• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.252-255
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• 2004

반도체는 high integrated, high speed, low power를 위하여 design 뿐만 아니라 재료 측면에서도 많은 변화를 가져오고 있으며, RC delay time을 줄이기 위하여 Al 배선보다 비저항이 낮은 Cu와 low-k material 적용이 그 대표적인 예이다. 그러나, Cu 배선의 경우 dry etching이 어려우므로, 기존의 공정으로는 그 한계를 가지므로 damascene 또는 dual damascene 공정이 소개, 적용되고 있다. Damascene 공정은 절연막에 photo와 RIE 공정을 이용하여 trench를 형성시킨 후 electrochemical plating 공정을 이용하여 trench에 Cu를 filling 시킨다. 이후 CMP 공정을 이용하여 절연막 위의 Cu와 barrier material을 제거함으로서 Cu 배선을 형성하게 된다. Dual damascene 공정은 trench와 via를 동시에 형성시키는 기술로 현재 대부분의 Cu 배선 공정에 적용되고 있다. Cu CMP는 기존의 metal CMP와 마찬가지로 oxidizer를 이용한 Cu film의 화학반응과 연마 입자의 기계가공이 기본 메커니즘이다. Cu CMP에서 backside pressure 영향이 uniformity에 미치는 영향을 살펴보았으며, electrochemical plating 공정에서 발생하는 hump가 CMP 결과에 미치는 영향과 dishing 결과를 통하여 그 영향을 평가하였다.

• Journal of the korean academy of Pediatric Dentistry
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• v.37 no.1
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• pp.24-34
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• 2010

The aim of this study was to evaluate the effect of incorporated nano HA on the demineralization resistance and bonding strength of LC GIC in comparison with micro HA. Fuji II LC GIC was used as the control group and a base material for experimental groups. Two experimental groups were prepared. One was prepared by adding 15% micro HA to LC GIC by weight ratio (Exp. 1), and the other was prepared by adding 15% nano HA instead (Exp. 2). According to the results, the following conclusions could be obtained. 1. Observing under the CLSM, the control group showed thicker enamel demineralization layer than in the experimental groups, and the Exp. 2 group showed the thinnest demineralization layer. 2. In SEM analysis, there was greater enamel demineralization in the control group. The Exp. 2 group was more resistant to demineralization compared to the Exp. 1 group. 3. The bonding strength was found to be in the increasing order of control, Exp. 1, and Exp. 2 group (p < 0.05). 4. Observing the fractured surfaces under SEM after the bonding strength test was performed, there were bone-like apatite particles formed in HA-added experimental groups, and a greater number of bone-like apatite particles were formed in the Exp. 2 group compared to the Exp. 1 group.

• Resources Recycling
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• v.26 no.3
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• pp.79-91
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• 2017

The core of Hydrogen Fuel Cell Vehicles (FCV) is polymer solid fuel cell (PEFC), and the core material that generates electrochemical electricity in the cell is platinum catalyst. Platinum is localized in South Africa and Russia, and the world production of Pt is about 178 tons per year, which is expensive and recycled. At present, the amount of Pt used in PEFC is $0.2{\sim}0.1mg/cm^2$. In order to reduce the price of the battery and increase the FCV supply, the target is to reduce the amount of Pt used to $0.05{\sim}0.03mg/cm^2$. $Pt-Pd/Al_2O_3$, Pt/C, Pt/GCB, Pt/Au/C, PtCo/C, PtPd/C, etc. by using polyol method using nano Pt, improved Cu-UPD/Pt substitution method and nano-capsule method, Have been researched and developed, and there have been reported techniques for improving the activity of Pt catalysts and stabilizing them. This paper investigates the production technology of nano-Pt and nano-Pt catalysts, recycling of spent Pt catalysts and application trends of Pt catalysts.

• Proceedings of the Korean Fiber Society Conference
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• 2003.04a
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• pp.52-55
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• 2003

Poly (ethylene 2, 6-naphthalate) (PEN) has been used for a high performance engineering plastics such as fiber, film, and packaging, because of excellent physical properties and outstanding gas barrier characteristics [1-2]. However, the application of PEN is limited because PEN exhibits a relatively high melt viscosity. Recently, many researches for organic/inorganic composites by applying nano-particles to the polymer matrix have been carried out [3], and the nano-particles exhibited greatly improved mechanical and rheological properties [4]. (omitted)

• 한국연소학회:학술대회논문집
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• 2014.11a
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• pp.95-96
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• 2014

In this study, the nano-particle emitted from Gasoline Direct Injection(GDI) vehicles was measured using the Engine Exhaust Particle Sizer(EEPS) on a chassis dynamometer. In addition, driving mode were divided into cold start mode(CVS-75, NEDC) and hot start mode(NIER-6, NIER-9) to evaluated the characteristics in the various operating conditions. The Particle Number(PN) concentration was analyzed for various driving patterns, i.e., acceleration, deceleration, idling, cruising and the phases of mode. In a result, Total concentration of PN for size was concentrated from 50 to 100 nm and acceleration represents the highest concentration among the driving pattern. It is believed that the increases quantity of fuel, and mixture will be richer than other patterns.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.98-98
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• 2010

A epoxy/multilayered silicate nanocomposite was prepared by a new AC electric application method and micro silica particle was poured into the nanocomposite in order to prepare epoxy/micro-and-nano- mixed composites (EMNC). Electric insulation breakdown strength was measured in a sphere-sphere electrode system designed for the prevention of edge breakdown and the data were estimated by Weibull plot. As the exfoliated silicate nano-plates were homogeniously dispersed in the micro silica particles, the insulation property was higher.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.84-84
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• 2010

Nano particles (10nm SiO2) were silane-treated in order to modify the surface characteristics in a epoxy nanocomposite. Then. micro particles ($3{\mu}m$ SiO2) were poured into the epoxy nanocomposite using various mixing process and epoxy/ micro-and-nano- mixed composites (EMNC) were prepared. The thermal (Tg) and mechanical (tensile and flexural strength) properties were measured by DMA and UTM and the data was estimated by Weibull plot.

• 유체기계공업학회:학술대회논문집
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• 2006.08a
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• pp.145-146
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• 2006

Recently, the next-generation advanced flow visualization techniques such as holographic PIV, dynamic PIV, echo-PIV, micro/nano-PIV, and X-ray PIV have been introduced. These advanced measurement techniques have a big potential as the core technology for analyzing outmost thermo-fluid flows in future. These would be indispensable in solving complicated thermo-fluid flow problems not only in the industrial fields such as automotive, space, electronics, aero- and hydro-dynamics, steel, and information engineering, but also in the research fields of medical science, bio-medical engineering, environmental and energy engineering etc. Especially, NT (Nano Technology) and BT (Bio Technology) strongly demand these advanced measurement techniques, because it is impossible for conventional measurement methods to observe most complicated nano- and bio-fluidic phenomena. In this presentation, the basic principle of these high-tech flow visualization techniques and their practical applications which cannot be resolved by conventional methods, such as blood flows in a micro-tube, in vivo analysis of micro-circulation, and flow around a living body will be introduced as a blue ocean strategy.

• Journal of the Korean Society of Visualization
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• v.8 no.4
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• pp.31-37
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• 2010

In this study, a novel hybrid micro/nano PIV system combining defocusing and TIRFM technique has been developed for the multiscale flow measurement. With the developed system, both far and near field velocity fields have been measured simultaneously in a 2D straight microchannel and the particle trajectories were extracted by the nearest tracking algorithm. The shear rate values taken from experimental results have been estimated by comparing with the analytical solution of 2D Poiseuille flow and it is confirmed that the result shows good agreement with the theoretical value.

• Journal of the Korean Society of Visualization
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• v.4 no.2
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• pp.3-5
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• 2006

Recently, the next-generation advanced flow visualization techniques such as holographic PIV, aynni.c PIV, echo-PIV, micro/nano-PIV, and X-ray PIV have been introduced. These advanced mea-surement techniques have a big potential as the core technology for analyzing outmost thermo-fluid flows in future. They would be indispensable in solving complicated thermo-fluid flow problems not only in industrial fields such as automotive, space, electronics, aero- and hydro-dynamics. steel, and information engineering, but also in the research fields of medical science, bio-medical engineering, environmental and energy technology etc. Especially, NT (Nano Technology) and BT (Bio Technology) strongly demand these advanced measurement techniques, because it is impossible for conventional measurement methods to observe the nano- and bio-fluidic flow phenomena. In this article, the basic principle of these high-tech flow visualization techniques and their practical applications which cannot be resolved by conventional methods, such as blood flows in a micro-tube, in vivo analysis of micro-circulation, and flow around a living body are introduced as a blue ocean strategy.