• Title/Summary/Keyword: Mode Mixing

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Effect of Ta/Cu Film Stack Structures on the Interfacial Adhesion Energy for Advanced Interconnects (미세 배선 적용을 위한 Ta/Cu 적층 구조에 따른 계면접착에너지 평가 및 분석)

  • Son, Kirak;Kim, Sungtae;Kim, Cheol;Kim, Gahui;Joo, Young-Chang;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.1
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    • pp.39-46
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    • 2021
  • The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

Sentiment Analysis of Movie Review Using Integrated CNN-LSTM Mode (CNN-LSTM 조합모델을 이용한 영화리뷰 감성분석)

  • Park, Ho-yeon;Kim, Kyoung-jae
    • Journal of Intelligence and Information Systems
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    • v.25 no.4
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    • pp.141-154
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    • 2019
  • Rapid growth of internet technology and social media is progressing. Data mining technology has evolved to enable unstructured document representations in a variety of applications. Sentiment analysis is an important technology that can distinguish poor or high-quality content through text data of products, and it has proliferated during text mining. Sentiment analysis mainly analyzes people's opinions in text data by assigning predefined data categories as positive and negative. This has been studied in various directions in terms of accuracy from simple rule-based to dictionary-based approaches using predefined labels. In fact, sentiment analysis is one of the most active researches in natural language processing and is widely studied in text mining. When real online reviews aren't available for others, it's not only easy to openly collect information, but it also affects your business. In marketing, real-world information from customers is gathered on websites, not surveys. Depending on whether the website's posts are positive or negative, the customer response is reflected in the sales and tries to identify the information. However, many reviews on a website are not always good, and difficult to identify. The earlier studies in this research area used the reviews data of the Amazon.com shopping mal, but the research data used in the recent studies uses the data for stock market trends, blogs, news articles, weather forecasts, IMDB, and facebook etc. However, the lack of accuracy is recognized because sentiment calculations are changed according to the subject, paragraph, sentiment lexicon direction, and sentence strength. This study aims to classify the polarity analysis of sentiment analysis into positive and negative categories and increase the prediction accuracy of the polarity analysis using the pretrained IMDB review data set. First, the text classification algorithm related to sentiment analysis adopts the popular machine learning algorithms such as NB (naive bayes), SVM (support vector machines), XGboost, RF (random forests), and Gradient Boost as comparative models. Second, deep learning has demonstrated discriminative features that can extract complex features of data. Representative algorithms are CNN (convolution neural networks), RNN (recurrent neural networks), LSTM (long-short term memory). CNN can be used similarly to BoW when processing a sentence in vector format, but does not consider sequential data attributes. RNN can handle well in order because it takes into account the time information of the data, but there is a long-term dependency on memory. To solve the problem of long-term dependence, LSTM is used. For the comparison, CNN and LSTM were chosen as simple deep learning models. In addition to classical machine learning algorithms, CNN, LSTM, and the integrated models were analyzed. Although there are many parameters for the algorithms, we examined the relationship between numerical value and precision to find the optimal combination. And, we tried to figure out how the models work well for sentiment analysis and how these models work. This study proposes integrated CNN and LSTM algorithms to extract the positive and negative features of text analysis. The reasons for mixing these two algorithms are as follows. CNN can extract features for the classification automatically by applying convolution layer and massively parallel processing. LSTM is not capable of highly parallel processing. Like faucets, the LSTM has input, output, and forget gates that can be moved and controlled at a desired time. These gates have the advantage of placing memory blocks on hidden nodes. The memory block of the LSTM may not store all the data, but it can solve the CNN's long-term dependency problem. Furthermore, when LSTM is used in CNN's pooling layer, it has an end-to-end structure, so that spatial and temporal features can be designed simultaneously. In combination with CNN-LSTM, 90.33% accuracy was measured. This is slower than CNN, but faster than LSTM. The presented model was more accurate than other models. In addition, each word embedding layer can be improved when training the kernel step by step. CNN-LSTM can improve the weakness of each model, and there is an advantage of improving the learning by layer using the end-to-end structure of LSTM. Based on these reasons, this study tries to enhance the classification accuracy of movie reviews using the integrated CNN-LSTM model.