• 제목/요약/키워드: Nano-mold

검색결과 200건 처리시간 0.026초

UV 나노임프린트리소그래피의 정렬 공정 중 몰드의 변형해석 (Deformation of a mold for large area UV-nanoimprint lithography in alignment and curing processes)

  • 박인수;원종진;임홍재;정재일
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1939-1943
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    • 2008
  • Deformation of a mold is measured and analyzed in alignment and curing processes of UV-Imprint Lithography. We are focused on mold deformation caused by a UV resin, which is laminated between a mold and a target glass-panel. The UV resin is viscous in case of liquid state, and the resin will be solidified when being exposed by the ultra-violet light. The viscosity of the resin causes shear force on the mold during the alignment process. Moreover, the shrinkage during phase change from liquid to solid may cause residual stress on the mold. The experiments for measuring temperature and strain are made during alignment and curing process. Strain-gages and thermocouples are used for measuring the strain and variation of temperature on several points of the mold, respectively. The deformation of mold is also simulated and analyzed. The simulation results are compared with the experiments. Finally, sources of alignment errors in large area UV-nanoimprint lithography are discussed.

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절삭 깊이의 무작위 제어를 적용한 다이아몬드 선삭공정에서 소재회전 반경에 따른 미세패턴의 크기변화 분석 연구 (A study on size variation of micro-pattern according to turning radius of workpiece in diamond turning with controlled random cutting depth)

  • 정지영;한준세;최두선;제태진
    • Design & Manufacturing
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    • 제14권1호
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    • pp.63-68
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    • 2020
  • Ultra-high brightness and thin displays need to optical micro-patterns which can uniformly diffuse the lights and low loss. The micro random patterns have characteristics to rise the optical efficiency such as light extraction, uniform diffusion. For this reason, various fabrication processes are studied for random patterns. In this study, the micro random patterns were machined by diamond turning which used a controlled cutting tool path with random cutting depth. The machined patterns had random shape and directionality along the circumferential direction. The average width and length of machined random pattern according to rotation radius were 40.13㎛~55.51㎛ and 37.25㎛~59.49㎛, and these results were compared with the designed result. Also, the machining error according to rotation radius in diamond turning using randomly controlled cutting depth was discussed.

실리콘 마이크로 몰드와 유리의 열-재흐름 현상을 이용한 초소수성 유리 표면 제작 및 젖음 특성 평가 (Fabrication and Characterization of Superhydrophobic Glass Surfaces Using Silicon Micro-mold and Thermal-reflow Process)

  • 김승준;공정호;이동윤;김종만
    • 대한금속재료학회지
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    • 제50권8호
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    • pp.591-597
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    • 2012
  • This paper presents regularly micro-textured glass surfaces ensuring the superhydrophobic properties in the Cassie-Baxter regime. The proposed surfaces were fabricated simply and efficiently by filling the glass material into a silicon micro-mold with periodic micro-cavities based on a thermal-reflow process, resulting in a successful demonstration of the textured glass surface with periodically-arrayed micro-pillar structures. The static and dynamic wetting properties of the micro-textured glass surfaces were characterized by measuring the static contact angle (SCA) and contact angle hysteresis (CAH), respectively. In addition, the surface wettability was estimated theoretically based on Wenzel and Cassie-Baxter wetting theories, and compared with the experimental ones. Through the experimental and theoretical observations, it was clearly confirmed that the proposed micro-textured glass surfaces showed the slippery superhydrophobic behaviors in the Cassie-Baxter wetting mode.

나노 패턴의 전사성 향상을 위한 고온 기체 분사를 이용한 금형 표면의 가열 기법 (Surface Heating Method Using Hot Jet Impingement for Improving Transcription of Nano-Pattern)

  • 김경하;유영은;제태진;최두선;김선경
    • 소성∙가공
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    • 제16권1호
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    • pp.9-14
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    • 2007
  • In this paper, a mold temperature control method for injection molding is proposed. The inner surface of mold is locally heated by jet impingement to improve pattern transcription. Heating by hot jet is completed while the mold is open. An experimental system that realizes the proposed idea has been built, which includes mold, nozzle assembly and heater. Actual injection molding process including the proposed heating procedure has been conducted to verify the validity of the method. The process has been done for several conditions with different jet temperatures and duration of heating. The results from different conditions are compared.

사출 금형의 능동형 온도제어에 따른 사출특성에 관한 연구 (A Study on Injection Characteristic using Active Temperature Control of Injection mold)

  • 조창연;신홍규;홍남표;서영호;김병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 추계학술대회 논문집
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    • pp.302-305
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    • 2007
  • In recent years, many researches on new storage media with high capacity and information are developing. For manufacture of optical storage with high capacity, the injection molding process is generally used. In order to increase the filling ratio of the injection molding structure, the injection molding process required for high injection pressure, packing pressure and temperature control of the mold. However, conventional injection molding process is difficult to increase the filling ratio using injection master with the range of several nanometers and high aspect ratio. In order to improve and increase filling ratio of nano-structure with high aspect ratio, the active temperature control of injection mold was used. Experimental conditions were used injection pressure, time and temperature. Consequently, by using the peltier device into injection mold, we carried out the efficient and active temperature control of mold at low cost.

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Nano Crystalline Change by Heat Treatment

  • Sun, Yong-Bin
    • 반도체디스플레이기술학회지
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    • 제12권4호
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    • pp.55-59
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    • 2013
  • Mold die sticking arises from silica filler abrasion to the cavity surface. Ni-P electroplating was examined to substitute conventional hard Cr plating. More than 4% of Phosphorus in the electroplated film produces nano crystal structure and annealing makes $Ni_3P$ precipitated to get hardness values equivalent to hard Cr.

Anodic Aluminum Oxide 기반 니켈 스탬퍼를 이용한 나노패턴 성형에 관한 연구 (A Study on the Fabrication of Nano Pattern using a Nickel Stamper Replicated from Anodic Aluminum Oxide)

  • 김신;김종선;홍석관;김현종;윤경환;강정진
    • 소성∙가공
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    • 제20권1호
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    • pp.23-28
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    • 2011
  • For the fabrication of nano patterned products manufacturing a nano patterned mold is needed in advance. The nano patterned stamper was fabricated by electroforming the AAO master with nickel. The surface of nickel-plated stamper had nano-patterned holes with the diameter of 73 nm and the depth of 83 nm. Hot embossing was used for forming P3HT sheet and the process factors of hot embossing were closer as pressure, temperature and time. In the present paper hot embossing experiments were performed to find the main process conditions to affect the replication ratio of nano patterns on surface of P3HT sheet. As a result, main contributing factors for the replication ratio of hot embossed pattern could be sequentially enumerated as pressure, temperature and time.