• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2000년도 하계학술대회 논문집
• /
• pp.924-926
• /
• 2000

The nitrogen oxides, NO and NO2, abbreviated usually as NOx, emitted from combustion facilities such as power plants and automobiles are the topical air-pollutants causing acid rain and photochemical smog. In order to solve the NOx-related pollution problems effectively, we need efficient techniques to monitor NOx in the combustion exhausts and in environments. Development of solid-state electrochemical devices for detecting NOx is demonstrated based on various combination of solid electrolytes and auxiliary sensing materials. The object of this research is to develop various sensor performance for solid state amperometric sensor, and to test gas sensor performance manufactured. So we try to present a guidance for developing amperometric gas sensor. We concentrated on development of manufacturing process and performance test.

• 한국전기전자재료학회논문지
• /
• 제33권4호
• /
• pp.321-325
• /
• 2020

Atmospheric environmental problems have a major impact on human health and lifestyle. In humans, inhalation of nitrogen oxides causes respiratory diseases, such as bronchitis. In this paper, thermal analysis of a gas sensor was carried out to design and fabricate a wearable nylon-yarn gas sensor for the detection of NO_x gas. In the thermal analysis method, the thermal diffusion process was analyzed while operating the sensors at 40 and 60℃ to secure a temperature range that does not cause thermal runaway due to temperature in the operating environment. Thermal diffusion analysis was performed using the COMSOL software. The thermal analysis results could be useful for analyzing gas adsorption and desorption, as well as the design of gas sensors. The thermal energy diffusion rate increased slightly from 10.05 to 10.1 K/mm as the sensor temperature increased from 40 to 60℃. It was concluded that the sensor could be operated in this temperature range without thermal breakdown.

• ETRI Journal
• /
• 제35권4호
• /
• pp.617-624
• /
• 2013

Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a $NO_2$ or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.

• 센서학회지
• /
• 제30권3호
• /
• pp.175-180
• /
• 2021

In this paper, methods for improving the sensitivity of gas sensors to NO₂ gas are presented. A gas sensor was fabricated based on an SnO₂ nanowire network using the vapor-phase-growth method. In the gas sensor, the Au electrode was replaced with a fluorinedoped tin oxide (FTO) electrode, to achieve high sensitivity at low temperatures and concentrations. The gas sensor with the FTO electrode was more sensitive to NO₂ gas than the sensor with the Au electrode: notably, both sensors were based on typical SnO₂ nanowire network. When the Au electrode was replaced by the FTO electrode, the sensitivity improved, as the contact resistance decreased and the surface-to-volume ratio increased. The morphological features of the fabricated gas sensor were characterized in detail via field-emission scanning electron microscopy and X-ray diffraction analysis.

• 센서학회지
• /
• 제13권4호
• /
• pp.292-297
• /
• 2004

Carbon nanotubes (CNT) were synthesized by arc-discharge method. To fabricate CNT sensor, CNT powder was dispersed in ${\alpha}$-Terpinol($C_{10}H_{17}OH$) solution. The CNT tilms were fabricated by screen printing method on the interdigitated Pt/Pd alloy electrode. The microstructure of CNT film was observed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). In order to investigate the gas sensing characteristics of the film, the CNT film was experimented to measure NO response and recovery time. The CNT sensor with a heater was compared to that without a heater. And this sensor shows better reproductibility and faster recovery time than another CNT sensors. We suggest the possibility to utilize a CNT as new sensing materials for environmental monitoring.

• 한국산학기술학회:학술대회논문집
• /
• 한국산학기술학회 2006년도 춘계학술발표논문집
• /
• pp.223-226
• /
• 2006

The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_2$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_2$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.

• 센서학회지
• /
• 제19권1호
• /
• pp.58-61
• /
• 2010

This paper describes the fabrication and characteristics of NO sensor using ZnO thin film by RF magnetron sputter system. The sensitivity, working temperature, and response time of sputtered pure ZnO thin film and added catalysts such as Pt, Pd, Al, Ti on those films were measured and analyzed. The sensitivity of pure ZnO thin film at working temperature of $300^{\circ}C$ is 0.875 in NO gas concentration of 0.046 ppm. At same volume of the gas in chamber, measuring sensitivity of 1.87 at $250^{\circ}C$ was the case of Pt/ZnO thin film. The ZnO thin films added with catalyst materials were showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film.

• 대한기계학회논문집B
• /
• 제30권6호
• /
• pp.531-537
• /
• 2006

A lever type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.

• 한국재료학회지
• /
• 제20권11호
• /
• pp.623-627
• /
• 2010

Semiconducting metal oxides have been frequently used as gas sensing materials. While zinc oxide is a popular material for such applications, structures such as nanowires, nanorods and nanotubes, due to their large surface area, are natural candidates for use as gas sensors of higher sensitivity. The compound ZnO has been studied, due to its chemical and thermal stability, for use as an n-type semiconducting gas sensor. ZnO has a large exciton binding energy and a large bandgap energy at room temperature. Also, ZnO is sensitive to toxic and combustible gases. The NO gas properties of zinc oxide-single wall carbon nanotube (ZnO-SWCNT) composites were investigated. Fabrication includes the deposition of porous SWCNTs on thermally oxidized $SiO_2$ substrates followed by sputter deposition of Zn and thermal oxidation at $400^{\circ}C$ in oxygen. The Zn films were controlled to 50 nm thicknesses. The effects of microstructure and gas sensing properties were studied for process optimization through comparison of ZnO-SWCNT composites with ZnO film. The basic sensor response behavior to 10 ppm NO gas were checked at different operation temperatures in the range of $150-300^{\circ}C$. The highest sensor responses were observed at $300^{\circ}C$ in ZnO film and $250^{\circ}C$ in ZnO-SWCNT composites. The ZnO-SWCNT composite sensor showed a sensor response (~1300%) five times higher than that of pure ZnO thin film sensors at an operation temperature of $250^{\circ}C$.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 하계학술대회 논문집
• /
• pp.1073-1075
• /
• 2001

The nitrogen oxides, NO and NO2, abbreviated usually as NOx, emitted from combustion facilities such as power plants and automobiles are the typical air-pollutants causing acid rain and photochemical smog. In order to solve the NOx-related pollution problems effectively, we need efficient techniques to monitor NOx in the combustion exhausts and in environments. Development of solid-state electrochemical devices for detecting NOx is demonstrated based on various combination of solid electrolytes and auxiliary sensing materials. The object of this research is to develop various sensor performance for solid state amperometric sensor, and to test gas sensor performance manufactured. So we try to present a guidance for developing amperometric gas sensor. We concentrated on development of manufacturing process and performance test.