• 제목/요약/키워드: Nano-machining process

검색결과 92건 처리시간 0.017초

Ti-Al-Si-N 박막 제작을 위한 합금 타겟 제조 및 박막의 기계적 특성 (Fabrication of Alloy Target for Formation of Ti-Al-Si-N Composite Thin Film and Their Mechanical Properties)

  • 이한찬
    • 한국전기전자재료학회논문지
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    • 제29권10호
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    • pp.665-670
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    • 2016
  • Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.

주입성형한 지르코니아 소결체의 기계적 성질에 미치는 알루미나 첨가의 영향 (Effects of the Addition of Alumina on the Mechanical Properties of Cast Zirconia Sintered Body)

  • 이동윤;조준호;서정일;배원태
    • 대한치과기공학회지
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    • 제34권2호
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    • pp.113-119
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    • 2012
  • Purpose: Zirconia blocks for all ceramic dentures are divided into two groups. One is pre-heated block and the other is binder added block. In this study, the possibility of recycling the remained parts of binder added block after CAD/CAM machining with slip casting process was investigated. Methods: Owing to the binder added block contain large amount of organic matter, Binder burn-out was must be carried out before ball milling for preparing the casting slip. Binder burn-out was accomplished at $600^{\circ}C$ for 10 hours. Ball milling was performed with 5mm zirconia ball and 60mm polyethylene bottle. From 0% to 5% at 1% intervals of alumina was added to zirconia powder for preparing slip. Solid casting was achieved with plaster mold. Cast bodies were dried and sintered at $1,500^{\circ}C$ for 1 hour. Linear shrinkage, apparent porosity, water absorption, bulk density, and flexural strength were tested. Microstructures were observed by SEM, EDS and XRD analysis were executed. Results: Optimum slips for casting was prepared with 300g ball, 100g powder, and 180g distilled water. Cast body without alumina showed 26% of linear shrinkage, 6.07 of apparent density, and 470MPa of three point bend strength. On the other hand, as received zirconia block, which was sintered at the same conditions, showed 23% of linear shrinkage, 6.10 of apparent density, and 680MPa of three point bend strength. When 3% of alumina was added to zirconia, sintered body showed 23% of linear shrinkage, 6.10 of apparent density, and 780MPa of three point bend strength. SEM photomicrographs and EDS analysis showed alumina particles uniformly dispersed in zirconia matrix, and XRD analysis showed no phase transformation of tetragonal zirconia particles was occurred when alumina was added. Conclusion: According to the all of this experimental results, 3% of alumina added cast zirconia body showed excellent mechanical properties more than as received binder containing zirconia block.