• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.12
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• pp.1124-1128
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• 2005

New piezoelectric actuator design, which can reduce the number of the stacking layer without lowering the piezoelectric displacement, is suggested in this work. Each layer of the new designed multilayer actuator has the same electrode pattern as the cross-sectioned layer of the existing multilayer actuator has. The piezoelectric displacement was calculated by Finite-Element Method (FEM) analysis. The maximum piezoelectric displacement of the new-designed actuator with 13 layers was calculated to be almost same value (55.9 ${\mu}m$) as that of the existing actuator with 25 layers(60.1 ${\mu}m$).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.270-271
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• 2007

In this study, piezoelectric properties of PZW-PMN-PZT multilayer actuator sintered at $900^{\circ}C$ low temperature have been investigated. The multilayer actuator was fabricated by tape casting methods. The density above $8[g/cm^3]$ was obtained at all the specimens. Also, according to increasing the number of multilayer, effective electromechanical coupling factor$(k_{eff})$ showed increasing trend. The $k_{eff}$ of multilayer actuator showed the maximum value of 0.283 at 11 layer. However, according to increasing the number of multilayer, mechanical quality factor(Qm') showed decreasing tend. The Qm' of multilayer actuator showed the maximum value of 920 at 5 layer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.6
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• pp.524-529
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• 2008

In this paper, in order to develop low loss multilayer actuator, piezoelectric properties of PZW-PMN-PZT multilayer actuator sintered at $900^{\circ}C$ low temperature were investigated according to the number of multilayer. The multilayer actuator was fabricated using tape casting method and used pure Ag internal electrode. The density above $8.0\;g/cm^3$ was obtained at all specimens. With increasing number of multilayer, effective electromechanical coupling factor($k_{eff}$) was increased. $k_{eff}$ of multilayer actuator shows the maximum value of 0.283 at 11 layers actuator. However, effective mechanical quality factor(Qm') was decreased according to the increase of number of multilayer. The Qm' of multilayer actuator showed the maximum value of 920 at 5 layers actuator.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.754-758
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• 2001

A new kind of piezoelectric actuation structure named double amplified multilayer actuator is proposed. Double amplified multilayer actuator combines both dimentional and flextensional amplification concepts. As a result the displacement of the actuator can be more than one hundred times larger than the displacement of multilayer actuator and can be used in in-pipe locomation robot such as an endoscope actuator. This paper studied the dependence of displacement on actuator parameters theoretically and experimentally.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.10
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• pp.869-872
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• 2007

In this study, in order to develop low temperature sintering ultrasonic nozzle, single-layer and multilayer ring-type piezoelectric actuators were manufactured using PMN-PNN-PZT ceramics, And then the electrical properties were investigated. A ring-type piezoelectric actuator was modeled by ATILA program using finite element method(FEM). The piezoelectric actuator dimension was $\Phi26.5$ (outer diameter), $\Phi12$ (inner diameter), 3.5 mm (thickness). By FEM analysis, resonant and anti-resonant frequencies were appeared as 56.7 kHz and 61.5 kHz. The displacement increased with the increases of the number of layer. Based on the result, ring-type multilayer piezoelectric actuators were manufactured at low co-firing temperature of $940^{\circ}C$. The resonant resistance decreased with the increases of the number of layer. And also, the capacitance increased with the increases of the number of layer. The mechanical quality factor (Qm) decreased with the increases of the number of layer.

• Journal of the Korean Ceramic Society
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• v.34 no.4
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• pp.337-342
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• 1997

This paper describes the design and evaluation of new type piezoelectric bimorph actuator that shows much large mechanical response than those conventional types. The bimorph actuator has modified structure combined with the multilayer actuator(MLA) and the composite multilayer actuator called "Moonie". The design and performancean alysis of bimorph actuator are carried out with Finite Element Method (FEM). Theoretical calculation results show that the generating force and displacement of Moonie-modified bimorph actuator can be improved by about 130% and 150%, respectively. The overshooting and ringing phenomena of the bimorph can be effectively restrained by the pseudo step electric field having a rising time coincied with a period of the fundamental vibration mode of the bimorph.e bimorph.

• Journal of the Korean Ceramic Society
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• v.50 no.6
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• pp.545-550
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• 2013

Piezoelectric PMN-29PT single crystal multilayer actuators [100 $mm^2$ in cross section and 22 mm in length] are designed and fabricated by stacking square plates [$10{\times}10{\times}0.5(t)\;mm^3$] of PMN-29PT single crystals having a $d_{33}$ of about 1,500 pC/N. The characteristics of PMN-29PT multilayer actuators are compared with those of P-025.40P multilayer PZT ceramic actuators [490 $mm^2$ in cross section and 60 mm in length] produced by PI in Germany. Even though the total volume of the PMN-29PT single crystal multilayer actuator is only about 7.5% of that of the P-025.40P ceramic multilayer actuator, PMN-29PT single crystal multilayer actuators are expected to show very similar properties to P-025.40P ceramic actuators in terms of static stroke and blocking force. Therefore, on the basis of their smaller mass and volume compared to the conventional PZT ceramic multilayer actuators, piezoelectric PMN-29PT single crystal multilayer actuators have significant potential regarding the development of various high performance actuators for aerospace subsystems.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.1
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• pp.33-38
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• 2000

In this study, multilayer piezoelectric actuators were fabricated with 75 layers by a conventional multi-layer capacitor (MLC) techniques, using 70Ag/30Pd paste as an internal electrode which can be sintered at low temperature and have cost down effect in mass productions. The multilayer piezoelectric actua-tors had no defects such as diffusions of internal electrode to ceramic bodies and shortages of internal electrodes. The multilayer piezoelectric actuators did not show the crack in the ceramics parts and the gapping phenomena in the external eletrodes when Ag paste was used as external electrodes. The multilayer piezoelectric actuators showed a maximum displacement of 4${\mu}{\textrm}{m}$ at 100V dc voltage and kept the maximum displacement constant for 300 seconds. The multilayer piezoelectric actuators showed good matching properties between ceramic bodies and AgPd internal electrodes. We confirmed the possibility of large-scaled production of the multilayer piezoelectric actuators with superior electrical properties and cost down effect using 70Ag/30Pd paste as an internal electrodes.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.63-64
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• 2006

In this paper, multilayer piezoelectric actuator was fabricated in order to develop ultrasonic linear motor. Multilayer actuator showed a high density of 7.78[$g/cm^3$], a large effective electromechanical coupling factor($K_{eff}$) of 0.259, a high mechanical quality factor( Qm ') of 1301, and high capacitance(c) of 19.32[nF]. Curie temperature was $343[^{\circ}C]$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.12
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• pp.1118-1122
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• 2006

In this study, in order to develop the low temperature sintering multilayer piezoelectric actuator, PMN-PNN-PZT system ceramics were manufactured and their microstructure, ferroelectric and piezoelectric properties were investigated. By increasing sintering temperature, remanent polarization$(P_r)$ was increased due to the increase of sinterability and grain size. However, coercive $field(E_c)$ showed an opposite tendency to remanent polarization owing to the feasibility of domain wall motion. At the sintering temperature of $900^{\circ}C$, dielectric $constant({\varepsilon}_r)$, electromechanical coupling $factor(k_p)$, piezoelectric $constant(d_{33})$ and mechanical quality $factor(Q_m)$ showed the optimal value of 1095, 0.60, 363 and 1055, respectively, for multilayer piezoelectric actuator application.