• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.10
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• pp.635-641
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• 2014

In this study, the temperature control device was designed for the study in order to detect the output in frequency of temperature, and the study confirmed accurate temperature values treated systemically by using expanded A/D converting Technology. The control technology of functional sensor included the output error Detection. For the future study, it is necessary to implement a control device by building multiple circuits integrally with different types of sensors such as a automatically and intelligent notification function sensors.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Transactions of the KSME C: Technology and Education
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• v.3 no.4
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• pp.249-255
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• 2015

Functional nanochannels were fabricated in order to control selective ion transportation with high permeability and low energy consumption. In this research, nanochannel platform fabrication process and surface functionalization process were developed. In addition, selective ion transportation and concentration measurement system was also set-up. By using fabricated multilayer metal membrane with electrical bias, 95% of ion ($Cl^-$) was blocked. This developed process is new-conceptional membrane fabrication technology and is expected to be applied to next-generation water purification/desalination, portable artifical kidney, and artificial sense organ.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.2
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• pp.164-169
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• 2023

Nano Pt particles were dispersed on carbon-based supports by a polyol process for a catalyst application in a polymer electrolyte fuel cell. We tried to optimize the effect of pH on the electrostatic forces between the support and the Pt colloids. We investigated the relationship among the surface charges on the carbon support, the solution pH, and the concentration of a glycolate, and the Pt particle size. The produced catalyst with nano Pt particles on the support was evaluated by the long-term cyclic voltammetry (CV) performance test and compared with the results from a commercial catalyst. Our experimental results reveal that the pH-control can modify the particle size distribution and the dispersion of the nano Pt particles. This resulted in a cost-effective method for the synthesis of highly Pt loaded Pt/C catalysts for fuel cells better than a commercial catalyst system.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.448-448
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• 2010

Magnetic random access memory (MRAM) has made a prominent progress in memory performance and has brought a bright prospect for the next generation nonvolatile memory technologies due to its excellent advantages. Dry etching process of magnetic thin films is one of the important issues for the magnetic devices such as magnetic tunneling junctions (MTJs) based MRAM. CoFeB is a well-known soft ferromagnetic material, of particular interest for magnetic tunnel junctions (MTJs) and other devices based on tunneling magneto-resistance (TMR), such as spin-transfer-torque MRAM. One particular example is the CoFeB - MgO - CoFeB system, which has already been integrated in MRAM. In all of these applications, knowledge of control over the etching properties of CoFeB is crucial. Recently, transferring the pattern by using milling is a commonly used, although the redeposition of back-sputtered etch products on the sidewalls and the low etch rate of this method are main disadvantages. So the other method which has reported about much higher etch rates of >$50{\AA}/s$ for magnetic multi-layer structures using $Cl_2$/Ar plasmas is proposed. However, the chlorinated etch residues on the sidewalls of the etched features tend to severely corrode the magnetic material. Besides avoiding corrosion, during etching facets format the sidewalls of the mask due to physical sputtering of the mask material. Therefore, in this work, magnetic material such as CoFeB was etched in an ICP etching system using the gases which can be expected to form volatile metallo-organic compounds. As the gases, carbon monoxide (CO) and ammonia ($NH_3$) were used as etching gases to form carbonyl volatiles, and the etched features of CoFeB thin films under by Ta masking material were observed with electron microscopy to confirm etched resolution. And the etch conditions such as bias power, gas combination flow, process pressure, and source power were varied to find out and control the properties of magnetic layer during the process.

• International Journal of Advanced Culture Technology
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• v.5 no.1
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• pp.90-97
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• 2017

Nowadays, the most of commercial buildings are build-out with complex architecture and decorated with more complicated interiors of buildings so establishing intelligible escape routes becomes an important case of fire or other emergency in a limited time. The commercial buildings are already equipped with multiple exit signs and these exit signs may create confusion and leads the people into different directions under emergency. This can jeopardize the emergency situation into a chaotic state, especially in a complex layout buildings. There are many research focused on implementing different approached to improve the exit sign system with better visual navigating effects, such as the use of laser beams, the combination of audio and video cues, etc. However the digital signage system based emergency exit sign management is one of the best solution to guide people under emergency situations to escape. This research paper, propose an intelligent evacuation route GUIDE that uses the combination centralized Wireless Sensor Networks (WSN) and digital signage for people safety and avoids dangers from emergency conditions. This proposed system applies WSN to detect the environment condition in the building and uses an evacuation algorithm to estimate the safe route to escape using the sensor information and then activates the signage system to display the safe evacuation route instruction GUIDE according to the location the signage system is installed. This paper presented the prototype of the proposed signage system and execution time to find the route with future research directions. The proposed system provides a natural intelligent evacuation route interface for self or remote operation in facility management to efficiently GUIDE people to the safe exit under emergency conditions.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.1-4
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• 2010

We investigated a linear carbon nanotube motor serving as the key building block for nano-scale motion control by using molecular dynamics simulations. This linear nano-motor, is based on the electrostatically telescoping multi-walled carbon-nanotube with ultralow intershell sliding friction, is controlled by the gate potential with the capacitance feedback sensing. The resonant harmonic peaks are induced by the interference between the driving frequencies and its self-frequency. The temperature is very important factor to operate this nanomotor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1160-1163
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• 1999

In this study, we developed FE-tip lithography system that could apply to multi-tip system and did lithography using FE-tip. The software that control FE-tip lithography system, was proposed for acquiring more adaptive data to compensate the effect of fluctuation. We found that the fluctuation effect was reduced. The minimum line width was related to applied voltage and we observed a movement of Z-axis piezo stage to correct the error of this system. When FE current was 5nA, scanning speed was $3{\mu}m/sec$ and applied voltage was 200V, we made a line pattern which had minimum line width of 614 nm. If we reduce applied voltage to several decades and increase scanning speed to $20{\mu}m/sec$, it is possible to set the minimum line width of 100 nm. The proposed system can be easily applied to multi FE-tip lithography system.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.13-17
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• 2002