• 제목/요약/키워드: Molecular beam Epitaxy

검색결과 352건 처리시간 0.046초

플라즈마분자선에피탁시법으로 성장한 산화비스무스아연 박막의 구조특성 (Structural Characterization of Bismuth Zinc Oxide Thin Films Grown by Plasma-Assisted Molecular Beam Epitaxy)

  • 임동석;신은정;임세환;한석규;이효성;홍순구;정명호;이정용;조형균
    • 한국재료학회지
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    • 제21권10호
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    • pp.563-567
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    • 2011
  • We report the structural characterization of $Bi_xZn_{1-x}O$ thin films grown on c-plane sapphire substrates by plasma-assisted molecular beam epitaxy. By increasing the Bi flux during the growth process, $Bi_xZn_{1-x}O$ thin films with various Bi contents (x = 0~13.17 atomic %) were prepared. X-ray diffraction (XRD) measurements revealed the formation of Bi-oxide phase in (Bi)ZnO after increasing the Bi content. However, it was impossible to determine whether the formed Bi-oxide phase was the monoclinic structure ${\alpha}-Bi_2O_3$ or the tetragonal structure ${\beta}-Bi_2O_3$ by means of XRD ${\theta}-2{\theta}$ measurements, as the observed diffraction peaks of the $2{\theta}$ value at ~28 were very close to reflection of the (012) plane for the monoclinic structure ${\alpha}-Bi_2O_3$ at 28.064 and the reflection of the (201) plane for the tetragonal structure ${\beta}-Bi_2O_3$ at 27.946. By means of transmission electron microscopy (TEM) using a diffraction pattern analysis and a high-resolution lattice image, it was finally determined as the monoclinic structure ${\alpha}-Bi_2O_3$ phase. To investigate the distribution of the Bi and Bi-oxide phases in BiZnO films, elemental mapping using energy dispersive spectroscopy equipped with TEM was performed. Considering both the XRD and the elemental mapping results, it was concluded that hexagonal-structure wurtzite $Bi_xZn_{1-x}O$ thin films were grown at a low Bi content (x = ~2.37 atomic %) without the formation of ${\alpha}-Bi_2O_3$. However, the increased Bi content (x = 4.63~13.17 atomic %) resulted in the formation of the ${\alpha}-Bi_2O_3$ phase in the wurtzite (Bi)ZnO matrix.

칼코겐화물과 산화물 이종구조의 각도분해능 광전자분광 연구 (Angle-resolved photoemission spectrscopy for chalcogenide and oxide heterostructures)

  • 장영준
    • 진공이야기
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    • 제5권2호
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    • pp.10-17
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    • 2018
  • Chalcogenide and oxide heterostructures have been studied as a next-generation electronic materials, due to their interesting electronic properties, such as direct bandgap semiconductor, ferroelectricity, ferromagnetism, superconductivity, charge-density waves, and metal-insulator transition, and their modification near heterointerfaces, so called, electronic reconstruction. An angle-resolved photoemission spectroscopy (ARPES) is a powerful technique to unveil such novel electronic phases in detail, especially combined with high quality thin film preparation methods, such as, molecular beam epitaxy and pulsed laser deposition. In this article, the recent ARPES results in chalcogenide and oxide thin films will be introduced.

PLD 법으로 제조된 Co-doped $TiO_2$박막의 자기 특성 연구

  • 이재열;이우영;최덕균;오영제
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2002년도 동계연구발표회 논문개요집
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    • pp.96-97
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    • 2002
  • 최근에 스핀트로닉스 (spintronics) 분야에 대한 관심이 높아지면서 전기전도성과 자성을 동시에 지니는 자성반도체에 관한 연구가 다양하게 진행되어지고 있다. 특히 DMS (diluted magnetic semiconductor)는 상당한 관심을 가지고 많은 학자들에 의해 오랜 기간 연구되어져 왔고$^{1.3)}$ 특히, Matsumoto et al. $^{4.5)}$ 은 Co-doped anatase TiO$_2$ 박막을 LMBE (laser molecular beam epitaxy)로 제작하여 상온에서의 강자성을 발표한 바 있다. (중략)

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