Recently, there has been extensive research conducted on the miniaturization of semiconductors and the improvement of their integration to achieve high-quality and high-performance electronic devices. To integrate and miniaturize multiple semiconductors, thin and precise wafers are essential. The backgrinding process, which involves high-precision processing, is necessary to achieve this. The backgrinding system is used to grind and polish the back side of the wafer to reduce its thickness to ㎛ units. This enables the high integration and miniaturization of semiconductors and a flattening process to allow for detailed circuit design, ultimately leading to the production of IC chips. As the backgrinding system performs precision processing at the ㎛ unit, it is crucial to determine the stability of the equipment's rigidity. Additionally, the flatness and surface roughness of the processed wafer must be checked to confirm the processability of the backgrinding system. IIn this paper, the goal is to verify the processability of the back grinding system by analyzing the natural frequency and resonance frequency of the equipment through computer simulation and measuring and analyzing the flatness and surface roughness of wafers processed with backgrinding system. It was confirmed whether processing damage occurred due to vibration during the backgrinding process.
Journal of the Korea institute for structural maintenance and inspection
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v.22
no.6
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pp.148-156
/
2018
The integrity assessment of the bridge behavior is generalized by field data of a static load-deformation curve and dynamic properties such as impact factors and natural frequencies. Evaluating it with numerical analysis is a reasonable method. The results of the mockup test and the numerical analysis are corresponded with each other since the behavior of service load proceeds in elastic region. In case of the dynamic behavior of structure, especially for the analysis of vibration, the result of the mockup test differs from the result of numerical analysis a little due to the geometric shape and non-homogeneous materials. In order to converge on these tolerances, this study suggested several numerical models, analyzed the sensitivity and finally offered a practical modeling method for the estimation of bridge on the basis of the result of mockup test. Based on the model substituted concrete section for strands section, the natural frequency of the model composed with axial stiffness of strands or the model applied the modified modulus of elasticity was closest with the result of the mockup test.
Journal of the Korea institute for structural maintenance and inspection
/
v.26
no.4
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pp.20-29
/
2022
The operational modal analysis (OMA) technique, which extracts the modal parameters of a structural system using ambient vibrations, has been actively developed as a field of structural health monitoring of cable-supported bridges. In this paper, the short and long-term modal parameters of a cable-stayed bridge were evaluated using the acceleration data obtained from the two ambient vibration tests (AVTs) and three years of continuous measurements. A total of 27 vertical modes and 1 lateral mode in the range 0.1 ~ 2.5 Hz were extracted from the high-resolution AVTs which were conducted in the 6th and 19th years after its completion. Existing OMA methods such as Peak-Picking (PP), Eigensystem Realization Algorithm with Data Correlation (ERADC), Frequency Domain Decomposition (FDD) and Time Domain Decomposition (TDD) were applied for modal parameters extraction, and it was confirmed that there was no significant difference between the applied methods. From the correlation analysis between long-term natural frequencies and environmental factors, it was confirmed that temperature change is the dominant factor influencing natural frequency fluctuations. It was revealed that the decreased natural frequencies of the bridge were not due to changes in structural performance and integrity, but to the environmental effects caused by the temperature difference between the two AVTs. In addition, when the TDD technique is applied, the accuracy of extracted mode shapes is improved by adding a proposed algorithm that normalizes the sequence so that the autocorrelations at zero lag equal 1.
Park, Yeon Soo;Choi, Sun Min;Yang, Won Yeol;Hong, Hye Jin;Kim, Woon Hyung
Journal of Korean Society of Steel Construction
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v.20
no.5
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pp.609-616
/
2008
Recently, many ocean bridges that connect land to island or island to island have been constructed along with the improvement of the nation's economy. Long-span bridges can be categorized as suspension bridge, cable-stayed bridge, arch bridge and truss bridge. In this study, correction with respect to construction error can be presented on site through the monitoring of the cable tension change of real structure for four major construction stages so that construction accuracy, including the management of profiles, can be improved. A vibration method, the so-called indirect method that uses the cable's natural frequency changes from the acceleration sensor installed on the cable, is applied in measuring cable tension. In this study, the estimation formula for the effective length of cable with damper is presented by comparing and analyzing between actual measurement and analysis result for the change of the cable's effective length. By the way, it is known that the reliability of estimating cable tension by applying the former method that uses the net distance from damper to anchorage is low. Therefore, for future reference of the maintenance stage, the presented formula for estimating the effective length of cable can be used as a reference for the rational decision-making, such as the re-tensioning and replacement of cable.
Transactions of the Korean Society for Noise and Vibration Engineering
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v.24
no.2
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pp.79-86
/
2014
This paper describes an integrity evaluation method for emergency diesel generator(EDG) and rotor part of EDG. EDG is a very important equipment in the nuclear power plant(NPP). EDG supplies electricity to the safety-related equipments for the safety shut down of NPP in an emergency situation of earthquake. The safety of the rotor part of EDG is also important during seismic impact from earthquake. The finite element modelling of the EDG including rotor part was constructed. The modal analysis of EDG was firstly performed. The first natural frequency was calculated and revealed higher than the cutoff frequency of seismic spectrum. Then the stress analysis was done to compare with the allowable stress. The safety of the rotor part was investigated by the finite element analysis of the rotor and journal bearing interaction to find film thickness and critical speed. The seismic load was applied to rotor part in a manner that the load was a weighted static load. Analysis results showed that the maximum stress was within the range of allowable stress and the film thickness is larger than the permissible minimum thickness, and the critical speed was out of the operating speed. Hence, the structural and dynamic integrity of EDG could be confirmed by the numerical analysis method used in this paper. However, dynamic analysis of a rotating rotor and supporting bearing with the seismic impact needs to be investigated in a more rigorous method since the seismic load to the rotating part complicates the behavior of rotating system.
A scaled version of a roller rig is developed to demonstrate the dynamic characteristics of a railway vehicle for academic purposes. This rig is designed based on Jaschinski's similarity law. It is scaled to 1/10 of actual size and allows 9-DOF motion to examine the up and down vibration of a train set. The test rig consists of three sub-hardware components: (i) a driving roller mechanism with a three-phase AC motor and an inverter, (ii) a bogie structure with first and second suspensions, and (iii) the vehicle body. The motor of the rig is capable of 3,600rpm, allowing the test to simulate a vehicle up to a maximum speed of 400Km/hr. Because bearings and joints are properly connected to the sub-structures, various motion analyses, such as a lateral, pitching, and yawing motion, are allowed. The slip motion between the rail and the wheel set is also monitored by several sensors mounted in the rig. After the construction of the hardware, an experiment is conducted to obtain the natural frequencies of the dynamic behavior of the specimen. First, the test rig is run and data are collected from six sets of accelerometers. Then, a numerical analysis of the model based on the ADAMS program is derived. Finally, the measurement data of the first three fundamental frequencies are compared to the analytical result and the validation of the test rig is conducted. The results show that the developed roller rig provides good accuracy in simulating the dynamic behavior of the vehicle motion. Although the roller rig designed in this paper is intended for academia, it can easily be implemented as part of a dynamic experiment of a bogie and a vehicle body for a high-speed train as part of the research efforts in this area.
KSCE Journal of Civil and Environmental Engineering Research
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v.10
no.1
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pp.9-16
/
1990
The safety of concrete nuclear containment structures should be secured against all kinds of loading due to various natural disasters or extraordinary accidental loads. The current design criteria of concrete containment structures are not based on the reliabillty-based design concept but rely on the conventional design concept. In this paper, a probabillty-based reliability analysis were proposed based on a FEM-based random vibration analysis and serviceability limit state of structures. The limit state model defined for the study is a serviceability limit state in terms of the more realistic crack failure that might cause the emission of radioactive materials, and the results are compared with those of the strength limit state. More accurate reliability analyses under various dynamic loads such as earthquake loads were made possible by incorporation the FEM and random vibration theory, which is different from the conventional reliability analysis method. The uncertainties in loads and resistance available in Korea and the refernces were adapted to the situation of Korea, and especially in the case of earthquake, the design earthquake was assessed based on the available re ports on probabilistic description of earthquake ground acceleration in the Korea peninsula.
The damping characteristics of a cylindrical structure containing oil and bearing balls is investigated for external bending forces. The experimental data obtained through the use of bearing balls with viscous oil in a column is given and analyzed. The viscous action of the oil and inertia effects of the balls on the inside of column create a drag force. The drag force dampens the vibration of the column. This study aims to search for an optimum combination of oil and balls which would produce maximum damping. Machining oils of various viscosities along with ball bearings of various sizes place inside cantilevered aluminium tubes of various diameters to create a rig on which the damping properties of the oil and balls can be studied. The contileved tubes are studied in both horizontal and vertical positions in order to gauge the effect of gravity on the system. The actions of the ball in the column and damping characteristics are investigated according to the dimensionless terms. The Buckingham theorem is used to reduce the variables and to predict the damping of an oil ball column. Though the damping ratio remains fairly constant in the horizontal position of column, the damping ratio begins to increase as the ratio of the number of balls and column length rise above 0.28 in the vertical position of oil ball column. The ratio of the ball diameter to column diameter influences the damping ratio with an optimum diameter ratio. Slenderness ratio and gravity effects on the damping ratio ane investigated.
Kim, Hyun-Sil;Ma, Pyung-Sik;Kim, Bong-Ki;Lee, Seong-Hyun;Seo, Yun-Ho
The Journal of the Acoustical Society of Korea
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v.39
no.4
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pp.270-278
/
2020
In this paper, sound transmission of Micro-Perforated Plates (MPPs) installed in an impedance tube with a circular cross-section is described using an analytic method. Vibration of the plates is expressed in terms of an infinite series of modal functions, where modal function in the radial direction is given by the Bessel function. Under the plane wave assumption, a low frequency approximation is derived, and a formula for the sound transmission coefficient of multi-layered MPPs is presented using the transfer matrix method. The Sound Transmission Losses (STLs) of single and double MPPs are computed using the proposed method and compared with those done by the Finite Element Method (FEM), which shows an excellent agreement. As the perforation increases, the STL is degraded, since the STL becomes dominated by the perforation ratio rather than by vibration of the plate. The STL shows dips at natural frequencies as well as at the mass-spring-mass resonance frequency. The proposed model for the STL prediction in this study can be applied to an arbitrary number of MPPs, where each MPP may or may not have a perforation.
In this paper, a database consisting of the dynamic shear modulus ratio and damping ratio test data of clay obtained from 406 groups of triaxial tests is constructed with the starting area of Xiong'an New Area as the research background. The aim is to study the nonlinear dynamic properties of clay in this area under cyclic loading. The study found that the effective confining pressure and plasticity index have certain influences on the dynamic shear modulus ratio and damping ratio of clay in this area. Through data analysis, it was found that there was a certain correlation between effective confining pressure and plasticity index and dynamic shear modulus ratio and damping ratio, with fitting degree values greater than 0.1263 for both. However, other physical indices such as the void ratio, natural density, water content and specific gravity have only a small effect on the dynamic shear modulus ratio and the damping ratio, with fitting degree values of less than 0.1 for all of them. This indicates that it is important to consider the influence of effective confining pressure and plasticity index when studying the nonlinear dynamic properties of clays in this area. Based on the above, prediction models for the dynamic shear modulus ratio and damping ratio in this area were constructed separately. The results showed that the model that considered the combined effect of effective confining pressure and plasticity index performed best. The predicted dynamic shear modulus ratio and damping ratio closely matched the actual curves, with approximately 88% of the data falling within ±1.3 times the measured dynamic shear modulus ratio and approximately 85.1% of the data falling within ±1.3 times the measured damping ratio. In contrast, the prediction models that considered only a single influence deviated from the actual values, particularly the model that considered only the plasticity index, which predicted the dynamic shear modulus ratio and the damping ratio within a small distribution range close to the average of the test values. When compared with existing prediction models, it was found that the predicted dynamic shear modulus ratio in this paper was slightly higher, which was due to the overall hardness of the clay in this area, leading to a slightly higher determination of the dynamic shear modulus ratio by the prediction model. Finally, for the dynamic shear modulus ratio and damping ratio of the engineering site in the starting area of Xiong'an New Area, we confirm that the prediction formulas established in this paper have high reliability and provide the applicable range of the prediction model.
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