a nuclear power plant should be estimated after sampling and cooling down. In this process, the measurement of temperature is very important because a pH value is varied according to the temperature of secondary water. In this study, a noncontact fiber-optic temperature sensor using a silver halide optical fiber is fabricated to measure the temperature of cooled secondary water. And we have measured an infrared radiation, which is transferred by a silver halide optical fiber from a heat source, using a thermopile sensor. The relationships between the temperature of a heat source and the output voltage of the fiber-optic temperature sensor according to the change of distance and angle are determined. The measurable temperature range of the fiber-optic temperature sensor is from 25 to $60^{\circ}C$. Based on the results of this study, a noncontact temperature sensor using a silver halide optical fiber can be developed for the temperature measurement of the pH sample in the secondary water system.

• ETRI Journal
• /
• v.36 no.3
• /
• pp.361-366
• /
• 2014

In this paper, a new, simple capacitive tilt sensor with a metallic ball is proposed. The proposed tilt sensor has only two electrodes and a metallic ball, and this design assists in managing the inherent contact problem in measuring tilt angles. Capacitive sensing, compared with other types of tilt sensor, has many advantages such as simplicity, noncontact measurement, long-throw linear displacement, and sub-micron plate spacing. Its design and fabrication process are significantly simpler than previous types of tilt sensors. The dimensions of the prototype tilt sensor are $20mm{\times}20mm$, and the diameter of the polystyrene tube is 5 mm with a tube thickness of 0.15 mm. An analytical study of the prototype capacitive tilt sensor was undertaken, and the experimental results demonstrate the relationship between the tilt angles and measured capacitances compared with the analytical study.

• Journal of the Korean Society for Precision Engineering
• /
• v.12 no.1
• /
• pp.5-14
• /
• 1995

An optical measurement method of three dimensional surface profiles which is named the slit beam projection is suggested and practically implemented. This method is intended especially for noncontact and fast digitization of sculptured surfaces for CAD modeling and die manufacturing. Its basic principles are based on geometric optics. Deatiled optical principles and an sub-pixel image processing technique to enhance the measuring resolutions are described in this study. The measuring performances of the slit beam projection are presented and discussed to demonstrate that an actual measuring accuracy of below .+-. 0.2mm can be achived over the whole measuring range(500mm*300mm*200mm)