• 제목/요약/키워드: NOx gas sensor

검색결과 47건 처리시간 0.023초

Effect of Substrate Temperature and Post-Annealing on Structural and Electrical Properties of ZnO Thin Films for Gas Sensor Applications

  • 도강민;김지홍;노지형;이경주;문성준;김재원;박재호;조슬기;신주홍;여인형;문병무;구상모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.105-105
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    • 2011
  • ZnO is a promising material since it could be applied to many fields such as solar cells, laser diodes, thin films transistors and gas sensors. ZnO has a wide and direct band gap for about 3.37 eV at room temperature and a high exciton binding energy of 60 meV. In particular, ZnO features high sensitivity to toxic and combustible gas such as CO, NOX, so on. The development of gas sensors to monitor the toxic and combustible gases is imperative due to the concerns for enviromental pollution and the safety requirements for the industry. In this study, we investigated the effect of substrate temperature and post-annealing on structural and electrical properties of ZnO thin films. ZnO thin films were deposited by pulsed laser deposition (PLD) at various temperatures at from room temperature to $600^{\circ}C$. After that, post-annealing were performed at $600^{\circ}C$. To inspect the structural properties of the deposited ZnO thin films, X-ray diffraction (XRD) was carried out. For gas sensors, the morphology of the films is dominant factor since it is deeply related with the film surface area. Therefore, the atomic force microscopy (AFM) and field emission scanning electron microscopy (FE-SEM) were used to observe the surface of the ZnO thin films. Furthermore, we analyzed the electrical properties by using a Hall measurement system.

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Thermal Evaporation법에 의해 제조된 WO3 박막과 NiO-WO3박막의 전기적 특성에 관한 연구 (A Study On the Electrical Characteristic of WO3 and NiO-WO3 Thin Films Prepared by Thermal Evaporation)

  • 나은영;나동명;박진성
    • 전기화학회지
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    • 제8권1호
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    • pp.32-36
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    • 2005
  • 본 연구는 $WO_3$ 박막과 $NiO-WO_3$ 박막을 고진공 저항가열식 thermal evaporation 법으로 (100) n형의 실리콘 단결정 기판 위에 증착시켰고, 막의 결정성 증진을 위하여 공기 중 $500^{\circ}C$에서 30분 동안 열처리하였다. 박막의 결정성 및 결정구조를 분석하기 위해서 X선 회절분석기를 사용하였고, 표면 및 단면 관찰을 위해서는 주사전자현미경을 이용하였다. 그리고 화학 조성 결합에너지는 XPS를 이용하였다. 순수 $WO_3$ 박막의 결정 크기는 $500^{\circ}C$에서 30분 동안 공기중 열처리에 의해서 $0.6{\mu}m$로 성장하였고 $WO_3$ 박막의 두께가 증가할수록 거의 변화 없이 일정하였다. 반면, NiO가 첨가된 $WO_3$ 박막 두께별 결정크기는 각각 $0.12{\mu}m,\;0.28{\mu}m,\;0.32{\mu}m$$0.43{\mu}m$로 순수 $WO_3$ 박막에 비해 치밀한 표면을 형성하였고, 최대 5배정도 성장이 억제되었다. 가스감도 측정은 대기 중에서의 센서 저항 값을 기준으로 측정가스 저항 값의 비율 $(R_{NOx}/R_{air})$로 가스감도를 나타내었다. 전기적 성질은 MFC로 NOx가스 5ppm을 일정히 유지시켰고, Multimeter로 계측하여 컴퓨터에 자동 계측되는 시스템을 사용하였다. 순수 $WO_3$박막보다는 $NiO-WO_3$ 박막이 우수한 NOx 감도특성을 보였고 센서의 작동온도는 $250^{\circ}C$에서 우수한 감도를 나타내었다.

NDIR 검출기를 이용하는 대기오염 측정시스템을 위한 미세신호 검출 알고리즘 (Minute Signal Detection Algorithm for Air-pollution Measurement System with The NDIR Detector)

  • 최훈;김현호;황병한;임용석;류근택;배현덕
    • 전자공학회논문지 IE
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    • 제45권3호
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    • pp.27-35
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    • 2008
  • 본 논문은 다중 가스 필터 휠 (multi gas filter correlation wheel: multi GFC wheel)을 갖는 비분산 적외선법(NDIR method : non-dispersive infrared method)을 이용하여 대기 중 다종환경오염물질(CO, $SO_2$, NOx 등)을 동시에 실시간 측정할 수 있는 광학분석장치 개발을 위한 미세신호 검출 알고리즘을 제안한다. MCT(mercury cadmium telluride) 센서를 통해 측정된 각각의 환경오염물질의 미세신호는 고유한 NDIR 흡수 특성을 갖는다. 제안한 방법은 임계값과 하나의 외부 동기신호를 사용하여 연속적으로 측정된 신호로부터 각각의 오염물질 특정농도에 해당하는 데이터를 분리 검출한다.

HCCI 엔진에서 엔진성능 및 배출에 미치는 EGR의 영향 (A Study on the Effects of EGR on Engine Performance and Emissions of a HCCI(Homogeneous Charge Compression Ignition) Engine)

  • 한성빈;장용훈
    • 대한기계학회논문집B
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    • 제27권11호
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    • pp.1630-1636
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    • 2003
  • Automobile companies and research institutions in leading automobile-manufacturing nations have recently been very active with research regarding the HCCI engine for use in future vehicles. Because HCCI engines take advantage of high compression ratio and heat release rate, they exhibit high efficiency found in compression ignition engines. HCCI engines also utilize a lean air/fuel ratio resulting in low emissions of NO$_{x}$ and PM (particulate matter). The objective of this research is to determine the effects of EGR rate on the combustion processes of HCCI. for this purpose, a 4-cylinder, compression ignition engine was converted into a HCCI engine, and a heating device was installed to raise the temperature of the intake air and also to make it more consistent. In addition, a pressure sensor was inserted into each of the cylinders to investigate the differences in characteristics among the cylinders. The experimental study of the effects of EGR rate on various gas emissions, engine performance, etc. should prove to be a valuable source of information for the development of the HCCI engine.e.

Pd 도핑에 따른 $SnO_2$ 나노선 가스센서의 감도 특성 개선 (The Improvement of Sensitivity Characteristics of Pd doped $SnO_2$ Nanowire Gas Sensor)

  • 김연우;권순일;박승범;이석진;정태환;양계준;임동건;박재환;김홍오
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.160-161
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    • 2008
  • $SnO_2$는 n형 반도체로써 3.6 eV의 큰 밴드갭을 가지는 물질로 CO와 NOx 가스에 좋은 감도를 나타내는 것으로 보고되고 있다. 문헌에 따른 일반적인 $SnO_2$ 가스센서는 후막이나 벌크형태로 제작되었다. 근래에는 가스감응체가 $SnO_2$ 나노선 형태인 가스센서가 활발한 연구 중에 있다. 본 논문에서는 기판 위에 서로 분리된 전극 패턴에 Au를 촉매로 하여 네트워크 구조로 된 $SnO_2$ 나노선이 합성되었다. 제작된 가스센서에 Pd 도핑에 따른 영향을 알아보기 위하여 1.8 mM의 Pd 용액 ($PdCl_2{\cdot}xH_2O$ 3 mg + $H_2O$ 10 ml)을 이용하여 센서에 도핑하였다. 측정 시스템에서 $NO_2$ 가스에 대한 센서의 특성을 분석한 결과 도핑하지 않은 $SnO_2$ 센서보다 20%정도의 감도가 개선되었다.

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가솔린, LPG, 디젤 차량에서 윤활유에 따른 배출가스 및 입자상물질 (Exhaust Gas Emission and Particulate Matter (PM) from Gasoline, LPG and Diesel Vehicle Using Different Engine Oil)

  • 장진영;이영재;권오석;우영민;조종표;김강출;표영덕;이민섭
    • 한국자동차공학회논문집
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    • 제24권2호
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    • pp.144-151
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    • 2016
  • This study effect of engine oils on regulated fuel economy and emissions including particulate matter (PM) to provide basic data for management of engine oil in vehicles. Three engine oils (Group III base oil, Group III genuine oil with additive package and synthetic oil with poly alpha olefins (PAOs)) were used in one gasoline, one LPG(liquefied petroleum gas) and two diesel vehicles. In the case of diesel vehicles, one is a diesel vehicle without DPF (diesel particulate filter) other is a diesel vehicle with DPF. In this study, the US EPA emission test cycle FTP-75, representing city driving, was used. HORIBA, PIERBURG, and AVL gas analyzers were used to measure the fuel economy and regulated emissions such as CO, NOx, and THC. The number of PM was measured using a PPS (pegasor particle sensor). And, the shape of PMs was analyzed by SEM (scanning electron microscope). The effects of oil type on fuel economy, exhaust gas, and PM were not significant because engine oil consumption by evaporation and combustion in the cylinder is very tiny. Fuel and vehicle type were dominant factors in fuel economy and emissions. HC emission from gasoline vehicles was higher than that from other vehicles and NOx emission from diesel vehicles was higher than that from other vehicles. The number of PM was not affected by the engine oil, but by the driving pattern and fuel. The shapes of the PM, sampled from each vehicle using any test engine oil, were similar.

LPG 엔진에서 수소첨가에 따른 배기 성능과 열효율에 미치는 영향 (Effects of hydrogen-enriched LPG fuelled engine on exhaust emission and thermal efficiency)

  • Kim, jinho;Cho, unglae;Choi, gyeungho
    • 한국수소및신에너지학회논문집
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    • 제12권3호
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    • pp.169-176
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    • 2001
  • The purpose of study is to obtain low-emission and high-efficiency in LPG engine with hydrogen enrichment. The test engine was named heavy-duty variable compression ratio single cylinder engine (VCSCE). The fuel supply system provides LPG/hydrogen mixtures based on same heating value. Various sensors such as crank shaft position sensor (CPS) and hall sensor supply spark timing data to ignition controller. Displacement of VCSCE is $1858.2cm^3$. VCSCE was runned 1400rpm with compression ratio 8. Spark timing was set MBT without knocking. Relative air-fuel ratio(${\lambda}$) of this work was varied between 0.76 and 1.5. As a result, i) Maximum thermal efficiency occurred at ${\lambda}$ value 1.0. It was shown that thermal efficiency was increased approximately 5% with hydrogen enrichment at same ${\lambda}$ value. ii) Engine-out carbon monoxide (CO) emissions were decreased at a great rate under LPG/hydrogen mixture fuelling. iii) Total hydrocarbon (THC) emission was much exhausted in rich zone, same as CO. But THC was exhausted a little bit more in lean zone. iv) Finally, engine-out oxides of nitrogen (NOx) was increased with ${\lambda}$ value 1.0 zone at a greater rate with hydrogen enrichment due to high adiabatic flame temperature.

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