• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1438-1441
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• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• Proceedings of the Korean Society of Broadcast Engineers Conference
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• 1999.06a
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• pp.77-82
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• 1999

Information about camera operating such as zoom, focus, pan, tilt and tracking is useful not only for efficient video coding, but also for content-based video representation. A camera operating parameter measurement system designed specifically for these applications is therefore developed. This system, implemented in real time and synchronized with the video signal, measures the precise camera operating parameters. We calibrated the camera lens using a camera model that accounts for redial lens distortion. The system is then applied to infer image motion from pan and tilt operating parameters. The experimental results show that the inferred motion coincides with the actual motion very well, with an error of less than 0.5 pixel even for large motion up to 80 pixels.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.483-487
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• 1996

We consider the estimation of the position and orientation of 6 DOF motion bed (Stewart platform) from the measured cylinder length. The solution of forward kinematics is not solved yet as a useful realtime application tool because of the complity of the equation with multiple solutiple solutions. Hence we suggest an algorithm for the estimation of forward kinematics solution using Luenberger observer withnonlinear error correction term. The Luenberger observer withlinear model shows that the estimation error does not go to zero in steadystate due to the linearization error of the dynamic model. Hence the linear observer is modified using nonlinear measurement error equation and we prove thd practical stability of the estimation error dynamics of the proposed observer using lyapunov function.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.863-872
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• 2012

The squareness measurement of driving axes of a machine tool is very important to evaluate the performance of the machine. Laser interferometer measurement system is one of the most reliable equipment to measure the squareness. However, squareness measurement using laser system with an optical square result in restriction of straightness optics setup and Abbe's offset. This offset combines with angular errors during the motion of an axis to cause Abbe's error. In addition, the difficulty in optical square setup causes restriction of other optics and limitation of measurable range. In this paper, mathematical approaches are presented to eliminate the Abbe's error and to estimate squareness for full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurement of 3 axis machine tool were conducted and the proposed techniques were used for squareness evaluation with elimination of Abbe's error and squareness estimation for the full travel range.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.519-520
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1005-1008
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• 1995

The spindle is a very important part of machine tool. The evaluation of spindle motion is required for improving the performance of machine tools. The evaluation tools have been developed for precison spindle by the reversal technique, and 3D error map motion of spindle is proposed. This technique makes us understand the total movement of spindle more easily. The proposed technique has been successfully applied to practical machine tools, giving high potentials for the spindle performance measurement.

• Journal of Institute of Control, Robotics and Systems
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• v.3 no.3
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• pp.289-296
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• 1997

In this paper, a method has been proposed for error measurement/diagnosis of CNC machine tools using the ball link bar on three dimensional space. For the circular motion error measurement, deviation between the desired and actual test path has been measured and analysed using a new type of ball link which incorporates ideal three point contact between reference balls and sockets. Computer program for the error evaluation has been developed and implemented under PC environment. Using the developed program, the circular test data on a CNC machine tool have been analysed, and thus, machine tool errors were effectively evaluated.

• KIPS Transactions on Software and Data Engineering
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• v.12 no.3
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• pp.141-148
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• 2023

Accurate overlay metrology is essential to achieve high yields of semiconductor products. Overlay metrology performance is greatly affected by overlay target design and measurement method. Therefore, in order to improve the performance of the overlay target, measurement methods applicable to various targets are required. In this study, we propose a new algorithm that can measure image-based overlay. The proposed measurement algorithm can estimate the sub-pixel position by using a motion vector. The motion vector may estimate the position of the sub-pixel unit by applying a quadratic equation model through polynomial expansion using pixels in the selected region. The measurement method using the motion vector can calculate the stacking error in all directions at once, unlike the existing correlation coefficient-based measurement method that calculates the stacking error on the X-axis and the Y-axis, respectively. Therefore, more accurate overlay measurement is possible by reflecting the relationship between the X-axis and the Y-axis. However, since the amount of computation is increased compared to the existing correlation coefficient-based algorithm, more computation time may be required. The purpose of this study is not to present an algorithm improved over the existing method, but to suggest a direction for a new measurement method. Through the experimental results, it was confirmed that measurement results similar to those of the existing method could be obtained.

• Journal of Information Processing Systems
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• v.6 no.3
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• pp.347-358
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• 2010

This paper presents a measurement system for 3D hand-drawn gesture motion. Many pen-type input devices with Inertial Measurement Units (IMU) have been developed to estimate 3D hand-drawn gesture using the measured acceleration and/or the angular velocity of the device. The crucial procedure in developing these devices is to measure and to analyze their motion or trajectory. In order to verify the trajectory estimated by an IMU-based input device, it is necessary to compare the estimated trajectory to the real trajectory. For measuring the real trajectory of the pen-type device, a PHANToMTM haptic device is utilized because it allows us to measure the 3D motion of the object in real-time. Even though the PHANToMTM measures the position of the hand gesture well, poor initialization may produce a large amount of error. Therefore, this paper proposes a calibration method which can minimize measurement errors.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.1
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• pp.78-84
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• 2014

The rotation of a spindle unit must be accurate for high-quality machining and to improve the quality of the machine tools.Therefore, the proper measurement of the rotation accuracy and ensuring a proper analysis are very important. Separate processes are necessary because spindle errors and roundness errors associated with the test balls can both factor into the measured rotation error values. We used three methods to discern test ball errors and analyzed which could be deemed as the most proper technique in a test of the rotation accuracy of the main spindle of a machine tool.