• 제목/요약/키워드: Modified LIGA process

검색결과 14건 처리시간 0.018초

변형 DEEP X-ray 공정과 Hot Embossing 공정을 이용한 마이크로 렌즈 및 어레이의 제작 (Microlens and Arrays Fabrication by the Modified LIGA and Hot Embossing Process)

  • 이정아;이현섭;이성근;이승섭;권태헌
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.228-232
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    • 2003
  • Mircolens and microlens arrays are realized using a novel fabrication technology based on the exposure of a resist, usually PMMA, to deep X-rays and subsequent thermal treatment. Hot embossing process is also studied for mass production. The fabrication technology is very simple and produces microlenses and microlens arrays with good surface roughness of several nm. The molecular weight and glass transition temperature of PMMA is reduced when it is irradiated with deep X-rays. The microlenses were produced through the effects of volume change, surface tension. and reflow during thermal treatment of irradiated PMMA. A hot embossing machine is designed and manufactured with a servo motor transfer system. The hot embossing process follows the steps of heating mold to the desired temperature, embossing a mold insert on substrate. cooling mold to the de-embossing temperature. and de-embossing. Microlenses were produced with diameters ranging from 30 to 1500 ${\mu}{\textrm}{m}$. The surface X-ray mask is also fabricated to realize microlens arrays on PMMA sheet with a large area.

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Fabrication and Modeling of Microlens Array by a Modified LIGA Process

  • Kim Dong Sung;Lee Hyun Sup;Yang Sang Sik;Lee Bong-Kee;Lee Sung-Keun;Kwon Tai Hun;Lee Seung S.
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 The Korea-Japan Plastics Processing Joint Seminar
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    • pp.7-13
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    • 2003
  • Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for micro lens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of micro lens which depend on the thermal treatment. For the replication of micro lens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of micro lenses. Fabricated microlenses showed good surface roughness with the order of 1nm.

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휴대폰용 2인치 LCD-BLU의 광특성에 미치는 광학패턴 세장비의 영향 연구 : II. 금형 및 광특성 (A Study on the Effect of Optical Characteristics in 2 inch LCD-BLU by Aspect Ratio of Optical Pattern: II. Mold and Optical Characteristics)

  • 김종선;고영배;유재원;민인기;황철진;윤경환
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2006년도 춘계학술대회 논문집
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    • pp.95-98
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    • 2006
  • LCD-BLU (Back Light Unit) is one of kernel parts of LCD unit. The fabrication method of a 3-D micro mold patterned with micro-lenses for the LGP (Light Guiding Plate), one of the most important parts of LCD-BLU, was presented. Instead of dot pattern made by etching, 3-D optical pattern design with $50{\mu}m$ micro-lens was applied in the present study. The micro-lens pattern fabricated by modified LiGA with thermal reflow process was applied to the optical design of LGP. The positive micro-lens patterned injection mold with different aspect ratios (i.e. 0.3 and 0.4) was fabricated with modified LiGA with thermal reflow process. The brightness of LCD-BLU increased as aspect ratio of micro-lens increased.

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박형 도광판의 음각, 양각 마이크로 패턴 성형성에 관한 연구 (Study on the gate cutting of light guiding plate for mobile using quenching element)

  • 황철진;김종선;민인기;김종덕;윤경환
    • Design & Manufacturing
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    • 제2권5호
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    • pp.1-4
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    • 2008
  • LCD-BLU (Liquid Crystal Display - Back Light Unit) is one of kernel parts of LCD unit and it consists of several optical sheets(such as prism, diffuser and protector sheets), LCP (Light Guide Plate), light source (CCFL or LED) and mold frame. The LGP of LCD-BLU is usually manufactured by forming numerous dots with $50-200{\mu}m$ in diameter on it by erosion method. But the surface of the erosion dots of LGP is very rough due to the characteristics of the erosion process during the mold fabrication, so that its light loss is high along with the dispersion of light into the surface. Accordingly, there is a limit in raising the luminance of LCD-BLU. Especially, the negative and positive micro-lens pattern fabricated by modified LiGA with thermal reflow process was applied to the optical design of LGP.

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