• Transactions of Materials Processing
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• v.16 no.5 s.95
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• pp.360-363
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• 2007

Microstructure and microhardness of metallic powders of pure copper were studied after high pressure torsion(HPT) processing with 10 turns of die rotation and high pressure of 6 GPa. The grain size of copper decreases drastically after HPT and reaches nanometer size ranges. During HPT, the hardness of consolidates of copper powders increases with increasing the temperature of HPT processing. Examinations of the fracture surfaces indicated evidence of ductile fracture. The results proved that HPT of copper powders has a beneficial effect for homogeneous deformation with reducing grain size.

• Journal of the Korean Ceramic Society
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• v.30 no.2
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• pp.115-122
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• 1993

Transparent Al2O3 and TiO2 clear sols prepared by hydrolysis and subsequent peptization were mixed into wet gel. EDS analysis for this gel showed that wet gel was extremely homogeneous in chemical composition. Calcination of the wet gel at 120$0^{\circ}C$ for 50 minutes resulted in Al2O3-TiO2 nanocomposite powders where TiO2 particles of 101~102 nanometer were dispersed in the Al2O3 matrix. Both powders were sintered for 4 hours in the temperature range over 1500~1$650^{\circ}C$ with and without 5wt% MgO sintering aid. Among these sintered bodies, nanocomposite powder compacts sintered at 1$650^{\circ}C$ for 4 hours with 5wt% MgO showed the most dense structure with the grain size under 5${\mu}{\textrm}{m}$ and highest relative density of 98.2%.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.4
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• pp.332-335
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• 2008

PMMA light guiding plate with nano pattern was fabricated by nano imprint lithography method. A silicon mold for electroplating of nickel was fabricated by conventional photolithography process. A nickel stamp for nano imprint lithography was fabricated by electroplating process using silicon mold. The nano imprint lithography was performed on PMMA plate at $140^{\circ}C$ under pressure of 20kN. The nano pattern on PMMA plate was investigated using FE-SEM. It is shown that the patterns were well transferred for several steps and the nano imprint lithography method could be applied for fabricating patterns of light guiding plate.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.735-738
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• 2003

In this paper, we report a molecular dynamics (MD) simulation of the ion implantation for nano-scale devices with ultra-shallow junctions. In order to model the profile of ion distribution in nanometer scale, the molecular dynamics with a damage model has been employed. As an exemplary case, we calculate the dopant profile during the ion implantation of B, As, and Ge.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1869-1874
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• 2003

Polymeric fibers with nanometer-scale diameters are produced by electrospinning. When the electrical forces at the surface of a polymer solution or melt overcome the surface tension then electrospinning occurs. Polyethylene oxide (PEO), Polycarbonate have been electrospun in our laboratory. Electrospun fibers are observed by optical microscopy or scanning electron microscopy. The average diameters of the electrospun fibers range from 300 nm to 30 nm when the electric field strength increasing from 1 kV/cm to 3 kV/cm. The average diameters of the electrospun fibers range from 200 nm to 30 nm when the concentration decreasing from 10 wt% to 4 wt%.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1069-1072
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• 2003

Ultraviolet-nanoimprint lithography (UV-NIL) is a promising nanoimprint method for cost-effectively defining nanometer scale structures at room temperature and low pressure. Nanostamp fabrication technology is a key technology for UV-NIL because fabricating a high resolution nanostamp is the first step for defining high resolution nanostructures in a substrate. We used quartz as an UV transparent stamp material for the UVNIL. A $5{\times}5{\times}0.09$ inch stamp was fabricated using the quartz etch process in which Cr film was used as a hard mask for transferring nanostructures into the quartz. In this paper, we describe the quartz etching process and discuss the results including SEM images.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1684-1689
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• 2003

Dielectric Barrier Discharges (DBD) in oxygen and air are well established for the production of large quantities of ozone and are more recently being applied to a wider range of after treatment processes for HAPs(Hazardous Air Pollutants). The potential use as a charger for particle collection are not well known. In this work, we measured charge distribution of nanometer or submicron sized particles passing through the dielectric barrier discharge reactor. The bipolar charge characteristics of particles passing DBD reactor were investigated. Fluorometric method using uranine particles and a fluorometer was employed to examine the bipolar charging characteristics of the charged particles by DBD reactor. Finally, the charge distributions of particles were determined from the electrical mobility classification using DMA.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.3
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.1
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• pp.31-36
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• 2009

Micro-machining technology has been adopted for shape accuracy of micrometer and sub-micrometer scale, surface roughness of tens nanometer in industries. In micro-machining process the quality of machined surface is derived from machining condition and tooling. This paper investigates AE(acoustic emission) and cutting force signals according to machined surface quality related to machining condition. Machined surface quality was analyzed by the AE and cutting force parameter which reflect surface morphology. The characteristics of signal were extracted for process optimization by monitoring both the tool condition and the machined surface texture in micro end milling process.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.