• 한국재료학회지
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• 제12권6호
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• pp.427-430
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• 2002

Plasma nitrocarburizing treatment was performed for SCM 435 steel by using a plasma ion nitriding system. The effects of the variation of nitrogen and methan contents upon the hardened layer was investigated. Both the thickness of the compound layer and the amount of $\varepsilon$ phase in the compound layer increased with increasing nitrogen content. However, the thickness of the compound layer decreased due to unstable plasma for an atmosphere containing 90% $N_2$ gas content in the gas mixture. The amount of $\varepsilon$phase in the compound layer increased with increasing $CH_4$ gas content. For $CH_4$ gas content more than 2% in the gas mixture, the thickness of the compound layer decreased due to the formation of $\theta$ phase.

• 한국치위생학회지
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• 제14권5호
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• pp.783-788
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• 2014

Objectives : The purpose of this study was to investigate the effect of non-thermal atmospheric pressure plasma jet(NTAPPJ) on surface properties and Streptococcus mutans disinfection of denture base resin. Methods : Self-cured denture base resin (Jet denture repair resin, Lang dental Mfg, co., USA) was used to make specimen($12mm{\times}2mm$). To observe surface change before and after plasma process, surface roughness and contact angle were measured. For sterilization experiments, the surfaces of specimens were treated with nitrogen and air NTAPPJ for 1 minute after S. mutans was inoculated on the material surfaces. Results : Before plasma process, surface roughness of denture base resin was $0.21{\mu}m{\pm}0.02{\mu}m$. After air and nitrogen NTAPPJ process, surface roughness was $0.19{\mu}m{\pm}0.03{\mu}m$ and $0.18{\mu}m{\pm}0.01{\mu}m$ respectively. There was no significant difference(p>0.05). Contact angle of control group without plasma process was $83.81^{\circ}{\pm}3.14^{\circ}$, while after plasma treatment, contact angles of air NTAPPJ and nitrogen NTAPPJ groups were $63.29^{\circ}{\pm}2.27^{\circ}$ and $46.68^{\circ}{\pm}5.82^{\circ}$ respectively. The result showed a significant decrease in contact angle after plasma process(p<0.05). Compared to the control group 6020.33(CFU/mL) without plasma process, CFU decreased significantly after air NTAPPJ 90.75(CFU/mL) and nitrogen NTAPPJ 80.25(CFU/mL) treatment(p<0.05). Conclusions : It was considered that NTAPPJ can be used for denture disinfection without changing surface properties of materials.

• 한국표면공학회지
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• 제37권5호
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• pp.289-295
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• 2004

A dense palladium-nikel (Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support mixed with submicron/micron nickel powder instead of mesoporous stainless steel support. Plasma treatment process is introduced as pre-treatment process instead of HCI activation. Pd-Ni alloy composite membrane prepared by electro plating was fairly a uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature 773 K and pressure 2.2 psi. The results showed that hydrogen ($H_2$) permeance was 27 ml/$\textrm{cm}^2$ㆍatmㆍmin and hydrogen/ nitrogen ($_H2$$N_2$) selectivity was 8 at 773 K.

• 마이크로전자및패키징학회지
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• 제25권4호
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• pp.75-81
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• 2018

Cu-Cu 웨이퍼 본딩 강도를 향상시키기 위한 Cu 박막의 표면처리 기술로 $Ar-N_2$ 플라즈마 처리 공정에 대해 연구하였다. $Ar-N_2$ 플라즈마 처리가 Cu 표면의 구조적 특성에 미치는 영향을 X선 회절분석법, X선 광전자 분광법, 원자간력현미경을 이용하여 분석하였다. Ar 가스는 플라즈마 점화 및 이온 충격에 의한 Cu 표면의 활성화에 사용되고, $N_2$ 가스는 패시베이션(passivation) 층을 형성하여 -O 또는 -OH와 같은 오염으로부터 Cu 표면을 보호하기 위한 목적으로 사용되었다. Ar 분압이 높은 플라즈마로 처리한 시험편은 표면이 활성화되어 공정 이후 더 많은 산화가 진행되었고, $N_2$ 분압이 높은 플라즈마 시험편에서는 Cu-N 및 Cu-O-N과 같은 패시베이션 층과 함께 상대적으로 낮은 수치의 산화도가 관찰되었다. 본 연구에서는 $Ar-N_2$ 플라즈마 처리가 Cu 표면에서 Cu-O 형성 억제 반응에 기여하는 것을 확인할 수 있었으나 추가 연구를 통하여 질소 패시베이션 층이 Cu 웨이퍼 전면에 형성되기 위한 플라즈마 가스 분압 최적화를 진행하고자 한다.

• 대한화장품학회지
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• 제48권3호
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• pp.189-196
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• 2022

플라즈마란 고체, 액체, 기체에 이은 "4번째 상"으로서 이온화된 기체를 의미한다. 주로 용접과 네온사인에 응용 및 사용되어 왔으나, 최근 암 치료 등 의료 분야에도 적용되고 있으며, 피부에서는 콜라겐 생성 촉진, 피부 톤 개선, 피부 유해균 사멸 등 다양한 효과가 보고되고 있다. 본 연구는 대기의 주성분인 질소를 활용한 화장품 제조용 플라즈마 기기를 통해 질소 플라즈마 활성종 중, 추적 평가가 용이한 nitric oxide (NO)의 양을 측정하여 플라즈마의 양적/질적 평가를 진행하였다. 효율적인 플라즈마 처리를 위해 sinking과 non sinking 법을 활용한 주입 방법을 시도한 결과, non sinking 법을 활용한 제형의 근접 처리가 효과적임을 확인할 수 있었다. 나아가 토너와 앰플을 화장품 제형으로 선택하여 NO 플라즈마 주입 후 제형의 성상 및 주입한 플라즈마의 상태 변화를 관찰하였다. 두 제형에서 NO 플라즈마의 주입 성공량은 토너가 앰플보다 약 2 배 가량 높았으며, 시간에 따라 점진적으로 감소하여 일주일 후, 소실되는 것이 확인되었다. 사용된 질소 플라즈마는 저온(4 ℃), 실온(25 ℃), 고온(37 ℃, 50 ℃) 조건에서 토너와 앰플 제형의 안정도에 영향을 미치지 않는 것을 확인하였다. 종합적으로, 본 연구는 질소 플라즈마의 화장품 가능성을 제시하고 있으며 주입된 플라즈마의 안정성 확보의 중요성을 시사하고 있다.

• 한국표면공학회지
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• 제52권4호
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• pp.194-202
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• 2019

A systematic investigation was made on the influence of processing parameters such as gas composition and treatment temperature on the surface characteristics of hardened layers of low temperature plasma nitrided 316L Austenitic Stainless Steel. Various nitriding processes were conducted by changing temperature ($370^{\circ}C$ to $430^{\circ}C$) and changing $N_2$ percentage (10% to 25%) for 15 hours in the glow discharge environment of a gas mixture of $N_2$ and $H_2$ in a plasma nitriding system. In this process a constant pressure of 4 Torr was maintained. Increasing nitriding temperature from $370^{\circ}C$ to $430^{\circ}C$, increases the thickness of S phase layer and the surface hardness, and also makes an improvement in corrosion resistance, irrespective of nitrogen percent. On the other hand, increasing nitrogen percent from 10% to 25% at $430^{\circ}C$ decreases corrosion resistance although it increases the surface hardness and the thickness of S phase layer. Therefore, optimized condition was selected as nitriding temperature of $430^{\circ}C$ with 10% nitrogen, as at this condition, the treated sample showed better corrosion resistance. Moreover to further increase the thickness of S phase layer and surface hardness without compromising the corrosion behavior, further research was conducted by fixing the $N_2$ content at 10% with introducing various amount of $CH_4$ content from 0% to 5% in the nitriding atmosphere. The best treatment condition was determined as 10% $N_2$ and 5% $CH_4$ content at $430^{\circ}C$, where the thickness of S phase layer of about $17{\mu}m$ and a surface hardness of $980HV_{0.1}$ were obtained (before treatment $250HV_{0.1}$ hardness). This specimen also showed much higher pitting potential, i.e. better corrosion resistance, than specimens treated at different process conditions and the untreated one.

• Fibers and Polymers
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• 제5권1호
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• pp.52-58
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• 2004

Previous investigation results revealed that after the Low Temperature Plasma (LTP) treatment, the hydrophilicity of wool fiber was improved significantly. Such improvement enhances the wool dyeing and finishing processes which might be due to the changes of the wool surface to a more reactive one. In this paper, wool fibers were treated with LTP with different gases, namely, oxygen, nitrogen and gas mixture (25 % hydrogen/75 % nitrogen). Investigations showed that chemical composition of wool fiber surface varied differently with the different plasma gas used. The surface chemical composition of the different LTP-treated wool fibers was evaluated with different characterization methods, namely FTIR-ATR, XPS and saturated adsorption value. The experimental results were thoroughly discussed.

• 대한금속재료학회지
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• 제47권10호
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• pp.629-634
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• 2009

The effects of processing parameters on the surface properties of the hardened layers processed by the low temperature plasma nitrocarburizing and the low temperature two-step plama treatment (carburizing+nitriding) were investigated. The nitrogen-enriched expanded austenite structure (${\gamma}_N$) or S phase was formed on all of the treated surface. The surface hardness reached up to 1200 $HV_{0.025}$, which is about 5 times higher than that of untreated sample (250 $HV_{0.1}$). The thickness of hardened layer of the low temperature plasma nitrocarburized layer treated at $400^{\circ}C$ for 40 hour was only $15{\mu}m$, while the layer thicknesss in the two-step plama treatment for the 30 hour treatment increased up to about $30{\mu}m$. The surface thickness and hardness increased with increasing treatment temperature and time. In addition, the corrosion resistance was enhanced than untreated samples due to a high concentration of N on the surface. However, higher treatment temperature and longer treatment time resulted in the formation of $Cr_2N$ precipitates, which causes the degradation of corrosion resistance.

• 열처리공학회지
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• 제20권2호
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• pp.78-83
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• 2007

CrN coatings were deposited by cathodic arc ion plating method on the SKD11 steel substrates. Atmosphere temperature of $350^{\circ}C$, arc current of 90 A, nitrogen partial pressure of 1.0-5.3 Pa, and negative bias voltage of 30-135 V were selected. The characteristics of microstructure were investigated with XRD. Hardness, adhesion and friction coefficient measured by microhardness tester, scratch tester, and ball on disk tribometer. Microstructures depended on nitrogen partial pressure and bias voltage. The preferred orientation of the films was changed from (200) to (111) with decreasing pressure and increasing bias voltage. Adhesion properties related with microstructure, but microstructure changes slightly influenced on hardness and friction properties. The critical load.($Lc_1$) and hardness of CrN films deposited at 5.3 Pa, -30 V condition were 55 N(HF1), $2157{\pm}47\;Hk_{0.025}$. The friction coefficient were about 0.5 under dry condition.

• 한국전기전자재료학회논문지
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• 제18권10호
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• pp.941-944
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• 2005

In this experiment, OLEDs(Organic Light Emitting Diodes) was fabricated to confirm effect of Plasma treatment which increase the hole injection characteristic from anode. Device structure was $ITO/2-TNATA/{\alpha}-NPD/DPVBi/BAlq/Alq_3/Al:Li$. We used DPVBi (4, 4 - Bis (2,2-diphenylethen-1-yls) - Biphenyl) as a blue emitting material. To optimize the process condition of plasma treatment, we used 2 gases of the oxygen and nitrogen gas under 120 mTorr with 100 W, 200 W, and 400 W plasma power. The current efficiency of $N_2$ plasma is more efficient than that of $O_2$ plasma. At $1000 cd/m^2$, we obtained the maximum current efficiency of 6.45 cd/A using $N_2$ gas with 200 W plasma power.