• 제목/요약/키워드: Nano-thickness

검색결과 844건 처리시간 0.023초

10 nm-Ni 층과 비정질 실리콘층으로 제조된 저온공정 나노급 니켈실리사이드의 물성 변화 (Property of Nickel Silicides with 10 nm-thick Ni/Amorphous Silicon Layers using Low Temperature Process)

  • 최용윤;박종성;송오성
    • 대한금속재료학회지
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    • 제47권5호
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    • pp.322-329
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    • 2009
  • 60 nm- and 20 nm-thick hydrogenated amorphous silicon (a-Si:H) layers were deposited on 200 nm $SiO_2/Si$ substrates using ICP-CVD (inductively coupled plasma chemical vapor deposition). A 10 nm-Ni layer was then deposited by e-beam evaporation. Finally, 10 nm-Ni/60 nm a-Si:H/200 nm-$SiO_2/Si$ and 10 nm-Ni/20 nm a-Si:H/200 nm-$SiO_2/Si$ structures were prepared. The samples were annealed by rapid thermal annealing for 40 seconds at $200{\sim}500^{\circ}C$ to produce $NiSi_x$. The resulting changes in sheet resistance, microstructure, phase, chemical composition and surface roughness were examined. The nickel silicide on a 60 nm a-Si:H substrate showed a low sheet resistance at T (temperatures) >$450^{\circ}C$. The nickel silicide on the 20 nm a-Si:H substrate showed a low sheet resistance at T > $300^{\circ}C$. HRXRD analysis revealed a phase transformation of the nickel silicide on a 60 nm a-Si:H substrate (${\delta}-Ni_2Si{\rightarrow}{\zeta}-Ni_2Si{\rightarrow}(NiSi+{\zeta}-Ni_2Si)$) at annealing temperatures of $300^{\circ}C{\rightarrow}400^{\circ}C{\rightarrow}500^{\circ}C$. The nickel silicide on the 20 nm a-Si:H substrate had a composition of ${\delta}-Ni_2Si$ with no secondary phases. Through FE-SEM and TEM analysis, the nickel silicide layer on the 60 nm a-Si:H substrate showed a 60 nm-thick silicide layer with a columnar shape, which contained both residual a-Si:H and $Ni_2Si$ layers, regardless of annealing temperatures. The nickel silicide on the 20 nm a-Si:H substrate had a uniform thickness of 40 nm with a columnar shape and no residual silicon. SPM analysis shows that the surface roughness was < 1.8 nm regardless of the a-Si:H-thickness. It was confirmed that the low temperature silicide process using a 20 nm a-Si:H substrate is more suitable for thin film transistor (TFT) active layer applications.

IR-UWB 시스템 응용을 위한 시간- 및 주파수-영역에서의 앤티포달 비발디 안테나 성능 평가 (Performance Evaluation of Antipodal Vivaldi Antenna in the Time- and Frequency-Domains for IR-UWB Systems Application)

  • 고영목;김근용;나극환
    • 한국전자파학회논문지
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    • 제23권2호
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    • pp.159-168
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    • 2012
  • 본 논문에서는 IR-UWB(Impulse Radio Ultra Wideband) 시스템 응용을 위한 앤티포달 비발디 안테나를 설계하고, 시간 및 주파수 영역에서 나노 초 단위의 초광대역 임펄스 신호 전송을 위한 IR-UWB 안테나 성능 평가를 수행하였다. 설계된 앤티포달 비발디 안테나는 저가 생산이 가능한 두께 1.6 mm, 유전율 ${\epsilon}_r=4.7$, $tan{\delta}=0.002$인 FR-4 기판을 이용하여 제작하였다. 제작된 안테나는 무반사실에서 주파수 영역 파라메타인 반사 손실, Far 필드방사 패턴을 측정하였다. 또한, 시간 영역에서 나노 초 단위의 임펄스 신호 전송에 따른 펄스 충실도 분석을 수행하여 UWB 대역에서 안정적으로 초광대역 신호 전송이 가능함을 증명하였다. 본 논문에서 설계/제작된 앤티포달 비발디 안테나는 낮은 왜곡과 양호한 방사 특성을 갖고, 나노 초 단위의 초광대역 임펄스를 방사 또는 수신할 수 있다.

Fabrication of Ordered One-Dimensional Silicon Structures and Radial p-n Junction Solar Cell

  • Kim, Jae-Hyun;Baek, Seong-Ho
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.86-86
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    • 2012
  • The new approaches for silicon solar cell of new concept have been actively conducted. Especially, solar cells with wire array structured radial p-n junctions has attracted considerable attention due to the unique advantages of orthogonalizing the direction of light absorption and charge separation while allowing for improved light scattering and trapping. One-dimenstional semiconductor nano/micro structures should be fabricated for radial p-n junction solar cell. Most of silicon wire and/or pillar arrays have been fabricated by vapour-liquid-solid (VLS) growth because of its simple and cheap process. In the case of the VLS method has some weak points, that is, the incorporation of heavy metal catalysts into the growing silicon wire, the high temperature procedure. We have tried new approaches; one is electrochemical etching, the other is noble metal catalytic etching method to overcome those problems. In this talk, the silicon pillar formation will be characterized by investigating the parameters of the electrochemical etching process such as HF concentration ratio of electrolyte, current density, back contact material, temperature of the solution, and large pre-pattern size and pitch. In the noble metal catalytic etching processes, the effect of solution composition and thickness of metal catalyst on the etching rate and morphologies of silicon was investigated. Finally, radial p-n junction wire arrays were fabricated by spin on doping (phosphor), starting from chemical etched p-Si wire arrays. In/Ga eutectic metal was used for contact metal. The energy conversion efficiency of radial p-n junction solar cell is discussed.

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초박막 두께의 Nb-TiOx 나노시트 합성 (The synthesis of ultrathin Nb-doped TiOx nanosheets)

  • 이상은;서준;박희정
    • 한국결정성장학회지
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    • 제30권5호
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    • pp.194-199
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    • 2020
  • 2차원 층상결정구조를 갖는 금속산화물 나노시트의 조성을 제어함으로써 재료 물성 및 응용의 확장이 가능하다. 본 연구에서 니오비움(Nb)이 도핑 된 타이타늄산화물(TiOy) 나노시트 합성에 성공함으로써 나노시트의 조성을 순수조성에서 도핑조성으로 확장할 수 있었다. 상세하게는 출발 물질인 층상 구조 금속산화물 합성 시 도핑 조성을 설계(K0.8Ti1.73-xNbxLi0.27O4, x = 0, 0.03, 0.07)하고 고상 합성한 후 유기물처리를 통한 화학적 박리를 수행하였다. 이렇게 함으로써 니오비움이 도핑 된 타이타늄산화물 초박막 나노시트를 수득할 수 있었다. 나노시트의 크기는 x-y 방향에서 긴 길이 기준으로 2 ㎛ 이하였으며 두께(z 방향)는 약 1 nm였다. 니오비움의 도핑 여부는 XRD 및 SEM-EDS 분석을 통해 확인할 수 있었다.

Photovoltaic Efficiencies on Dye-Sensitized Solar Cells Assembled with Graphene-Linked TiO2 Anode Films

  • Kim, A-Young;Kim, Ji-Eun;Kim, Min-Young;Ha, Seung-Won;Tien, Ngyen Thi Thuy;Kang, Mi-Sook
    • Bulletin of the Korean Chemical Society
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    • 제33권10호
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    • pp.3355-3360
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    • 2012
  • To promote the photoelectric conversion efficiency of dye-sensitized solar cells (DSSCs), graphene is introduced as a working electrode with $TiO_2$ in this study, because it has great transparency and very good conductivity. XRD patterns indicate the presence of graphene and $TiO_2$ particles in graphene-linked $TiO_2$ samples. Moreover, TEM pictures also show that the nano-sized $TiO_2$ particles are highly dispersed and well-linked onto the thin layered graphene. On the basis of the UV-visible spectra, the band gaps of $TiO_2$, 1.0 wt % graphene-$TiO_2$, 5.0 wt % graphene-$TiO_2$, and 10.0 wt % graphene-$TiO_2$ are 3.16, 2.94, 2.25, and 2.11 eV, respectively. Compared to pure $TiO_2$, the energy conversion efficiency was enhanced considerably by the application of graphene-linked $TiO_2$ anode films in the DSSCs to approximately 6.05% for 0.1 wt % graphene-$TiO_2$ with N719 dye (10.0 mm film thickness and $5.0mm{\times}5.0mm$ cell area) under $100mW/cm^2$ of simulated sunlight. The quantum efficiency was the highest when 1.0 wt % of graphene was used. In impedance curves, the resistance was smallest for 1.0 wt % graphene-$TiO_2$-DSSC.

CdSe/ZnS 양자점을 이용한 디스플레이 (Display using the CdSe/ZnS Quantum Dot)

  • 조수영;송진원
    • 전자공학회논문지
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    • 제51권8호
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    • pp.167-171
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    • 2014
  • 평판 디스플레이(plate panel display)가 휴대용으로 발전하면서 박막화, 고색재현성, 고휘도에 관한 연구가 활발히 이루어지고 있으며, 광원으로써 LED, OLED가 주로 이용되고 있다. 이러한 광원의 소재로 양자점에 관한 연구가 많이 이루어 지고 있는데, 양자점은 고색재현성과 유연디스플레이 구현에 있어서 주목받는 차세대 반도체 나노형광체 이다. 본 연구에서는 평판 디스플레이를 구현함에 있어서 양자점을 이용하는 방법에 관하여 제시하였다. CdSe/ZnS 양자점을 PET베리어 필름에 $100{\mu}m$ 두께로 도포하고 455nm의 파장을 갖는 청색 LED를 광원으로하여 빛을 조사하는 디바이스를 제작하고 광특성을 평가하였으며, LCD의 색변환 필름으로써 양자점의 적용 가능성을 제시하였다.

A novel shear deformation theory for buckling analysis of single layer graphene sheet based on nonlocal elasticity theory

  • Mokhtar, Youcef;Heireche, Houari;Bousahla, Abdelmoumen Anis;Houari, Mohammed Sid Ahmed;Tounsi, Abdelouahed;Mahmoud, S.R.
    • Smart Structures and Systems
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    • 제21권4호
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    • pp.397-405
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    • 2018
  • In this paper, a novel simple shear deformation theory for buckling analysis of single layer graphene sheet is formulated using the nonlocal differential constitutive relations of Eringen. The present theory involves only three unknown and three governing equation as in the classical plate theory, but it is capable of accurately capturing shear deformation effects, instead of five as in the well-known first shear deformation theory (FSDT) and higher-order shear deformation theory (HSDT). A shear correction factor is, therefore, not required. Nonlocal elasticity theory is employed to investigate effects of small scale on buckling of the rectangular nano-plate. The equations of motion of the nonlocal theories are derived and solved via Navier's procedure for all edges simply supported boundary conditions. The results are verified with the known results in the literature. The influences played by Effects of nonlocal parameter, length, thickness of the graphene sheets and shear deformation effect on the critical buckling load are studied. Verification studies show that the proposed theory is not only accurate and simple in solving the buckling nanoplates, but also comparable with the other higher-order shear deformation theories which contain more number of unknowns.

Comparative color and surface parameters of current esthetic restorative CAD/CAM materials

  • Egilmez, Ferhan;Ergun, Gulfem;Cekic-Nagas, Isil;Vallittu, Pekka Kalevi;Lassila, Lippo Veli Juhana
    • The Journal of Advanced Prosthodontics
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    • 제10권1호
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    • pp.32-42
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    • 2018
  • PURPOSE. The purpose of this study was to derive and compare the inherent color (hue angle, chroma), translucency ($TP_{SCI}$), surface gloss (${\Delta}E^*_{SCE-SCI}$), and surface roughness ($R_a$) amongst selected shades and brands of three hybrid CAD/CAM blocks [GC Cerasmart (CS); Lava Ultimate (LU); Vita Enamic (VE)]. MATERIALS AND METHODS. The specimens (N = 225) were prepared into square-shaped ($12{\times}12mm^2$) with different thicknesses and shades. The measurements of color, translucency, and surface gloss were performed by a reflection spectrophotometer. The surface roughness and surface topography were assessed by white light interferometry. RESULTS. Results revealed that hue and chroma values were influenced by the material type, material shade, and material thickness (P < .001). The order of hue angle amongst the materials was LU > CS > VE, whereas the order of chroma was VE > CS > LU. $TP_{SCI}$ results demonstrated a significant difference in terms of material types and material thicknesses ($P{\leq}.001$). $TP_{SCI}$ values of the tested materials were ordered as LU > CS > VE. ${\Delta}E^*_{SCE-SCI}$ and $R_a$ results were significantly varied amongst the materials (P < .001) and amongst the shades (P < .05). The order of ${\Delta}E^*_{SCE-SCI}$ amongst the materials were as follows $LU>VE{\geq}CS$, whereas the order of $R_a$ was $CS{\geq}VE>LU$. CONCLUSION. Nano-ceramic and polymer-infiltrated-feldspathic ceramic-network CAD/CAM materials exhibited different optical, inherent color and surface parameters.

유기변성 LDH를 사용한 난연 ABS 나노복합재료의 열적 및 기계적 물성 (Thermal and Mechanical Properties of Flame Retardant ABS Nanocomposites Containing Organo-Modified Layered Double Hydoxide)

  • 김석준
    • Elastomers and Composites
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    • 제43권4호
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    • pp.241-252
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    • 2008
  • 올레인산으로 유기변성된 ZnAl-LDH(SO-ZnAl LDH)를 합성하여 브롬화 에폭시 수지(BER) 및 산화안티몬을 포함하는 난연 ABS 컴파운드에 첨가하였다. 난연 ABS 컴파운드는 동일방향으로 회전하는 이축압출기를 통해 제조되었고 난연성 및 기계적 성질을 측정하기 위한 시편으로 사출성형 되었다. ABS 나노복합재료의 XRD 패턴에서는 피크가 나타나지 않았다. SOZnAl LDH를 포함하는 난연 ABS 나노복합재료는 TGA 시험 결과 향상된 내열성을 보였다. 그러나, 난연 ABS 나노복합재료들은 UL 94 수직시험(1.6 mm 두께)시 등급을 얻지 못했다. BER를 1.5 wt% 이상 더 첨가한 경우들에서만 UL 94 V0 등급을 얻을 수 있었다. SO-ZnAl LDH의 첨가량에 비례하여 난연 ABS 나노복합재료의 노치드 아이조드 충격강도, 인장탄성률 및 신율은 증가하였으나 유동지수는 감소하였다.

전자 빔 물리적 증착(EB-PVD)법으로 코팅된 YSZ 열차폐층의 압흔손상 거동에 대한 하부층의 영향 (Influence of Subsurface Layer on the Indentation Damage Behavior of YSZ Thermal Barrier Coating Layers Deposited by Electron Beam Physical Vapor Deposition)

  • 허용석;박상현;한인섭;우상국;정연길;백운규;이기성
    • 한국세라믹학회지
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    • 제45권9호
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    • pp.549-555
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    • 2008
  • The thermal barrier coating must withstand erosion when subjected to flowing gas and should also maintain good stability and mechanical properties while it must also protect the turbine component from high temperature, hot corrosion, creep, and oxidation during operation. In this study we investigated the influence of subsurface layer, $Al_2O_3$ or NiCrCoAIY bond coat layer, on the indentation damage behavior of YSZ thermal barrier coating layers deposited by electron beam physical vapor deposition (EB-PVD). The bond coat is deposited using different process such as air plasma spray (APS) or spray of high velocity oxygen fuel (HVOF) and the thickness is varied. Hertzian indentation technique is used to induce micro damages on the coated layer. The stress-strain behaviors are characterized by results of the indentation tests.