• 제목/요약/키워드: NiO, texture, oxidation

검색결과 6건 처리시간 0.018초

양축 정렬된 니켈기판의 표면 산화반응 연구 (A Study on the Surface Oxidation Behavior of Cube-textured Nickel Substrate)

  • 안지현;김병주;김재근;김호진;홍계원;이희균;유재무
    • Progress in Superconductivity
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    • 제7권1호
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    • pp.58-63
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    • 2005
  • We investigated the surface oxidation behavior of cube-textured polycrystalline nickel at various oxidation conditions. Cube-textured NiO film was formed on a cube-textured polycrystalline nickel regardless of oxidation conditions but different growth behavior of NiO crystals was observed depending on the oxidation conditions. The introduction of water vapor into $O_2$ did not affect the texture evolution, but rough and porous microstructure was developed. Microstructure of NiO film tends to be denser as the oxygen partial pressure increases. It is interesting that (111) peak of theta - two theta diffraction pattern started to get stronger in air atmosphere and (111) plane became the major texture in the substrate oxidized in high purity argon gas. Small amount of high index crystallographic plane NiO peak crystal was observed when $N_{2}O$ was used as an oxidant while only (200) plane crystal was formed in dry $O_2$ atmosphere. Flat and smooth surface was changed into rough faceted one when ramping rate to oxidation temperature was faster. The grain size of NiO was decreased when the oxygen partial pressure was low. It was also observed that the modification of nickel surface suppressed the development of (200) texture.

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초전도 선재의 중간 반응 방지막으로써 Ni 기판위에 제조된 NiO 막의 특성 분석 (Fabrication and characterization of nickel oxide films on textured nickel substrate for a superconductor buffer layer)

  • Park, Eunchul;Inki Hong;Hyunsuk Hwang;Taehyun Sung;Kwangsoo No
    • Progress in Superconductivity
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    • 제3권1호
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    • pp.95-98
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    • 2001
  • Recently, NiO films have been studied as a buffer layer to fabricate the superconductor with preferred orientation and as a diffusion barrier to prevent the reaction between superconductor and textured nickel substrate . We fabricated NiO films on textured Ni substrate by thermal oxidation with various variables of temperature, oxidation time, atmosphere, and cooling rate. We investigated the alignment of NiO films by XRD and pole figure and the microstructures by SEM. (200) <001> alignment of NiO film was observed at the oxidation condition of $1200^{\circ}C$ far 10min and slow cooling in O2 atmosphere. During the process in Ar atmosphere, we could also observe the thermal faceting which affects the alignment of NiO alms on Ni substrate.

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MOCVD 공정을 이용한 $Yb_2O_3$ 박막 제조 (Preparation of $Yb_2O_3$ Film by MOCVD Method)

  • 정우영;전병혁;박해웅;홍계원;김찬중
    • Progress in Superconductivity
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    • 제8권1호
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    • pp.75-80
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    • 2006
  • [ $Yb_2O_3$ ] films were successfully deposited on a cube-textured Ni and(100) $SrTiO_3$(STO) single crystal substrates by metal organic chemical vapor deposition(MOCVD) method using $H_2O$ vapor as an oxidant. $H_2O$ vapor was used in order to avoid the oxidation of Ni substrate. The working pressure and Ar flow rate were 10 Ton and 600 sccm, respectively. $Yb_2O_3$ films on STO were formed at high temperatures above $900^{\circ}C$. While XRD peaks from $Yb_2O_3$ were hardly detected at $900^{\circ}C$, the $Yb_2O_3$(400) texture was developed fur the films grown at deposition temperatures above $950^{\circ}C$. The AEM surface roughness of $Yb_2O_3$ film, grown on STO, was in the range of $6{\sim}10nm$ for the film deposited at $950^{\circ}C$ with a $H_2O$ vapor partial pressure of 5.5 Ton and deposition times of 3 and 5 mins. For cube-textured Ni substrate, both $Yb_2O_3$(222) and $Yb_2O_3$ (400) textures were developed textures at deposition temperatures above $850^{\circ}C$.

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DC reactive sputtering 증착법을 이용한 초전도테이프의 $Y_2O_3$ 단일완충층 증착 ($Y_2O_3$ single buffer layer deposition using DC reactive sputtering for the superconducting coated conductor)

  • 김호섭;고락길;오상수;김태형;송규정;하홍수;양주생;박유미
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.52-53
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    • 2005
  • $Y_2O_3$ film was directly deposited on Ni-3at%W substrate using DC reactive sputtering technique. Metallic yttrium was used for DC sputtering target and water vapor was used for oxidizing the deposited metallic Yttrium atoms on the substrate. The window of the water vapor turned out to be broad. The minimum partial pressure of water vapor was determined by sufficient oxidation of the $Y_2O_3$ film, and the maximum partial pressure of water vapor was determined by the non-oxidation of the target surface. As the sputtering power was increased, The deposition rate increased without narrowing the window. The fabricated $Y_2O_3$ films showed good texture qualities and surface morphologies. The YBCO film deposited directly on the $Y_2O_3$ buffered Ni-3at%W substrate showed $T_c$, $I_c$ (77 K, self field), and $J_c$ (77 K, self field) of 89 K, 64 A/cm and 1.l $MA/cm^2$, respectively.

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Fabrications of Y-ZrO$_2$ buffer layers of coated conductors using dc-sputtering

  • K. C. Chung;Lee, B. S.;S. M. Lim;S. I. Bhang;D. Youm
    • 한국초전도ㆍ저온공학회논문지
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    • 제5권3호
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    • pp.11-14
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    • 2003
  • The detailed conditions of dc-sputtering for depositions of yttria-stabilized ZrO$_2$ (YSZ) films were investigated, while the films were grown on the CeO$_2$ template layers on biaxially textured Ni-tapes. The window of oxygen pressures for proper growth of YSZ films, which was dependent on sputtering powers, was determined by sufficient oxidations of the YSZ films and the de-oxidation of the target surface, which was required for rapid sputtering. The window turned out to be fairly wide under certain values of argon pressure. When the sputtering power was raised, the deposition rate increased without narrowing the window. The fabricated YSZ films showed good texture qualities and surface morphologies.