• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Journal of Environmental Health Sciences
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• v.30 no.3
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• pp.221-229
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• 2004

We estimated decreasing rate of indoor air pollutants which are PM10 and $NO_2$ by the air cleaner in indoor environment. This study respectively examined concentration of PM10 and $NO_2$ two times in 34 sites located in Seoul and Kyung-gi Do from April to September in 2003. Sectional period was respectively divided for operating the air cleaner and non-operating the air cleaner. Moreover, questionnaire was executed to grasp physical characteristic of objective building and residential characteristic of residents by using method of self-entry. There was a trend that concentration of PM10 and $NO_2$ separated number of residents during operating period respectively decreased among indoor air. According to the existence of smoker in indoor, both concentration of PM10 and $NO_2$ during operating period decreased in each case, and according to existence of pets, both cases decreased concentration of pollutants by operating the air cleaner. We used Monte-Calro simulation to remove uncertainty and identify efficiency of eliminated pollutants such as PM10 and $NO_2$ by the air cleaner. Average efficiency of removal for PM10 and $NO_2$ were 61.84${\pm}$23.04% and 48.67${\pm}$18.03% respectively.

• Journal of the Institute of Electronics and Information Engineers
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• v.52 no.8
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• pp.148-155
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• 2015

The Levenberg-Marquardt method is a well known solution about the least square problem. However, in a Target Motion Analysis(TMA) application most of researches have used the Gauss-Newton method as a batch estimator, which of inverse matrix calculation may causes instability problem. In this paper, Levenberg-Marquardt method is applied to TMA problem to prevent its divergence. In experiment, its performance is compared with Gauss-Newton in domain of range, course and speed. Monte Carlo simulation reveals the convergence time and reliability of the TMA based on Levenberg-Marquardt.

• Journal of radiological science and technology
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• v.43 no.3
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• pp.169-176
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• 2020

Interventional radiology is performed under real-time fluoroscopy, and patients are exposed to a wide range of exposures for a long period of time depending on the examination and procedure. However, studies on radiation protection for patients during an intervention are insufficient. This study aims to evaluate the doses exposed during the intervention and the applicability of 3D printing materials. The organ dose for each intervention site was evaluated using a monte carlo simulatio. Also, the dose reduction effect of the critical organs was calculated when using a shielding device using 3D printing materials. As a result, the organ dose distribution for each intervention site showed a lower dose distribution for organs located far from the x-ray tube. It was analyzed that the influence of scattered rays was higher in the superficial organs of the back of the human body where x-rays were incident. The dose reduction effect on the critical organ using the 3D printing shield showed the highest testis among the gonads, and in the case of other organs, the dose reduction effect gradually decreased in the order of the eye, thyroid, breast, and ovary. Accordingly, it is judged that the 3D printed shield will be sufficiently usable as a shielding device for the radiation protection of critical organs.

• Journal of Korean Society for Quality Management
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• v.25 no.3
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• pp.22-38
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• 1997

In a traditional sequential acceptance sampling plan, it is assumed that the sampled items are independent each other. In this paper, stochastically dependent sequential acceptance sampling plans are dealt when there exists dependency between sampled items. Monte-Calro algorithm is used to find the acceptance and rejection probabilities of a lot. The number of defectives for the test to be accepted and rejected in probability ratio sequential test can be found by using these probabilities. The formula for measures of performance of these sampling plans is developed. Type I and II error probabilities are estimated by simulation. This research can be a, pp.ied to sequential sampling procedures in place of control charts where there is a recognized and necessary dependency during the production processes. Also, dependent multiple acceptance sampling plans can be derived by extending this sequential sampling procedure. As a numerical example, a Markov dependent process model is given, and the characteristics of the sampling plans are examined according to the change of the dependency factor.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.523-526
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• 2011

This is concerned with the structural reliability analysis(RA) considering uncertainties in material properties. This method is performed by the stochastic process using Kriging with calculating the distribution of probability and equation of limit state for saving calculated and analyzed time. The proposed methodology is applied to the rocket motor case and compared with monte-calro simulation in efficiency and accuracy of this process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.04a
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• pp.154-159
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• 1997

This paper describes the electron transport characteristic in SiH$_4$ gas calculated for range of E/N values from 0.5~300(Td) by the Monte Calro simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization coefficients longitudinal and transverse diffusion coefficients, characteristics energy agree with thee experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at EN : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

• 한국가시화정보학회:학술대회논문집
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• 2001.12a
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• pp.14-22
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• 2001

The frequency responses on the sub-pixel evaluation technique were investigated using the Monte-calro Simulation technique. The frequency response by the FFT based cross-correlation gives very good results, however, the gain loss does exist for the small displacement, (less than 0.5 pixel). While, the no gain loss is observed in the Direct Cross-correlation, however, the sub-pixel accuracy was limited to be about 0.1 pixel, i.e., it could not detect the small displacement. To detect the higher accurate sub-pixel displacement, the gradient based technique is the best. For the small interrogation area (e.g., 4x4), only the gradient technique can detect the small displacement correctly.

• Journal of radiological science and technology
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• v.39 no.4
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• pp.595-600
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• 2016

The diagnostic multileaf collimator(MLC) was designed for patient dose reduction in diagnostic radiography We used monte carlo simulation code (MCNPX, LANL, USA) to evaluate efficiency of shielding material for making diagnostic MLC as preliminary study. The diagnostic radiography unit was designed using SRS-78 program according to tube voltage (80,100,120 kVp) and acquired energy spectrums. The shielding material was SKD11 alloy tool steel that is composed of 1.6% carbon(C), 0.4% silicon(Si), 0.6% manganese (Mn), 5% chromium (Cr), 1% molybdenum(Mo) and vanadium(V). The density of it was $7.89g/cm^3$.Using tally card 6, we calculated the shielding efficiency of MLC according to tube voltage. The results was that 98.3% (80 kVp), 95.7 %(100 kVp), 93.6% (120 kVp). We certified efficiency of diagnostic MLC fabricated from SKD11 alloy steel by monte calro simulation. Based on the results, we designed the diagnostic MLC and will develop the diagnostic MLC for reduction of patient dose in diagnostic radiography.

• Applied Chemistry for Engineering
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• v.10 no.2
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• pp.225-230
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• 1999

Low pressure metal organic chemical vapor deposition (LPMOCVD) of $Li_2O$ solid thin films from Li(DPM) in nitrogen-oxygen or argon-oxygen atmosphere was experimentally investigated by using a small hot wall tubular type reactor. XRD and ESCA analysis revealed that $Li_2CO_3$ film grew in nitrogen-oxygen atmosphere and $Li_2O$ grew in argon-oxygen atmosphere. The grown lithium oxide or carbonate reacted with silicon or silica base materials to produce silicates. The CVD model analysis by means of the well-known micro trench method and Monte Carlo simulation was not fully successful, but a set of data on gas phase reaction rate constant and surface reaction constant was obtained.