• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.173-174
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• 2007

반도체 소자가 발달함에 따라서 박막은 더욱 다층화 되고 그 두께는 줄어들고 있다. 따라서 소자의 초고집적화를 위해서는 각 박막의 두께를 더욱 작게 하여야 한다. 또한 반도체 소자 제조 공정에서는 Si 기판과 금속 박막간의 확산이 커다란 문제로 부각되어 왔다. 특히 Cu는 높은 확산성에 의하여 Si 기판과 접합에서 많은 확산에 의한 문제가 발생하게 되며, 또한 선폭이 줄어듦에 따라 고열이 발생하여 실리콘으로 spiking이 발생하게 된다. 이러한 확산을 방지하기 위하여 금속 배선과 Si기판 사이에는 필연적으로 확산방지막을 삽입하게 되었다. 기존의 연구에서는 $1000\;{\AA}$의 W-B-C-N 확산방지막을 제작하여 연구하였다. 이 논문에서는 Cu의 확산을 방지하기 위한 W-B-C-N 확산방지막을 다양한 두께로 제작하여 그 특성을 확인하여 초고집적화를 위한 더욱 얇은 두께의 W-B-C-N 확산방지막에 대하여 연구하였다. W-B-C-N 확산방지막의 두께 변화에 대한 특성을 확인하기 위하여 $900^{\circ}C$까지 열처리 한 후 그 면저항을 측정하였다.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3178-3182
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• 2007

The interferometer method with nano-scale spatial resolution has been developed in this study. To enhance the accuracy of the previous developed method, the 14 bit cooled CCD camera with 1280 by 980 spatial resolution was applied to the measurement. And optical alignment has been carried out on the highly accurate position sensors with 500nm resolution so as to be able to calibrate the detected interference image with the field of view. Also the measurements were applied to the ultra thin oil film between the Al coated cylinder mirror with 38.1mm radius and 0.5mm cover glass to verify the developed method. The measured result showed the good agreement with the used cylinder curvature with ${\pm}$5.18run uncertainty.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1553-1555
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• 2008

Super-hydrophobic treated Polyimide film was used as a flexible substrate for developing a new method of metallization. Hydrophilic patterns were fabricated by IN irradiation through shadow mask. Patterned super-hydrophobic substrate was dipped into a bath containing silver nano ink Silver ink was only coated on hydrophilic patterned area. Metal lines of $600{\mu}m$ pitch were fabricated successfully. However, their thickness was too thin to serve as interconnection. To overcome this problem, iterative dipping was conducted. After repeating five times, the thickness of silver metal lines were increased to over than $2{\mu}$. After heat treatment of silver lines, their resistivities were reduced to order of $30{\mu}{\Omega}$-cm the similar level of values reported in other literatures. So, a new method of metallization has high potential for application of RFID antenna and flexible electronics substrates.

• Computers and Concrete
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• v.27 no.4
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• pp.369-383
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• 2021

This article deals with the frequency analysis of viscoelastic sandwich disk with graphene nano-platelets (GPLs) reinforced viscoelastic concrete (GPLRVC) face sheets and honeycomb core. The honeycomb core is made of aluminum due to its low weight and high stiffness. The rule of the mixture and modified Halpin-Tsai model are engaged to provide the effective material constant of the concrete. By employing Hamilton's principle, the governing equations of the structure are derived and solved with the aid of the Generalize Differential Quadrature Method (GDQM). In this paper, viscoelastic properties are modeled according to Kelvin-Voigt viscoelasticity. The deflection as the function of time can be solved by the fourth-order Runge-Kutta numerical method. Afterward, a parametric study is carried out to investigate the effects of the outer to inner radius ratio, hexagonal core angle, thickness to length ratio of the concrete, the weight fraction of GPLs into concrete, and the thickness of honeycomb core to inner radius ratio on the frequency of the viscoelastic sandwich disk with honeycomb core and FG-GPLRVC face sheet.

• Steel and Composite Structures
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• v.39 no.5
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• pp.565-581
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• 2021

In this paper the buckling analysis of the nanoplate made of arbitrary bi-directional functionally graded (BDFG) materials with small scale effects are investigated. To study the small-scale effects on buckling load, the Eringen's nonlocal theory is applied. Employing the principle of minimum potential energy, the governing equations are obtained. Generalize differential quadrature method (GDQM) is used to solve the governing equations for various boundary conditions to obtain the buckling load of BDFG nanoplates. These models can degenerate into the classical models if the material length scale parameter is taken to be zero. Comparison between the results of GDQ method and other papers for buckling analysis of a simply supported rectangular nano FGM plate reveals the accuracy of GDQ method. At the end some numerical results are presented to study the effects of material length scale parameter, plate thickness, aspect ratio, Poisson's ratio boundary condition and side to thickness ratio on size dependent Frequency.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.1
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• pp.13-17
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• 2006

Self-Assembled Monolayers (SAMs) formed by alkanethiol adsorption to thin metal film are widely being investigated for applications as coating layer for anti-stiction or friction reduction and in fabrication of micro structure of molecules and bio molecules. Recently, there have been many researches on micro patterning using the advantages of very thin thickness and etching resistance of Self-Assembled Monolayers in selective etching of thin metal film. In this report, we present the several machining method to form the nanoscale structure by Mask-Less laser patterning using alknanethiolate Self-Assembled Monolayers such as thin metal film etching and heterogeneous SAM structure formation.

• Interaction and multiscale mechanics
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• v.4 no.2
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• pp.107-122
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• 2011

Mechanical behavior in nano-sized structures differs from those in macro sized structures due to surface effect. As the ratio of surface to volume increases, surface effect is not negligible and causes size-dependent mechanical behavior. In order to identify this size effect, atomistic simulations are required; however, it has many limitations because too much computational resource and time are needed. To overcome the restrictions of the atomistic simulations and graft the well-established continuum theories, the continuum model considering surface effect, which is based on the bridging technique between atomistic and continuum simulations, is introduced. Because it reflects the size effect, it is possible to carry out a variety of analysis which is intractable in the atomistic simulations. As a part of the application examples, the homogenization method is applied to micro/nano thin films with porosity and the homogenized elastic coefficients of the nano scale thickness porous films are computed in this paper.

• Journal of the Semiconductor & Display Technology
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• v.5 no.2 s.15
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• pp.1-5
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• 2006

The GaN thin film on the 8 periods InGaN/GaN multi-quantum well structure was grown on the sapphire substrate using metal-organic chemical vapor deposition. The nano-scaled triangular-lattice holes with the diameter of 150 nm were patterned on a polymethylmethacrylate blocking film using an electron beam nano-lithography system. The thin slab and two-dimensional photonic crystals with the thickness of 28 nm were fabricated on the GaN layer for the blue light diffraction sources. The photonic crystal with the lattice parameter of 460 nm enhances spectral intensity of photoluminescence indicating that the photonic crystals provides the source of nano-diffraction for the blue light of the 450-nm wavelength.

• Tribology and Lubricants
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• v.15 no.1
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• pp.52-58
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• 1999

Nano-indentation and nano-scratch tests were peformed to assess the mechanical and tribological properties of the coating on a commercially available thin-film magnetic recording disk. Surface topography and roughness of the disk was studied using atomic force microscopy. The hardness and elastic modulus data show a peak at an indentation depth equivalent to the thickness of carbon overcoat, indicating strong influence of the coatin $g_strate interaction and the coating surface roughness on the measurements. The variations of surface roughness data were analysed statistically based on the normal probability distribution theories and Weibull cumulative probability theories.es.

• Journal of the Korean Magnetics Society
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• v.15 no.2
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• pp.133-136
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• 2005

In the case of contacts between semiconductor and metal in semiconductor devices, they tend to be unstable because of thermal budget. To prevent these problems we deposited W-C-N diffusion barrier for preventing the interdiffusion between metal and semiconductor. The thickness of the barrier is $1,000{\AA}$ and the pressure is 3 mTorr during the deposition. In this work we coated LSMO (CMR material) on W-C-N diffusion barrier and then we studied the interface effects between LSMO layer and W-C-N diffusion barrier. We got results that the magnetic characteristics of LSMO thin film are still maintained after annealing at $800^{\circ}C$ for 3 hr because W-C-N thin diffusion barrier was prevented the diffusion of oxygen between LSMO and Si substrate.