• 제목/요약/키워드: Nanoscale fabrication

검색결과 111건 처리시간 0.026초

Nanoscale Protein Chip based on Electrical Detection

  • Choi, Jeong-Woo
    • 한국생물공학회:학술대회논문집
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    • 한국생물공학회 2005년도 생물공학의 동향(XVI)
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    • pp.18-18
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    • 2005
  • Photoinduced electron transport process in nature such as photoelectric conversion and long-range electron transfer in photosynthetic organisms are known to occur not only very efficiently but also unidirectionally through the functional groups of biomolecules. The basic principles in the development of new functional devices can be inspired from the biological systems such as molecular recognition, electron transfer chain, or photosynthetic reaction center. By mimicking the organization of the biological system, molecular electronic devices can be realized $artificially^{1)}$. The nano-fabrication technology of biomolecules was applied to the development of nano-protein chip for simultaneously analyzing many kinds of proteins as a rapid tool for proteome research. The results showed that the self-assembled protein layer had an influence on the sensitivity of the fabricated bio-surface to the target molecules, which would give us a way to fabricate the nano-protein chip with high sensitivity. The results implicate that the biosurface fabrication using self-assembled protein molecules could be successfully applied to the construction of nanoscale bio-photodiode and nano-protein chip based on electrical detection.

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FIB 밀링을 이용한 나노스텐실 제작 및 나노패터닝 (Fabrication of nanostencil using FIB milling for nanopatterning)

  • 정성일;오현석;김규만
    • 한국정밀공학회지
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    • 제23권3호
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    • pp.56-60
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    • 2006
  • A high-resolution shadow mask, or called a nanostencil was fabricated for high resolution lithography. This high-resolution shadowmask was fabricated by a combination or MEMS processes and focused ion beam (FIB) milling. 500 nm thick and $2{\times}2mm$ large membranes wore made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 70 nm could be made into the membrane. By local deposition through the apertures of nanostencil, nanoscale patterns down to 70 nm could be achieved.

고성능 주사탐침열현미경 열전탐침 제작 (High Performance Thermoelectric Scanning Thermal Microscopy Probe Fabrication)

  • 김동립;김경태;권오명;박승호;최영기;이준식
    • 대한기계학회논문집A
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    • 제29권11호
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    • pp.1503-1508
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    • 2005
  • Scanning Thermal Microscope (STU) has been known for its superior resolution for local temperature and thermal property measurement. However, commercially available STU probe which is the key component of SThM does not provide resolution enough to explore nanoscale thermal phenomena. Here, we developed a SThM probe fabrication process that can achieve spatial resolution around 50 m. The batch-fabricated probe has a thermocouple junction located at the end of the tip. The size of the thermocouple junction is around 200 m and the distance of the junction from the very end of the tip is 150 m. The probe is currently being used for nanoscale thermal probing of nano-material and nano device.

나노스케일의 금속 나노빔 시험편 제작 및 이를 이용한 금 박막 나노 구조물의 기계적 물성 평가 (Fabrication of Nanoscale Metal Nanobeam Specimens and Evaluation of the Mechanical Properties of Gold Thin Film Nanostructures)

  • 백창욱;현익재
    • 전기학회논문지
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    • 제56권7호
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    • pp.1294-1297
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    • 2007
  • In this paper, fabrication techniques for nanoscale metallic nanobeam specimens have been proposed, and mechanical properties of the fabricated gold nanobeams have been evaluated by nanoindentation techniques and nanobeam bending test. Elastic modulus and hardness of gold nanobeams were measured to be $109.6\;{\pm}\;10\;GPa\;and\;1.73\;{\pm}\;0.3\;GPa$, respectively, from the nanoindentation test, while elastic modulus was $241\;{\pm}\;7\;GPa$ from the nanobeam bending test.

Bulky carbon layer inlaid with nanoscale Fe2O3 as an excellent lithium-storage anode material

  • Nguyen, Thuy-An;Lee, Sang-Wha
    • Journal of Industrial and Engineering Chemistry
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    • 제68권
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    • pp.140-145
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    • 2018
  • Bulky carbon layer uniformly distributed with nanoscale $Fe_2O_3$ was prepared via a direct carbonation of $Fe^{3+}$-polyacrylonitrile complexes at $700^{\circ}C$ under $N_2$ flow. The iron oxide carbon composites exhibited an excellent cycling performance for lithium storage with a reversible capacity of ${\sim}810mAh\;g^{-1}$ after 250 cycles at a current rate of $100mA\;g^{-1}$. The enhancement was mainly attributed to dual functions of bulky carbon layer which facilitated the lithium-ion diffusion and accommodated the volume changes of active $Fe_2O_3$ during charge/discharge process. Our novel chemical strategy is quite effective for scalable fabrication of high capacity lithium-storage materials.

Characterization of Nanoscale Electroactive Polymers via Piezoelectric Force Microscopy

  • Lee, Su-Bong;Ji, Seungmuk;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.232.2-232.2
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    • 2015
  • Piezoelectric force microscopy (PFM) is a powerful method to characterize inversed piezoelectric effects directly using conductive atomic force microscopy (AFM) tips. Piezoelectric domains respond to an applied AC voltage with a characteristic strain via a contact between the tip and the surface of piezoelectric material. Electroactive piezoelectric polymers are widely investigated due to their advantages such as flexibility, light weight, and microactuation enabling various device features. Although piezoelectric polymers are promising materials for wide applications, they have the primary issue that the piezoelectric coefficient is much lower than that of piezoelectric ceramics. Researchers are studying widely to enhance the piezoelectric coefficient of the materials including nanoscale fabrication and copolymerization with some materials. In this report, nanoscale electroactive polymers are prepared by the electrospinning method that provides advantages of direct poling, scalability, and easy control. The main parameters of the electrospinning process such as distance, bias voltage, viscosity of the solution, and elasticity affects the piezoelectric coefficient and the nanoscale structures which are related to the phase of piezoelectric polymers. The characterization of such electroactive polymers are conducted using piezoelectric force microscopy (PFM). Their morphologies are characterized by field emission-scanning electron microscope (FE-SEM) and the crystallinity of the polymer is determined by X-ray diffractometer.

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Nanomanipulation and Nanomanufacturing based on Ion Trapping and Scanning Probe Microscopy (SPM)

  • Kim, Dong-Whan;Tae, Won-Si;Yeong, Maeng-Hui;K. L. Ekinci
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.530-537
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    • 2004
  • Development of a versatile nanomanipulation tool is an overarching theme in nanotechnology. Such a tool will likely revolutionize the field given that it will enable fabrication and operation of a wealth of interesting nanodevices. This study seeks funding to create a novel nanomanipulation system with the ultimate goal of using this system for nanomanufacturing at the molecular level. The proposed design differs from existing approaches. It is based on a nanoscale ion trap integrated to a scanning prove microscope (SPM) tip. In this design, molecules to be assembled will be ionized and collected in the nanoscale ion trap all in an ultra high vacuum (UHV) environment. Once filled with the molecular ions, the nanoscale ion trap-SPM tip will be moved on a substrate surface using scanning probe microscopy techniques. The molecular ions will be placed at their precise locations on the surface. By virtue of the SPM, the devices that are being nanomanufactured will be imaged in real time as the molecular assembly process is carried out. In the later stages, automation of arrays of these nanomanipulators will be developed.

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저온 선택적 원자층 증착공정을 이용한 유기태양전지용 AZO 투명전극 제조에 관한 실험적 연구 (Experimental Study on Fabrication of AZO Transparent Electrode for Organic Solar Cell Using Selective Low-Temperature Atomic Layer Deposition)

  • 김기철;송근수;김형태;유경훈;강정진;황준영;이상호;강경태;강희석;조영준
    • 대한기계학회논문집B
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    • 제37권6호
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    • pp.577-582
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    • 2013
  • AZO(Aluminium-doped Zinc Oxide)는 기존의 LCD, OLED, 광센서, 유기태양전지 등의 투명전극에 널리 사용되는 ITO(Indium Tin Oxide)를 대체하기 위한 물질로 주목받고 있다. 본 연구에서는 유기태양전지의 투명 전극으로 많이 사용되는 ITO 를 대체하기 위해 원자층 증착(ALD) 공정의 저온 선택적 증착 특성을 이용하여 유연성 폴리머인 PEN 기판상에 AZO 투명전극을 직접 패턴방식으로 제조하고, 그 투명전극의 구조적, 전기적, 광학적 특성을 평가하였다. 전기적, 광학적 특성 결과들로부터 원자층 증작공정의 저온 선택적 증착 특성을 통해 형성된 AZO 투명전극의 유기태양전지로의 적용 가능성을 확인할 수 있었다.