• Title/Summary/Keyword: Multilayered Thin Films

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Electrical and structural properties of BNT/BT multilayered thick films (BNT/BT 다층 박막의 구조적, 전기적 특성)

  • Nam, Sung-Pill;Noh, Hyun-Ji;Lee, Sung-Gap;Bea, Seon-Gi;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1324_1325
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    • 2009
  • The heterolayered $BaTiO_3/(Bi_{0.5}Na_{0.5})TiO_3$ thick films were fabricated by screen printing techniques on alumina substrates electrodes with Pt. We report the improved ferroelectric properties in the heterolayered teteragonal/rhombohedral structure composed of the $BaTiO_3$ and the $(Bi_{0.5}Na_{0.5})TiO_3$ thick films. We investigated the effects of deposition conditions on the structural and electrical properties of the heterolayered BNT/BT thick films. The structural and electrical properties of the heterolayered BNT/BT thick films were studied. All PZT heterolayered thin films show dense and homogeneous structure without the presence of the rosette structure. The dielectric constant, loss and remanent polarization oft heheterolayered BNT/BT thick films were superior to those of single composition $BaTiO_3$ and $(Bi_{1/2}Na_{1/2})TiO_3$, and those values for the heterolayered BNT/BT thick films sintered at $1100^{\circ}C$ were 916, 0.79 and $12.63{\mu}C/cm^2$.

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High-temperature Corrosion of CrAlSiN Films in Ar/1%SO2 Gas

  • Lee, Dong Bok;Xiao, Xiao;Hahn, Junhee;Son, Sewon;Yuke, Shi
    • Journal of the Korean institute of surface engineering
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    • v.52 no.5
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    • pp.246-250
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    • 2019
  • Nano-multilayered $Cr_{25.2}Al_{19.5}Si_{4.7}N_{50.5}$ films were deposited on the steel substrate by cathodic arc plasma deposition. They were corroded at $900^{\circ}C$ in $Ar/1%SO_2$ gas in order to study their corrosion behavior in sulfidizing/oxidizing environments. Despite the presence of sulfur in the gaseous environment, the corrosion was governed by oxidation, leading to formation of protective oxides such as $Cr_2O_3$ and ${\alpha}-Al_2O_3$, where Si was dissolved. Iron diffused outward from the substrate to the film surface, and oxidized to $Fe_2O_3$ and $Fe_3O_4$. The films were corrosion-resistant up to 150 h owing to the formation of thin ($Cr_2O_3$ and/or ${\alpha}-Al_2O_3$)-rich oxide layers. However, they failed when corroded at $900^{\circ}C$ for 300 h, resulting in the formation of layered oxide scales due to not only outward diffusion of Cr, Al, Si, Fe and N, but also inward movement of sulfur and oxygen.

Synthesis of PZT thin films made by PZ/PT multi-layered structure (PZ/PT 다층막에 의한 PZT 박막의 제작)

  • Kim, S.D.;Jeon, K.B.;Bae, S.H.;Jin, B.M.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.18 no.3
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    • pp.105-108
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    • 2008
  • Four different thin films were made by depositing PZ and PT in different stacking sequences. PZ and PT phases are preferably co-existed in sample A and C that are annealing after each coatings. The sample B and D, on the other hands, have tendency toward the PZT phase after co-firing the sample. The sample B that started from PT stacking first was more stable PZT phase than that of PZ first sample D.

SOFT MAGNETISM OF Co-Zr AND Fe-Co FILMS WITH LARGE SATURATION MAGNETIZATION

  • Suemitsu, Katsumi;Nakagawa, Shigeki;Naoe, Masahiko
    • Journal of the Korean institute of surface engineering
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    • v.29 no.6
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    • pp.628-633
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    • 1996
  • Large saturation magnetization $4pM_s$ is essentially required for soft magnetic thin layers used in magnetic recording devices. Amorphous Co-based alloys and Fe-Co alloys may be regarded as one of the candidates for soft magnetic materials which possess large $4\piM_s$. Some preparation process to improve soft magnetism of these films were performed in this study. Addition of Ta seemed to be effective to change the magnetostriction constant $\lambda$ from positive value to negative one. The magnetoelastic energy $K_e$ is strongly dependent on $\lambda$. $(Co_{95.7}Zr_{4.3})_{100-x}Ta_x$ films with $K_e$ of negative value have sufficiently soft magnetic characteristics. $Fe_{90}Co_{10}$ alloy exhibits extremely large $4\piM_s$, of about 24 kG. Addition of N and Ta to $Fe_{90}Co_{10}$ films improved the soft magnetism of them. The $Fe_{82.0}Co_{7.6}Ta_{10.4}$:N/Ti multilayered films exhibit better soft magnetic properties and better thermal stability than Fe-Co-Ta:N singlelayer films.

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Fabrication of 3D Multilayered Microfluidic Channel Using Fluorinated Ethylene Propylene Nanoparticle Dispersion (불소화 에틸렌 프로필렌 나노 입자 분산액을 이용한 3차원 다층 미세유체 채널 제작)

  • Min, Kyoung-Ik
    • Korean Chemical Engineering Research
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    • v.59 no.4
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    • pp.639-643
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    • 2021
  • In this study, fluorinated ethylene propylene (FEP) nanoparticle as an adhesive for fabricating a three-dimensional multilayered microfluidic device was studied. The formation of evenly distributed FEP nanoparticles layer with 3 ㎛ in thickness on substrates was achieved by simple spin coating of FEP dispersion solution at 1500 rpm for 30 s. It is confirmed that FEP nanoparticles transformed into a hydrophobic thin film after thermal treatment at 300 ℃ for 1 hour, and fabricated polyimide film-based microfluidic device using FEP nanoparticle was endured pressure up to 2250 psi. Finally, a three-dimensional multilayered microfluidic device composed of 16 microreactors, which are difficult to fabricate with conventional photolithography, was successfully realized by simple one-step alignment of FEP coated nine polyimide films. The developed three-dimensional multilayered microfluidic device has the potential to be a powerful tool such as high-throughput screening, mass production, parallelization, and large-scale microfluidic integration for various applications in chemistry and biology.

A Study on the Characteristics of NiInZnO/Ag/NiInZnO Multilayer Thin Films Deposited by RF/DC Magnetron Sputter According to the Thickness of Ag Insertion Layer (RF/DC 마그네트론 스퍼터로 제조한 NiInZnO/Ag/NiInZnO 다층박막의 Ag 금속 삽입층 두께 변화에 따른 특성 연구)

  • Kim, Nam-Ho;Kim, Eun-Mi;Heo, Gi-Seok;Yeo, In-Seon
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.12
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    • pp.2014-2018
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    • 2016
  • Transparent, conductive electrode films, showing the particular characteristics of good conductivity and high transparency, are of considerable research interest because of their potential for use in opto-electronic applications, such as smart window, photovoltaic cells and flat panel displays. Multilayer transparent electrodes, having a much lower electrical resistance than widely-used transparent conducting oxide electrodes, were prepared by using RF/DC magnetron sputtering system. The multilayer structure consisted of three layers, [NiInZnO(NIZO)/Ag/NIZO]. The optical and electrical properties of the multilayered NIZO/Ag/NIZO structure were investigated in relation to the thickness of each layer. The optical and electrical characteristics of multilayer structures have been investigated as a function of the Ag and NIZO film thickness. High-quality transparent conductive films have been obtained, with sheet resistance of $9.8{\Omega}/sq$ for Ag film thickness of 8 nm. Also the multilayer films of inserted Ag 8 nm thickness showed a high optical transmittance above 93% in the visible range. The electrical and optical properties of the new multilayer films were mainly dependent on the thickness of Ag insertion layer.

Effect of SiO2/ITO Film on Energy Conversion Efficiency of Dye-sensitized Solar Cells

  • Woo, Jong-Su;Jang, Gun-Eik
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.6
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    • pp.303-307
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    • 2015
  • Multilayered films of ITO (In2O3:SnO2 = 9:1)/SiO2 were deposited on soda-lime glass by RF/DC magnetron sputtering at 500℃ to improve the energy conversion efficiency of dye-sensitized solar cells (DSSCs). The light absorption of the dye was improved by decrease in light reflectance from the surface of the DSSCs by using an ITO film. In order to estimate the optical characteristics and compare them with experimental results, a simulation program named EMP (essential macleod program) was used. EMP results revealed that the multilayered thin films showed high transmittance (approximate average transmittance of 79%) by adjusting the SiO2 layer thickness. XRD results revealed that the ITO and TiO2 films exhibited a crystalline phase with (400) and (101) preferred orientations at 2 θ = 26.24° and 35.18°, respectively. The photocurrent-voltage (I-V) characteristics of the DSSCs were measured under AM 1.5 and 100 mW/cm2 (1 sun) by using a solar simulator. The DSSC fabricated on the ITO film with a 0.1-nm-thick SiO2 film showed a Voc of 0.697 V, Jsc of 10.596 mA/cm2 , FF of 66.423, and calculated power conversion efficiency (ηAM1.5) of 5.259%, which was the maximum value observed in this study.

Magnetic Characteristics of an InSb Hall Device of Multilayerd Structure (다충구조 InSb 홀소자의 제작과 특성)

  • 이우선;김상용;서용진;박진성;김창일
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.8
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    • pp.681-687
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    • 2000
  • Magnetic Characteristics of an InSb hall device of multilayered structures were investigated. For the measurement of electrical properties of the hall device InSb thin films fabricated with series and parallel multilayers wee evaporated. Hall coefficient hall mobility carrier density and hall voltage were measured as a function of the intensity of magnetic field. We found that the XRD analysis of InSb thin film showed good properties at 20$0^{\circ}C$ 60 minutes. Resistance of ohmic contact was increased linearly due to increasing current. Hall voltages at 0.01 T showed 5$\times$10$^{-4}$ [V] and $1.5\times$10$^{-3}$ [V]. Some of device fabrication technique and analysis of magnetic characteristics were discussed.

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Electrical properties of layered $BaTiO_3$ thin film (적층구조 $BaTiO_3$ 박막의 전기적 특성)

  • 송만호;윤기현
    • Journal of the Korean Ceramic Society
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    • v.34 no.2
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    • pp.181-187
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    • 1997
  • The layered BaTiO3 thin films with a high dielectric constant of polycrystalline BaTiO3 and a good in-sulating property of amorphous BaTiO3 were prepared. And their electrical properties were characterized with stacking methods. The BaTiO3 thin films were prepared by rf-magnetron sputtering technique using a ceramic target on Indium-doped Tin oxide coated glasses. A new stacking method resulted in higher dielec-tric constant, capacitance per unit area, and breakdown strength than those prepared by a conventional stacking method; the new method continuously decrease the substrate temperature after initial deposition of a polycrystalline BaTiO3 layer. The observed high dielectric constant could be explained only by a mul-tilayered amorphous/microcrystalline/polycrystalline structure, which was confirmed indirectly by AES depth profile.

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High temperature air-oxidation of CrAlSiN thin films (CrAlSiN 박막의 대기중 고온산화)

  • Hwang, Yeon-Sang;Won, Seong-Bin;Chunyu, Xu;Kim, Seon-Gyu;Lee, Dong-Bok
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2013.05a
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    • pp.53-54
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    • 2013
  • Nano-multilayered CrAlSiN films consisting of crystalline CrN nanolayers and amorphous AlSiN nanolayers were deposited by cathodic arc plasma deposition. Their oxidation characteristics were studied between 600 and $1000^{\circ}C$ for up to 70 h in air. During their oxidation, the amorphous AlSiN nanolayers crystallized. The formed oxides consisted primarily of $Cr_2O_3$, ${\alpha}-Al_2O_3$, $SiO_2$. The outer $Al_2O_3$ layer formed by outward diffusion of Al ions. Simultaneously, an inner ($Al_2O_3$, $Cr_2O_3$)-mixed layer formed by the inward diffusion of oxygen ions. $SiO_2$ was present mainly in the lower part of the oxide layer due to its immobility. The CrAlSiN films displayed good oxidation resistance, owing to the formation of oxide crystallites of $Cr_2O_3$, ${\alpha}-Al_2O_3$, and amorphous $SiO_2$.

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