• Journal of the Microelectronics and Packaging Society
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• v.21 no.4
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• pp.45-49
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• 2014

In this study, we grew non-polar ZnO nanostructure on (1-102) R-plane sapphire substrates. As for growth method of ZnO, we used hydrothermal synthesis which is known to have the advantages of low cost and easy process. For growth of non-polar, the deposited AZO seed buffer layer with of 80 nm on R-plane sapphire by radio frequency magnetron sputter was annealed by RTA(rapid thermal annealing) in the argon atmosphere. After that, we grew ZnO nanostructure on AZO seed layer by the added hexamethylenetramine (HMT) solution and sodium citrate at $90^{\circ}C$. With two types of additives into solution, we investigated the structures and shapes of ZnO nanorods. Also, we investigate the possibility of formation of 2D non-polar ZnO layer by changing the ratio of two additives. As a result, we could get the non-polar A-plane ZnO layer with well optimized additives' concentrations.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.214-214
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• 2011

The adsorption and reactions of methanol and methyl iodide on ZnO(0001) and ZnO(11-20) single crystal surfaces have been investigated using the temperature programmed desorption (TPD) technique. The interaction of methanol and methyl iodide with ZnO is stronger on the polar ZnO(0001) surface than the non-polar ZnO(11-20) surface. On ZnO(0001), methanol is decomposed to produce formaldehyde and hydrogen. Two desorption features of formaldehyde and hydrogen are observed at around 500 and 580 K. The interaction of methanol and pre-adsorbed hydrogen has been also investigated. The reaction mechanism of methanol on ZnO will be proposed.