• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.46-49
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• 2005

Recently, many research results have been reported about nano-tip using carbon nanotube because of its better sensing ability compared to a conventional silicon tip. However, it is very difficult to identify the carbon nanotube having proper length for nano-tip and to attach it on a conventional tip. In this paper, a new method is proposed to make a nano-tip and to control its length. The electrochemical etching method was used to control the length by cutting the carbon nanotube of arbitrary length and it was possible to monitor the process through current measurement. The etched volume of carbon nanotube was determined by the amount of applied charge. The carbon nanotube was successfully cut and could be used in the nanogripper.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.12 s.189
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• pp.122-127
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• 2006

This paper reports on the development of carbon nanotube tip modified with focused ion beam(FIB). We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a metal-coated canning Probe Microscope (SPM) tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip was aligned toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for SPM.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.1 s.256
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• pp.139-144
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• 2007

This paper presents development of carbon nanotube (CNT) tip modified by focused ion beam (FIB) and experimental results in non-contact mode of atomic force microscopy (AFM) using fabricated tip. We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a conventional silicon tip. The morphology of the fabricated CNT tip was then modified into a desired shape using focused ion beam. We measured anodic aluminum oxide sample and trench structure to estimate the performance of FIB-modified tip and compared with those of conventional Si tip. We demonstrate that FIB modified tip in non contact mode had superior characteristics than conventional tip in the respects of wear, image resolution and sidewall measurement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.461-462
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• 2006

This paper reports on the development of a scanning probe microscopy(SPM) tip with caborn nanotubes. We used an electric field which causes dielectrophoresis(DEP), to align and deposit CNTs on a metal-coated SPM tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip align toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for scanning probe microscopy.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1126-1129
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• 2004

Because of the various length condition of carbon nanotube, it is very confined the application area of the single CNT tip. In this paper, it was proposed the cutting technique of single CNT tip and the relationship between the etched volume and the amount of the applied charge. It is possible to control the length of single CNT tip arbitrary using this technique. The etched volume and length in the single CNT tip can be predicted with the amount of the applied charge. It is very easy to make a single CNT tip with proper length using this technique and to make nanotweezer that was composed two single CNT tips.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1228-1231
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• 2005

This paper reports about the development of scanning probe microscopy (SPM) tip with multi-walled carbon nanotube (MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which causes the dielectrophoresis was used for alignment and deposition of CNTs to the metal coated SPM tip. By dropping the MWNT solution and applying an electric field between an SPM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the SPM tips due to the attraction by the dielectrophoretic force. In this paper, we investigate experimental conditions about the alignment of the CNT to tip axis according to the change of the angle between a tip and an electrode. Experimental results are presented, and then fabricated CNT tips are showed and measurement results for 15nm gold particles are compared with that of the conventional silicon tip.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.501-504
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• 2004

This paper describes the fabrication method for atomic force microscopy(AFM) tip with multi-walled carbon nanotube(MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which cause the dielectrophoresis was used for alignment and deposition of CNTs in this research. By dropping the MWNT solution and applying an electric field between an AFM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the AFM tips due to the attraction by the dielectrophoretic force. In this case, we investigate the effect of the angle between a tip axis and an electrode. Experimental setup were presented, and then CNT attached AFM tips are successfully shown in this paper.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.923-928
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• 2004

AFM tip has been used for surface profiling with a fine resolution, but there is a barrier to improve its performance because of the low aspect ratio. Many researchers have solved this problem with attaching carbon nanotube (CNT) to Si-tip. In this paper, we proposed the aligner system that composed of dual type stage system, and these stages could attach a carbon nanotube to tungsten-tip in vacuum condition. We used tungsten tip instead of Si-tip because of its conductivity. The aligner system proposed in this paper has 10 degree-of-freedom that 3 in the first stage and 7 in the second stage. With picomotors and piezotube, the first stage has the resolution about several tens of nm and the second stage has a resolution about a nm. We experimented on characterization of Nano Aligner System and operated picomotors in SEM environment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.83-86
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• 2004

Carbon nanotube (CNT) tips in tapping mode atomic force microscopy (AFM) enable very high-resolution imaging, measurements, and manipulation at the nanoscale. We present recent results based on experimental analysis that yield new insights into the dynamics of CNT probe tips in tapping mode AFM. Experimental measurements are presented of the frequency response and dynamic amplitude-distance data of a high-aspect-ratio multi-walled (MW) CNT tip to demonstrate the non-linear features including tip amplitude saturation preceding the dynamic buckling of the MWCNT. Surface scanning is performed using a MWCNT tip on a SiO$_2$ grating to verify the imaging instabilities associated with MWCNT buckling when used with normal control schemes in the tapping mode. Lastly, the choice of optimal setpoints for tapping mode control using CNT probe tip are discussed using the experimental results.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.239.2-239.2
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• 2005