• 제목/요약/키워드: Mutilayed film

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EMP시뮬레이션을 활용한 Sb2O3/Na3AlF6/Sb2O3/Cr 다층박막의 광 특성 (The Optical Properties of Sb2O3/Na3AlF6/Sb2O3/Cr Multi Layered Thin Films by EMP Simulation)

  • 김준식;장건익
    • 한국전기전자재료학회논문지
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    • 제21권4호
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    • pp.376-380
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    • 2008
  • The optical properties of multi layered thin films with $Sb_2O_3/Na_3AlF_6/Sb_2O_3/Cr$ were simulated by using EMP(Essential Macleod Program). EMP is a comprehensive software package to design and analyse the optical characteristics of multi-layered thin film. $Sb_2O_3$ and $Na_3AlF_6$ were selected as a high refractive index and low refractive index material respectively. Additionally Cr was chosen as mid reflective material. Optical properties including color effect were systematically studied in terms of different optical thickness of low refractive index material. The optical thickness of $Na_3AlF_6$ was changed as 0.25, 0.5, 0.75 and $1.0\lambda$. The film with 0.25, 0.5, 0.75 and $1.0\lambda$ of optical thickness showed mixed color range between purple and red range, yellowish green and bluish green, purple and mixed color range of green and purple respectively.