• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2242-2244
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• 2000

시분할 다중화 방식을 이용한 정전 구동형 XY 스테이지의 새로운 위치 검출 방법을 제안한다. 각축의 고정자에 90도의 위상차를 가지는 여기(excitation) 신호를 주입하여 스테이지와 연결된 1개의 charge amplifier와 S/H를 이용하여 x축과 y축 방향의 위치를 검출한다. charge amplifier의 파라미터는 DC 이득이 크고 또한 신호간 간섭이 발생하지 않도록 설정한다. 제안된 방법은 XY 스테이지의 디지털 서보 제어기의 구성요소인 S/H를 사용하기 때문에 기존의 방식과는 달리 위치 신호의 검출이 안정적이고 반송 신호에 의한 고조파 왜곡과 복조 과정에서 발생되는 지연을 현저히 줄일 수 있으며 간단하게 구현할 수 있다.

• Computers and Concrete
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• v.10 no.1
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• pp.49-57
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• 2012

Nano-particle-reinforced cement mortars have been the basis of research in recent years and a significant growth is expected in the future. Therefore, optimization and quantification of the effect of processing parameters and mixture ingredients on the performance of cement mortars are quite important. In this work, the effects of nano-silica, water/binder ratio, sand/binder ratio and aging (curing) time on the compressive strength of cement mortars were modeled by means of artificial neural network (ANN). The developed model can be conveniently used as a rough estimate at the stage of mix design in order to produce high quality and economical cement mortars.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.1-4
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• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• Asia-Pacific Journal of Business Venturing and Entrepreneurship
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• v.16 no.6
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• pp.85-105
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• 2021

In this study, a case study was conducted on Advanced Nano Products Co.,Ltd, a company that was established in 2000 and has the core technology to produce and commercialize nano materials and ultrafine nano powders based on nano technology. Deviating from the general case study, a case study analysis frame was set based on the theory of technology management and industry-university cooperation theory, and cases were analyzed. In this case study, Advanced Nano Products Co.,Ltd. was analyzed from two analytical perspectives: the establishment of a Management Of Technology system within the company and the Industry-Academic Cooperation activity. Based on this theoretical-based analysis framework, company visit interviews and related data research and analysis were conducted. As a result of the study of the case company, it was possible to derive how the technology management and industry-university cooperation affect the growth stage of the company as follows. First, the strategic use of technology management is an important factor in strengthening the competitive advantage and core competencies of venture companies, and for survival and growth of startups in the early stages. Second, strategic use of technology management and patents and establishment of a patent management system are a part of business strategy and play a pivotal role in corporate performance. Third, the human and material infrastructure of universities affects the growth of companies in the early stage of start-up, and the high utilization of industry-university cooperation promotes the growth of companies. Fourth, continuous industry-academic cooperation activities in the growth and maturity stages of a company's growth stage are the basis for activating external exchanges and building networks. Lastly, technology management and industry-university cooperation were found to be growth factors for each growth stage of a company. In order for a company to develop continuously from the start-up to the growth and maturity stages, it is necessary to establish a technology management system from the beginning and promote strategic technology management activities. In addition, it can be said that it is important to carry out various industry-academic cooperation activities outside the company. As a result of the case analysis, it was found that Advanced Nano Products Co.,Ltd, which performed these two major activities well, overcame the crisis step by step and continued to grow until now. This study shows how the use of technology management and industry-academic cooperation creates value in each growth stage of technology-based venture companies. In addition, its active use will play a big role in the growth of other venture companies. The results of this case study can be a valid reference for growth research of technology start-up venture companies and related field application and utilization.

• Elastomers and Composites
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• v.50 no.4
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• pp.292-296
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• 2015

Biomimetic artificial basilar membrane being a core part of artificial cochlear requires performance evaluation through aging test. To evaluate the aging properties of PVDF piezoelectric membrane used for artificial basilar membrane, its mechanical properties such as tensile strength and elastic modulus and piezoelectric property such as piezoelectric constant were measured. The aging test conditions and acceleration constants were calculated based on Arrhenius model. The changes in tensile strengths and elastic moduli measured were less than 10~20% after aging test equivalent for 10 years. The piezoelectric constants were decreased drastically to 80% of its initial value in the early stage of the aging test and expected to decrease slowly down to 65% over 10 years. The experimental results show the reliability of totally implantable novel artificial cochlear and will contribute its commercialization.

• Journal of the Semiconductor & Display Technology
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• v.10 no.2
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• pp.73-81
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• 2011

We manufactured the inkjet printing system for the application into the nano Ag finger line interconnection process in Si solar cells. The home-made inkjet printer consists of motion part for XY motion stage with optical table, head part, power and control part in the rack box with pump, and ink supply part for the connection of pump-tube-sub ink tanknozzle. The ink jet printing system has been used to conduct the interconnection process of finger lines on Si solar cell. The nano ink includes the 50 nm-diameter. Ag nano particles and the viscosity is 14.4 cP at $22^{\circ}C$. After processing of inkjet printing on the finger lines of Si solar cell, the nano particles were measured by scanning electron microscope. After the heat treatment at $850^{\circ}C$, the finger lines showed the smooth surface morphology without micropores.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.453-458
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• 2004

A capacitate sensor is a proper device for measuring high small displacement. General design parameters and procedure are discussed and a test sensor was built to have a measuring range of 100$\mu\textrm{m}$ and a sensitivity about 30nm. This sensor has too opposing electrode of comparably large area and has nominal gap distance about 150$\mu\textrm{m}$. So as to achieve a nano order displacement sensitivity, both sensor and target system have to be considered. This is important for the sensitivity can be achieved by minimizing a system total noise level in electronic type sensor application. Typical performance of the developed sensor is demonstrated in precision moving stage having 0.1$\mu\textrm{m}$ moving resolution.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.3
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• pp.88-95
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• 2007

Generally, the integrated system using ion beam consists of 4 major parts, which are SEM, FIB, nano stage, and chamber. Among them, the nano stage and the chamber are designed and manufactured. The whole systems are integrated. Also, FE models are built to perform modal analyses of each part and the whole integrated system with a commercial program. Through these analyses, it is found that each part and the integrated system are very safe against vibrations including external excitations from ground and any others, because their natural frequencies are much larger than frequencies of external excitations. Also, isolation of ground induced vibration is considered.