• 한국입자에어로졸학회지
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• 제9권4호
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• pp.221-230
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• 2013

We demonstrated the efficacy of magnetic nanoparticles (MNPs) produced from a low grade iron ore as an adsorbent for the removal of Cr(VI), a toxic heavy metal anion present in wastewater. The adsorption of Cr(VI) by these MNPs strongly depended on the dosage of MNPs, the initial concentration of the Cr(VI) solutions, and pH. The highest Cr(VI) adsorption efficiency of 22.0 mg/g was observed at pH 2.5. The adsorption data were best fit with the Langmuir isotherm and corresponded to a pseudo-second-order kinetic model. The used adsorbent was regenerated by eluting in highly alkaline solutions. Sodium bicarbonate showed the highest desorption efficiency of 83.1% among various eluents including NaOH, $Na_2HPO_4$, and $Na_2CO_3$. Due to the high adsorption capacity, the simple magnetic separation, and the high desorption efficiency, this nano-adsorbent produced from inexpensive and abundant resources may attract the attention of the industries to apply for removing various metal anionic contaminants from wastewater.

• 한국입자에어로졸학회지
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• 제11권4호
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• pp.93-98
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• 2015

Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.

• 한국입자에어로졸학회지
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• 제8권1호
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• pp.37-43
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• 2012

In this study, we designed a 'spark in liquid' system. The spark discharge between two electrodes were used to generate particles by using sufficient temperature to evaporate a part of electrodes. The power supply system provides a continuous spark discharge by discharging of the capacitor to ionize the electrodes in liquid. The DC spark discharge system operates with 1-10 kV voltage. Processed copper and graphite rods were used to both electrodes with 1-3 mm diameter. There are several variables which can control the particle size and concentration such as gap distance between electrodes, applied voltage, operating liquid temperature, electrode type and liquid type. So we controlled these variables to confirm the change of particle size distribution and concentration of particles contained in liquid as wt%. 'spark in liquid' system is expected to apply nanoink by control of concentration with analysis of characteristics.

• 한국입자에어로졸학회지
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• 제13권2호
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• 한국입자에어로졸학회지
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• 제17권3호
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• pp.71-79
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• 2021

Ultrafine dust, which is emitted from industrial factories or all kinds of vehicles, threatens the human's respiratory system and our environment. In this regard, separating airborne particles is essential to mitigate the severe problem. In this work, an axial cyclone for the effective technology of eliminating harmful dust is investigated by numerical simulation using Ansys 2020, Fluent R2. In addition, the optimized structure of the cyclone is constructed by means of multi objective optimization based on the response surface method which is a representative method to analyze the effect of design parameter on response variables. Among several design parameters, the modified length of the vortex finder and dust collector is a main point in promoting the performance of the axial cyclone. As a result, the optimized cyclone exhibits remarkable performance when compared to the original model, resulting in pressure drop of 307 Pa and separator efficiency of 98.5%.

• 한국결정성장학회지
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• 제28권1호
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• pp.14-20
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• 2018

에어로졸 증착법에 의해서 상온에서 $6{\mu}m/min$의 속도로 $5{\sim}10{\mu}m$ 두께의 PZT-PZN(0 %, 20 %, 40 %) 복합체의 막을 실리콘/사파이어 기판위에서 제조하였다. 에어로졸 증착에 사용된 PZT, 2PZN-8PZT, 4PZN-6PZT 초기분말입자는 불규칙한 형상을 가지고 있으며 submicron 크기임을 확인하였다. 증착된 막은 어떠한 뜯김이나 기공도 없는 치밀한 막임을 확인하였고 나노크기의 입자를 가진 페로브스카이트 단상이었다. 실리콘기판 및 사파이어 기판위에서 증착된 막은 전기로에서 $700^{\circ}C$ 및 $900^{\circ}C$에서 각각 어닐링처리 하였으며 PZT에 40 %의 PZN이 첨가된 조성의 막의 경우 pyrochlore의 2차상이 형성되었다. 미세구조에 미치는 PZN 첨가의 영향을 관찰하기 위해 FE-SEM 및 HR-TEM이 사용되었다.

• 한국세라믹학회지
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• 제45권7호
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• pp.411-417
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• 2008

Aerosol Deposition Method (ADM) is a novel technique to grow ceramic thick films with high density and nano-crystal structure at room temperature. $^{1,2)}$ For these unique advantages of ADM, it would be applied to the fabrication process of 3-D integration ceramic modules effectively. However, it is critical to control the properties of starting powders, because a film formation through ADM is achieved by impaction and consolidation of starting powders on the substrates. We fabricated alumina thick films by ADM for the application to integral substrates for RF modules. When the as-received alumina powders were used as a starting material without any treatments, it was observed that the dielectric properties of as-deposited alumina films, such as relative permittivity and loss tangent, showed high dependency on the frequency. In this study, some techniques of powder pre-treatments to improve the dielectric properties of alumina thick films will be shown and the effects of starting powders on the properties of AD films will be discussed.

• 한국재료학회지
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• 제29권11호
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• pp.684-689
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• 2019

Single crystals, which have complexed composition, are fabricated by solid state grain growth. However, it is hard to achieve stable properties in a single crystal due to trapped pores. Aerosol deposition (AD) is suitable for fabrication of single crystals with stable properties because this process can make a high density coating layer. Because of their unique features (nano sized grains, stress inner site), it is hard to fabricate single crystals, and so studies of grain growth behavior of AD film are essential. In this study, a $BaTiO_3$ coating layer with ${\sim}9{\mu}m$ thickness is fabricated using an aerosol deposition method on (100) and (110) cut $SrTiO_3$ single crystal substrates, which are adopted as seeds for grain growth. Each specimen is heat-treated at various conditions (900, 1,100, and $1,300^{\circ}C$ for 5 h). $BaTiO_3$ layer shows different growth behavior and X-ray diffraction depending on cutting direction of $SrTiO_3$ seed. Rectangular pillars at $SrTiO_3$ (100) and laminating thin plates at $SrTiO_3$ (110), respectively, are observed.

• 대한기계학회논문집B
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• 제27권12호
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• pp.1734-1743
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• 2003

Aerosol generator using an electrically heated tube furnace is a stable apparatus to supply nanometer sized aerosols by using the evaporation and condensation processes. Using this method, we can generate highly concentrated polydisperse aerosols with relatively narrow size distribution. In this work, characteristics of particle size distribution, generated from a tube furnace, were experimentally investigated. We evaluated effects of several operation parameters on particle generation: temperature in the tube furnace, air flow rates through the tube, size of boat containing solid sodium chloride(NaCl). As the temperature increased, the geometric mean diameter increased and the total number concentration also increased. Dilution with air affected the size distribution of the particles due to coagulation. A smaller sized boat, which has small surface area to contact with air, brings smaller particles of narrow size distribution in comparison of that of a larger boat. Finally, we changed the electrical mobility diameter of aggregate sodium chloride particles by varying relative humidity of dilution air, and obtained non-aggregate sodium chloride particles, which are easy to generate exact monodisperse particles.

• 한국세라믹학회지
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• 제41권4호
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• pp.297-301
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• 2004

분무연소합성법을 이용하여 나노크기의 물라이트(3Al$_2$O$_3$$.$2SiO$_2$) 콜로이드를 제조하였다. 연소반응을 위한 산화제로서 Al(NO$_3$)$_3$$.$9$H_2O$와 환원제(연료)로서 CH$_{6}$N$_4$O를 사용하였으며, 실리카 소스로서 콜로이드 실리카를 첨가하였다. 분무된 액적들의 착화를 위해 연소반응기의 온도를 80$0^{\circ}C$로 유지하였다. 액적의 응고에 의한 액적크기 성장을 억제하기 위하여 금속 스크린 필터를 사용함으로써 액적의 개수 농도를 감소시켰으며, 에어로졸 입자의 체류시간을 2.5초로 유지하여 열 유체의 흐름을 층류로 유도하였다. 제조된 입자들의 모양은 모두 구형이었으며, 평균입자크기는 130nm이었다 XRD와 TEM 분석 결과 각각의 초미립자들은 정량화합물의 물라이트 결정성을 나타내었다.