• 반도체디스플레이기술학회지
• /
• 제20권2호
• /
• pp.34-42
• /
• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• 열처리공학회지
• /
• 제35권3호
• /
• pp.150-158
• /
• 2022

The effects of scandium addition on the Al-6Si-2Cu Alloy were investigated. The Al-6Si-2Cu-Sc alloy was prepared by gravity die casting process. In this study, scandium was added at 0.2 wt%, 0.4 wt%, 0.8 wt%, and 1.0 wt%. The microstructure of Al-6Si-2Cu-Sc alloy was investigated using Optical Microscope, Field Emission Scanning Electron Microscope, Electron Back Scatter Diffraction, and Transmission Electron microscope. The microstructure of Al-6Si-2Cu alloy with scandium added changed from dendrite structure to equiaxed crystal structure in specimens of 0.4 wt% Sc or more, and coarse needle-shape eutectic Si and β-Al₅FeSi phases were segmented and refined. The nanosized Al₃Sc intermetallic compound was observed to be uniformly distributed in the modified Al matrix.

• Asian Pacific Journal of Cancer Prevention
• /
• 제15권2호
• /
• pp.929-935
• /
• 2014

Two types of nanosized titanium dioxide, anatase ($anTiO_2$) and rutile ($rnTiO_2$), are widely used in industry, commercial products and biosystems. $TiO_2$ has been evaluated as a Group 2B carcinogen. Previous reports indicated that $anTiO_2$ is less toxic than $rnTiO_2$, however, under ultraviolet irradiation $anTiO_2$ is more toxic than $rnTiO_2$ in vitro because of differences in their crystal structures. In the present study, we compared the in vivo and in vitro toxic effects induced by $anTiO_2$ and $rnTiO_2$. Female SD rats were treated with $500{\mu}g/ml$ of $anTiO_2$ or $rnTiO_2$ suspensions by intra-pulmonary spraying 8 times over a two week period. In the lung, treatment with $anTiO_2$ or $rnTiO_2$ increased alveolar macrophage numbers and levels of 8-hydroxydeoxyguanosine (8-OHdG); these increases tended to be lower in the $anTiO_2$ treated group compared to the $rnTiO_2$ treated group. Expression of $MIP1{\alpha}$ mRNA and protein in lung tissues treated with $anTiO_2$ and $rnTiO_2$ was also significantly up-regulated, with $MIP1{\alpha}$ mRNA and protein expression significantly lower in the $anTiO_2$ group than in the $rnTiO_2$ group. In cell culture of primary alveolar macrophages (PAM) treated with $anTiO_2$ and $rnTiO_2$, expression of $MIP1{\alpha}$ mRNA in the PAM and protein in the culture media was significantly higher than in control cultures. Similarly to the in vivo results, $MIP1{\alpha}$ mRNA and protein expression was significantly lower in the $anTiO_2$ treated cultures compared to the $rnTiO_2$ treated cultures. Furthermore, conditioned cell culture media from PAM cultures treated with $anTiO_2$ had less effect on A549 cell proliferation compared to conditioned media from cultures treated with $rnTiO_2$. However, no significant difference was found in the toxicological effects on cell viability of ultra violet irradiated $anTiO_2$ and $rnTiO_2$. In conclusion, our results indicate that $anTiO_2$ is less potent in induction of alveolar macrophage infiltration, 8-OHdG and $MIP1{\alpha}$ expression in the lung, and growth stimulation of A549 cells in vitro than $rnTiO_2$.

• 한국진공학회지
• /
• 제21권3호
• /
• pp.178-184
• /
• 2012

니켈촉매 막을 증착시킨 산화규산 기판 위에 아세틸렌기체와 수소기체를 원료기체로 육불화황기체를 첨가기체로 사용하여 열화학기상증착 방법으로 탄소코일을 합성하였다. 첨가기체의 유량과 아세틸렌/육불화황 기체들의 싸이클릭 on/off 유량 변조에 따라 성장된 탄소코일의 특성(형성 밀도, 형상)을 조사하였다. 육불화황의 기체 유량이 가장 낮은 경우(5 sccm)에서, 2분동안 육불화황을 주입하여 아세틸렌/육불화황 기체를 싸이클릭 on/off 유량 변조시킴에 따라 탄소코일을 형성시켰다. 반면 육불화황을 5분 동안 연속적으로 주입한 경우에서는 탄소나노필라멘트 형상이 나타나지 않았다. 육불화황의 유량이 5 sccm에서 30 sccm으로 증가함에 따라 아세틸렌/육불화황 기체들의 싸이클릭 on/off 유량 변조는 탄소코일의 형상을 나노크기의 형태로만 제한시켰다. 육불화황 기체의 플로린 종에 의한 에칭 특성이 이러한 효과를 주게 하는 것으로 이해되었다.

• 한국재료학회지
• /
• 제22권1호
• /
• pp.35-41
• /
• 2012

Presently, the most promising family of lead-free piezoelectric ceramics is based on $K_{0.5}Na_{0.5}NbO_3$(KNN). Lithium, silver and antimony co-doped KNN ceramics show high piezoelectric properties at room temperature, but often suffer from abnormal grain growth. In the present work, the $(Ba_{0.85}Ca_{0.15})(Ti_{0.88}Zr_{0.12})O_3$ component, which has relaxor ferroelectric characteristics, was doped to suppress the abnormal grain growth. To investigate this effect, Lead-Free $0.95(K_{0.5}Na_{0.5})_{0.95}Li_{0.05}NbO_3-(0.05-x)AgSbO_3-x(Ba_{0.85}Ca_{0.15})(Ti_{0.88}Zr_{0.12})O_3$[KNLN-AS-xBCTZ] piezoelectric ceramics were synthesized by ball mill and nanosized-milling processes in lead-Free $0.95(K_{0.5}Na_{0.5})_{0.95}Li_{0.05}NbO_3-(0.05-x)AgSbO_3$ in order to suppress the abnormal grain growth. The nanosized milling process of calcined powders enhanced the sintering density. The phase structure, microstructure, and ferroelectric and piezoelectric properties of the KNLN-AS ceramics were systematically investigated. XRD patterns for the doped and undoped samples showed perovskite phase while tetragonality was increased with increasing BCZT content, which increase was closely related to the decrease of TO-T. Dense and uniform microstructures were observed for all of the doped BCZT ceramics. After the addition of BCTZ, the tetragonal-cubic and orthorhombic-tetragonal phase transitions shifted to lower temperatures compared to those for the pure KNNL-AS. A coexistence of the orthorhombic and tetragonal phases was hence formed in the ceramics with x = 0.02 mol at room temperature, leading to a significant enhancement of the piezoelectric properties. For the composition with x = 0.02 mol, the piezoelectric properties showed optimum values of: $d_{33}$ = 185 pC/N, $k_P$ = 41%, $T_C=325^{\circ}C$, $T_{O-T}=-4^{\circ}C$.

• 한국결정성장학회지
• /
• 제20권6호
• /
• pp.283-288
• /
• 2010

나노 크기의 NiO 분말을 Ni 산성염과 Ni 염기성염을 혼합하여 제조하는 방법에서 원료가 생성되는 NiO와 이의 환원으로 생성되는 Ni 결정 특성에 미치는 영향을 연구하였다. 산성염으로는 Ni formate를 염기성염으로는 수산화 Ni과 염기성 Ni 탄산염을 사용하였다. 혼합비는 산성염 1당량에 염기성염 9당량을 사용하였으며, 탄산염을 사용한 경우 $750^{\circ}C$/2 h 하소에서도 ~100 nm의 구형의 NiO 분말을 얻었으며, 수산화 염을 사용한 경우는 $600^{\circ}C$/2 h에서는 ~100 nm의 유사 구형의 NiO가 생성되나, $750^{\circ}C$ 열처리에서는 100~600 nm의 유사 입방체 분말을 얻었다. 수산화 염을 사용한 경우에는 탄산염을 사용한 경우에 비하여 수소가스에 의한 환원이 훨씬 빠르게 진행되어 necking이 일어나며 소결이 이루어져 다공체를 형성하였다. 이들 특성을 TG/DSC, XRD, SEM으로 분석하였다.

• Bulletin of the Korean Chemical Society
• /
• 제33권8호
• /
• pp.2546-2552
• /
• 2012

A novel biguanide-functionalized $Fe_3O_4/SiO_2$ magnetite nanoparticle with a core-shell structure was developed for utilization as a heterogeneous organosuperbase in chemical transformations. The structural, surface, and magnetic characteristics of the nanosized catalyst were investigated by various techniques such as transmission electron microscopy (TEM), powder X-ray diffraction (XRD), vibrating sample magnetometry (VSM), elemental analyzer (EA), thermogravimetric analysis (TGA), $N_2$ adsorption-desorption (BET and BJH) and FT-IR. The biguanide-functionalized $Fe_3O_4/SiO_2$ nanoparticles showed a superpara-magnetic property with a saturation magnetization value of 46.7 emu/g, indicating great potential for application in magnetically separation technologies. In application point of view, the prepared catalyst was found to act as an efficient recoverable nanocatalyst in nitroaldol and domino Knoevenagel condensation/Michael addition/cyclization reactions in aqueous media under mild condition. Additionally, the catalyst was reused six times without significant degradation in catalytic activity and performance.

• 한국세라믹학회지
• /
• 제46권1호
• /
• pp.69-73
• /
• 2009

We report the preparation of nanocrystalline cobalt ferrite, $CoFe_2O_4$ particles and their surface coating with silica layers using micro emulsion method. The cobalt ferrite nanoparticles with the size 7nm are firstly prepared by thermal decomposition method. Hydrophobic nanoparticles were coated with silica using micro-emulsion method with surfactant, $NH_4OH$, and tetraethylorthosilicate (TEOS). Monodispersed and spherical silica coated cobalt ferrite nanoparticles have average particle diameter of 38 nm and narrow sized distribution.

• 한국재료학회지
• /
• 제25권9호
• /
• pp.455-461
• /
• 2015

SnS-$TiO_2$ nanocomposites are synthesized using simple, cheap, and less toxic $SnCl_2$ as the tin (II) precursor. The prepared nanoparticles are characterized using powder X-ray diffraction (XRD), transmission electron microscopy (TEM), and UV-Vis diffuse reflectance spectra (DRS). The XRD and TEM results indicate that the prepared product has SnS nanoparticles and a grain diameter of 30 nm. The DRS demonstrate that SnS-$TiO_2$ possesses the absorption profile across the entire visible light region. The generation of reactive oxygen species is detected through the oxidation reaction from 1,5-diphenyl carbazide (DPCI) to 1,5-diphenyl carbazone (DPCO). It is found that the photocurrent density and photocatalytic effect increase with the modified SnS. Excellent catalytic degradation of Texbrite BA-L (TBA) solution is observed using the SnS-$TiO_2$ composites under visible light irradiation. It is proposed that both the strong visible light absorption and the multiple exciton excitations contribute to the high visible light photocatalytic activity.

• 한국재료학회지
• /
• 제26권12호
• /
• pp.741-750
• /
• 2016

Nanofibers(NFs), because of their high surface area and nanosized grains, have appropriate morphologies for use in chemiresistive-type sensors for gas detection applications. In this study, a highly sensitive and selective CO gas sensing material based on Au-decorated $SnO_2$ NFs was fabricated by electrospinning. $SnO_2$ NFs were synthesized by electrospinning and subsequently decorated with various amounts of Au nanoparticles(NPs) by sputtering; this was followed by thermal annealing. Different characterizations showed the successful formation of Au-decorated $SnO_2$ NFs. Gas sensing tests were performed on the fabricated sensors, which showed bell-shaped sensing behavior with respect to the amount of Au decoration. The best CO sensing performance, with a response of ~20 for 10 ppm CO, was obtained at an optimized amount of Au (2.6 at.%). The interplay between Au and $SnO_2$ in terms of the electronic and chemical sensitization by Au NPs is responsible for the great improvement in the CO sensing capability of pure $SnO_2$ NFs, suggesting that Au-decorated $SnO_2$ NFs can be a promising material for fabricating highly sensitive and selective chemiresistive-type CO gas sensors.