• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• Textile Coloration and Finishing
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• v.26 no.3
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• pp.159-164
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• 2014

Biodegradable Poly(butylene succinate), PBS, was photooxidized by UV/ozone irradiation and the effect of UV energy on the surface properties of the UV-irradiated PBS film were investigated by the measurement of reflectance, surface roughness, contact angles, chemical composition, and zeta potential. With increasing UV energy, reflectance decreased in the visible and ultraviolet regions particularly at the wavelength of 380nm. The irradiation produced nano-scale surface roughness including the maximum peak-to-valley roughness increased from 106nm for the unirradiated sample to 221nm at the UV energy of $10.6J/cm^2$. The improved hydrophilicity was due to the higher $O_{1s}/C_{1s}$ resulting from the introduction of polar groups such as C-O and C=O bonds. The surface energy of the PBS increased from $42.1mJ/m^2$ for the unirradiated PBS to $56.8mJ/m^2$ at the irradiation of $21.2J/cm^2$. The zeta potentials of the UV-irradiated PBS also decreased proportionally with increasing UV energy. The cationic dyeability of the PBS increased accordingly resulting from the improved affinity of the irradiated PBS surfaces containing photochemically introduced anionic and dipolar dyeing sites.

• Proceeding of EDISON Challenge
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• 2017.03a
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• pp.499-505
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• 2017

Photoisomerizing molecules which can transform their structure by the light irradiation have great deal for the application of photo-switching devices. And azobenzene is the representive type of the photoisomerizing molecules. It can transform their trans- structures into cis- structure as the light for certain wave lengths they receive. This property shows the potential of ON/OFF switching functionalization which can be used into the nano scale photo switch. Furthermore, many studies are interested in the organic linkers that connect the azobenzene and metal electrodes. We used S, $CH_2S$, $(CH_2)_4S$ as the linker to watch the influence of linkers for electronic properties. So We suggest a photoswitching device based on the vertical junction using the first-principles calculations with density functional theory and non-equilibrium Greens function (NEGF). By analyzing the electronic structure and tunneling current caused by the structural difference of the system between cis- and trans- azobenzene, the difference in switching mechanism, ON/OFF ratio and transmission will be watched as the linker changes. And finally We will suggest which linker would be the better for the optimal device architecture which can achieve high control of the ON/OFF photocurrent ratio. This result will show the potential of azobenzene-based photoswitch and provide the critical insight in constructing the optimal device architecture.

• Applied Chemistry for Engineering
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• v.25 no.4
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• pp.357-362
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• 2014

To prepare diketopyrrolopyrrole (DPP) red 254 pigment with high shield and bright color, DPP red 254 crude previously synthesized was treated at various thermal-treat temperature, addition derivative and ball-milling. The properties of samples were measured by the means of FT-IR, UV-Vis spectroscopy, TEM, PSA, BET surface area analyzer, viscometer and spectrophotometer. It was found that solvent thermal-treatment of the sample prepared after ball-milling as nano-scale was very effective method in pigmentation process.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.185-189
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• 2005

We reported here nano-scale electrical phase-change recording in amorphous $Ge_2Sb_2Te_5$ media using an atomic force microscope (AFM) having conducting probes. In recording process, a pulse voltage is applied to the conductive probe that touches the media surface to change locally the electrical resistivity of a film. However, in contact operation, tip/media wear and contamination could major obstacles, which degraded SNR, reproducibility, and lifetime. In order to overcome tip/media wear and contamination in contact mode operation, we adopted the W incorporated diamond-like carbon (W-DLC) films as a protective layer. Optimized mutilayer media were prepared by a hybrid deposition system of PECVD and RF magnetron sputtering. When suitable electrical pulses were applied to media through the conducting probe, it was observed that data bits as small as 25 nm in diameter have been written and read with good reproducibility, which corresponds to a data density of $1 Tbit/inch^2$. We concluded that stable electrical phase-change recording was possible mainly due to W-DLC layer, which played a role not only capping layer but also resistive layer.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.185-185
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• 2012

최근 자연모사를 이용한 연구가 다양한 분야에 적용되고 있다. 특히 연 잎의 표면에서 나타나는 초발수 특성이 마이크로 나노 크기의 구조와 표면에너지를 제어하는 에피큐티클 왁스에 기인하다는 것이 밝혀지면서 이를 응용한 연구가 진행되고 있다. 본 연구는 알루미늄 표면처리로 마이크로와 나노 구조물을 형성하고 그 위에 발수 특성을 가진 물질을 증착하여, 발수성을 가지는 표면을 개발하였다. 알루미늄 표면에 마이크로 크기의 알루미나($Al_2O_3$) 분말을 이용한 블라스트(blast) 공정으로 표면에 마이크로 구조를 형성하고, Linear Ion Source(LIS)를 적용한 Ar 이온빔 에칭으로 나노 구조를 형성하였다. FE-SEM 분석을 통해 수~수십 마이크로 구조 위에 나노 크기의 구조가 형성 된 것을 관찰하였다. 마이크로 나노 구조가 형성된 알루미늄의 표면에너지를 낮추기 위해 trimethylsilane(TMS) 및 Ar을 이용한 플라즈마처리로 표면에 기능성 코팅막을 형성하였다. 그 결과 TMS 발수 코팅하기 전에 비해 표면에너지가 $99.75mJ/m^2$에서 $9.05mJ/m^2$으로 급격히 낮아지고 접촉각 값이 $123^{\circ}$로 향상된 것을 확인하였다.

• KSBB Journal
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• v.28 no.4
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• pp.254-259
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• 2013

Herein we present a diagnostic paper chip that can quantitatively detect albumin without external electronic reader and dispensing apparatus. We fabricated a diagnostic paper chip device by printing wax barrier on the paper and wicking it with citrate buffer and tetrabromophenol blue to detect albumin in sample solution. The paper chip is so simple that we dropped a sample solution at sample pad and measure the ratio of two travel distances of the sample solvent and albumin under the name of retention factor. Our result confirmed that the retention factor was constant in the samples with same concentration of albumin and useful determinant for the measurement of albumin concentration. The paper chip is affordable and equipment-free, and close to ideal point-of-care test in accordance with the assured criteria, outlined by the World Health Organization. We assume that this diagnostic paper chip will expand the concept of colorimetric determination and provide a inexpensive diagnostic method to aging society and developing country.

• Proceedings of the Korean Magnestics Society Conference
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• 2013.05a
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• pp.19-20
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• 2013

Thermoelectic properties of the typical thermoelectric host materials, the tellurides and selenides, are known to be noticeably changed by their volume change due to the strain [1]. In the bismuth telluride ($Bi_2Te_3$) crystal, a substitution of rare-earth element by replacing one of the Bi atoms may cause the change of the lattice parameters while remaining the rhombohedral structure of the host material. Using the first-principles approach by the precise full potential linearized augmented plane wave (FLAPW) method [2], we investigated the Ce substitution effect on the thermoelectric transport coefficients for the bismuth telluride, employing Boltzmann's equation in a constant relaxation-time approach fed with the FLAPW wave-functions within the rigid band approximation. Depending on the real process of re-arrangement of atoms in the cell to reach the equilibrium state, $CeBiTe_3$ was found to manifest a metal or a narrow bandgap semiconductor. This feature along with the strong correlation effect originated by the 4f states of Ce affect significantly on the thermoelectric properties. We showed that the position of the strongly localized f-states in energy scale (Fig. 1, f-states are shaded) was found to alter critically the transport properties in this material suggesting an opportunity to improve the thermoelectric efficiency by tuning the external strain which may changing the location of the f-sates.

• Advances in nano research
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• v.4 no.3
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• pp.229-249
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• 2016

In this paper, buckling characteristics of nonhomogeneous functionally graded (FG) nanobeams embedded on elastic foundations are investigated based on third order shear deformation (Reddy) without using shear correction factors. Third-order shear deformation beam theory accounts for shear deformation effects by a parabolic variation of all displacements through the thickness, and verifies the stress-free boundary conditions on the top and bottom surfaces of the FG nanobeam. A two parameters elastic foundation including the linear Winkler springs along with the Pasternak shear layer is in contact with beam in deformation, which acts in tension as well as in compression. The material properties of FG nanobeam are supposed to vary gradually along the thickness and are estimated through the power-law and Mori-Tanaka models. The small scale effect is taken into consideration based on nonlocal elasticity theory of Eringen. Nonlocal equations of motion are derived through Hamilton's principle and they are solved applying analytical solution. Comparison between results of the present work and those available in literature shows the accuracy of this method. The obtained results are presented for the buckling analysis of the FG nanobeams such as the effects of foundation parameters, gradient index, nonlocal parameter and slenderness ratio in detail.

• Advances in nano research
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• v.4 no.3
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• pp.197-228
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• 2016

In the present study, thermo-electro-mechanical vibration characteristics of functionally graded piezoelectric (FGP) Timoshenko nanobeams subjected to in-plane thermal loads and applied electric voltage are carried out by presenting a Navier type solution for the first time. Three kinds of thermal loading, namely, uniform, linear and non-linear temperature rises through the thickness direction are considered. Thermo-electro-mechanical properties of FGP nanobeam are supposed to vary smoothly and continuously throughout the thickness based on power-law model. Eringen's nonlocal elasticity theory is exploited to describe the size dependency of nanobeam. Using Hamilton's principle, the nonlocal equations of motion together with corresponding boundary conditions based on Timoshenko beam theory are obtained for the free vibration analysis of graded piezoelectric nanobeams including size effect and they are solved applying analytical solution. According to the numerical results, it is revealed that the proposed modeling can provide accurate frequency results of the FGP nanobeams as compared to some cases in the literature. In following a parametric study is accompanied to examine the effects of several parameters such as various temperature distributions, external electric voltage, power-law index, nonlocal parameter and mode number on the natural frequencies of the size-dependent FGP nanobeams in detail. It is found that the small scale effect and thermo-electrical loading have a significant effect on natural frequencies of FGP nanobeams.