• 제목/요약/키워드: Nano replication

검색결과 59건 처리시간 0.029초

핫엠보싱 공정에서의 미세 패턴 성형에 관한 연구 (Study of nano patterning rheology in hot embossing process)

  • 김호;김광순;김헌영;김병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 추계학술대회논문집
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    • pp.371-376
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    • 2003
  • The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process, simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during Compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

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저온 고체산화물연료전지 구현을 위한 다층 나노기공성 금속기판의 제조 (Development of Metal Substrate with Multi-Stage Nano-Hole Array for Low Temperature Solid Oxide Fuel Cell)

  • 강상균;박용일
    • 한국세라믹학회지
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    • 제42권12호
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    • pp.865-871
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    • 2005
  • Submicron thick solid electrolyte membrane is essential to the implementation of low temperature solid oxide fuel cell, and, therefore, development of new electrode structures is necessary for the submicron thick solid electrolyte deposition while providing functions as current collector and fuel transport channel. In this research, a nickel membrane with multi-stage nano hole array has been produced via modified two step replication process. The obtained membrane has practical size of 12mm diameter and $50{\mu}m$ thickness. The multi-stage nature provides 20nm pores on one side and 200nm on the other side. The 20nm side provides catalyst layer and $30\~40\%$ planar porosity was measured. The successful deposition of submicron thick yttria stabilized zirconia membrane on the substrate shows the possibility of achieving a low temperature solid oxide fuel cell.

메조기공을 갖는 다양한 금속 산화물 촉매를 이용한 사이클로헥사놀의 탈수소화 반응 (Highly Ordered Mesoporous Metal Oxides as Catalysts for Dehydrogenation of Cyclohexanol)

  • 이은옥;김명실;김지만
    • Korean Chemical Engineering Research
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    • 제51권4호
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    • pp.518-522
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    • 2013
  • 사이클로헥사논은 나일론의 단량체로 사용되는 카프로락탐의 원료로 중요한 중간체이며 사이클로헥사놀의 탈수소화반응을 통해 합성된다. 본 연구에서는 탈수소화 반응에 적용하기 위한 촉매로 다양한 메조기공을 가진 금속 산화물(meso-$WO_3$, meso-$TiO_2$, meso-$Fe_2O_3$, meso-CuO, meso-$SnO_2$, meso-NiO)을 나노 복제법에 의해 합성하였다. 그 결과 meso-$WO_3$ >> meso-$Fe_2O_3$ > meso-$SnO_2$ > meso-$TiO_2$ > meso-NiO > meso-CuO 순서로 촉매 활성이 나타났으며, 그 중 meso-$WO_3$가 가장 높은 촉매 활성을 보임을 알 수 있었다. 따라서 사이클로헥사놀을 이용한 탈수소화 반응에 meso-$WO_3$의 폭넓은 응용 가능성을 확인하였다.

Fabrication of Silicon Nanotemplate for Polymer Nanolens Array

  • Cho, Si-Hyeong;Kim, Hyuk-Min;Lee, Jung-Hwan;Venkatesh, R. Prasanna;Rizwan, Muhammad;Park, Jin-Goo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.37.1-37.1
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    • 2011
  • Miniaturization of lenses has been widely researched by various scientific and engineering techniques. As a result, micro scaled lens structure could be easily achieved from various fabrication techniques; nevertheless it is still challenging to make nano scaled lenses. This paper reports a novel fabrication method of silicon nanotemplate for nanolens array. The inverse structure of nanolens array was fabricated on silicon substrate by reactive ion etching (RIE) process. This technique has a flexibility to produce different tip shapes using different pattern masks. Once the silicon nano-tip array structure is well-defined using an optimized recipe, it is followed by polymer molding to duplicate nanolens array from the template. Finally, the nanostructures formed on silicon nanotemplate and polymer replica were investigated using FE-SEM and AFM measurements. The nano scaled lens can be manufactured from the same template, also using other replication techniques such as imprinting, injection molding and so on.

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Synthesis of Core-Shell Silica Nanoparticles with Hierarchically Bimodal Pore Structures

  • 윤석본;박대근;윤완수
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.467-467
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    • 2011
  • Reflecting the growing importance of nanomaterials in science and technology, controlling the porosity combined with well-defined structural properties has been an ever-demanding pursuit in the related fields of frontier researches. A number of reports have focused on the synthesis of various nanoporous materials so far and, recently, the nanomaterials with multimodal porosity are getting an emerging importance due to their improved material properties compared with the mono porous materials. However, most of those materials are obtained in bulk phases while the spherical nanoparticles are one of the most practical platforms in a great number of applications. Here, we report on the synthesis of the core-shell silica nanoparticles with double mesoporous shells (DMSs). The DMS nsnoparticles are spherical and monodispersive and have two different mesoporous shells, i.e., the bimodal porosity. It is the first example of the core-shell silica nanoparticles with the different mesopores coexisting in the individual nanoparticles. Furthermore, the carbon and silica hollow capsules were also fabricated via a serial replication process.

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패턴전사프린팅용 고분자 복제 소재 연구 (A Study on Polymer Replica Materials for Nanotransfer Printing)

  • 강영림;박운익
    • 한국전기전자재료학회논문지
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    • 제34권4호
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    • pp.262-268
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    • 2021
  • For the past several decades, various next-generation patterning methods have been developed to obtain well-designed nano-to-micro structures, such as imprint lithography, nanotransfer printing (nTP), directed self-assembly (DSA), E-beam lithography, and so on. Especially, nTP process has much attention due to its low processing cost, short processing time, and good compatibility with other patterning techniques in achieving the formation of high-resolution functional patterns. To transfer functional patterns onto desirable substrates, the use of soft materials is required for precise replication of master mold. Here, we introduce a simple and practical nTP method to create highly ordered structures using various polymeric replica materials. We found that polymethyl methacrylate (PMMA), polystyrene (PS), and polyvinylpyridine (PVP) are possible candidates for replica materials for reliable duplication of Si master mold based on systematic analysis of pattern visualization. Furthermore, we successfully obtained well-defined metal and oxide nanostructures with functionality on target substrates by using replica patterns, through deposition and transfer process. We expect that the several candidates of replica materials can be exploited for effective nanofabrication of complex electronic devices.

Kaempferol의 MAPK 신호 조절을 통한 심근염 유발 엔테로바이러스 증식 억제 (Kaempferol Inhibits Enterovirus Proliferation through MAPK Signal Regulation)

  • 장진화;정해인;임병관;남상집
    • 생약학회지
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    • 제48권3호
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    • pp.173-178
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    • 2017
  • We investigated the efficacy of single compound of plant extract in coxsackievirus B3 (CVB3) infection. CVB3 is a main cause of Hand-foot-mouth diseases (HFMD) and viral myocarditis in children and adult. Several single compounds of plant extract were purified by HPLC and tested as antiviral drug candidate. Among them, kaempferol was selected to effective anti-enterovirus compound by HeLa cells survival assay. CVB3 infected HeLa cells were treated with kaempferol ($100{\mu}g/ml-100ng/ml$) and their antiviral effect was confirmed. After 16 hours of treatment, HeLa cells were lysed and proteins were extracted for western blot analysis. CVB3 viral capsid protein VP1 production and transcription factor eIF4G-1 cleavage was significantly decreased in $100{\mu}g/ml$ kaempferol treatment. Virus replication was observed by virus RNA amplification. Kaempferol strongly reduced virus positive and negative strand RNA amplification. Moreover, MAPK signal induced by CVB3 infection, pERK and pmTOR, kaempferol treatment significantly inhibited the activity. Plant extract single compound, kaempferol, is a strong candidate to be developed non-toxic anti-enterovirus treatment agent.

나노허니컴 구조물을 이용한 산업용 극소수성 표면 제작 (Superhydrophobic Engineered Surface Based on Nanohoneycomb Structures)

  • 김동현;박현철;이건홍;황운봉
    • Composites Research
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    • 제20권2호
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    • pp.17-20
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    • 2007
  • Oxalic acid를 이용한 양극산화기법과 테플론 담금법을 이용하여 극소수성 나노/마이크로 구조물을 복제하였다. 이때 nanoscale hole의 사이즈는 양극산화시의 전압과 양극산화시간에 의해 결정된다. nanoscale에서 분자들 사이에 영향을 미치는 Van der Waals interactions에 의해서 복제 중 polymer sticking 현상이 발생한다. 이는 복제된 나노 구조물들이 서로 들러붙고 구부러지고 침강시키는 작용을 하게 된다. 이러한 현상이 microstructures위에 nanostructures가 존재하는 hierarchical structure가 생성되게 하며, 이러한 구조물은 연꽃잎의 미세구조물과 유사한 특성을 보인다. 즉 제작된 극소수성 나노/마이크로 구조물 표면은 접촉각이 $160^{\circ}{\sim}170^{\circ}$정도로 나타내고 또한 $1^{\circ}$미만의 sliding angle을 나타낸다.

AFM기반 기계적 TNL 패터닝을 통한 PDMS 몰드제작 (Fabrication of PDMS Mold by AFM Based Mechanical TNL Patterning)

  • 정윤준;박정우
    • 한국생산제조학회지
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    • 제22권5호
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    • pp.831-836
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    • 2013
  • This study demonstrates the process of fabricating patterns using tribonanolithography (TNL),with laboratory-made micro polycrystalline diamond (PCD) tools that are attached to an atomic force microscope (AFM). The various patterns are easily fabricated using mechanical scratching, under various normal loads, using the PCD tool on single crystal silicon, which is the master mold for replication in this study. Then, polydimethylsiloxane (PDMS) replica molds are fabricated using precise pattern transfer processes. The transferred patterns show high dimensional accuracy as compared with those of TNL-processed silicon micro molds. TNL can reduce the need for high cost and complicated apparatuses required for conventional lithography methods. TNL shows great potential in that it allows for the rapid fabrication of duplicated patterns through simple mechanical micromachining on brittle sample surfaces.

미세성형공정에서의 폴리머 레올로지의 정량화 (Quantitative rheology of polymers in high resolution structuring)

  • 김병희;김헌영;김호;김광순;강신일
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.1036-1042
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    • 2003
  • The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process , simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

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